JPS63162860U - - Google Patents
Info
- Publication number
- JPS63162860U JPS63162860U JP5488987U JP5488987U JPS63162860U JP S63162860 U JPS63162860 U JP S63162860U JP 5488987 U JP5488987 U JP 5488987U JP 5488987 U JP5488987 U JP 5488987U JP S63162860 U JPS63162860 U JP S63162860U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- electron beam
- hole
- evaporation material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5488987U JPS63162860U (enExample) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5488987U JPS63162860U (enExample) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162860U true JPS63162860U (enExample) | 1988-10-24 |
Family
ID=30882292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5488987U Pending JPS63162860U (enExample) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162860U (enExample) |
-
1987
- 1987-04-10 JP JP5488987U patent/JPS63162860U/ja active Pending