JPS6132996Y2 - - Google Patents
Info
- Publication number
- JPS6132996Y2 JPS6132996Y2 JP17754882U JP17754882U JPS6132996Y2 JP S6132996 Y2 JPS6132996 Y2 JP S6132996Y2 JP 17754882 U JP17754882 U JP 17754882U JP 17754882 U JP17754882 U JP 17754882U JP S6132996 Y2 JPS6132996 Y2 JP S6132996Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- evaporation
- electrode unit
- presser
- electrode terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 22
- 230000008020 evaporation Effects 0.000 claims description 22
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17754882U JPS5980468U (ja) | 1982-11-24 | 1982-11-24 | 真空蒸着装置の蒸発電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17754882U JPS5980468U (ja) | 1982-11-24 | 1982-11-24 | 真空蒸着装置の蒸発電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5980468U JPS5980468U (ja) | 1984-05-31 |
| JPS6132996Y2 true JPS6132996Y2 (enExample) | 1986-09-26 |
Family
ID=30385703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17754882U Granted JPS5980468U (ja) | 1982-11-24 | 1982-11-24 | 真空蒸着装置の蒸発電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5980468U (enExample) |
-
1982
- 1982-11-24 JP JP17754882U patent/JPS5980468U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5980468U (ja) | 1984-05-31 |
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