JPS63162539U - - Google Patents
Info
- Publication number
- JPS63162539U JPS63162539U JP5514387U JP5514387U JPS63162539U JP S63162539 U JPS63162539 U JP S63162539U JP 5514387 U JP5514387 U JP 5514387U JP 5514387 U JP5514387 U JP 5514387U JP S63162539 U JPS63162539 U JP S63162539U
- Authority
- JP
- Japan
- Prior art keywords
- plating liquid
- liquid tank
- side electrode
- semiconductor wafer
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5514387U JPS63162539U (cs) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5514387U JPS63162539U (cs) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162539U true JPS63162539U (cs) | 1988-10-24 |
Family
ID=30882780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5514387U Pending JPS63162539U (cs) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162539U (cs) |
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1987
- 1987-04-10 JP JP5514387U patent/JPS63162539U/ja active Pending