JPS63162528U - - Google Patents

Info

Publication number
JPS63162528U
JPS63162528U JP5514787U JP5514787U JPS63162528U JP S63162528 U JPS63162528 U JP S63162528U JP 5514787 U JP5514787 U JP 5514787U JP 5514787 U JP5514787 U JP 5514787U JP S63162528 U JPS63162528 U JP S63162528U
Authority
JP
Japan
Prior art keywords
stage
liquid processing
wafer
supported
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5514787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH051075Y2 (US07714131-20100511-C00024.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987055147U priority Critical patent/JPH051075Y2/ja
Publication of JPS63162528U publication Critical patent/JPS63162528U/ja
Application granted granted Critical
Publication of JPH051075Y2 publication Critical patent/JPH051075Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1987055147U 1987-04-10 1987-04-10 Expired - Lifetime JPH051075Y2 (US07714131-20100511-C00024.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987055147U JPH051075Y2 (US07714131-20100511-C00024.png) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987055147U JPH051075Y2 (US07714131-20100511-C00024.png) 1987-04-10 1987-04-10

Publications (2)

Publication Number Publication Date
JPS63162528U true JPS63162528U (US07714131-20100511-C00024.png) 1988-10-24
JPH051075Y2 JPH051075Y2 (US07714131-20100511-C00024.png) 1993-01-12

Family

ID=30882788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987055147U Expired - Lifetime JPH051075Y2 (US07714131-20100511-C00024.png) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPH051075Y2 (US07714131-20100511-C00024.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005339A (ja) * 2003-06-10 2005-01-06 Tokyo Ohka Kogyo Co Ltd 基板の現像装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887832A (ja) * 1981-11-20 1983-05-25 Toshiba Corp 半導体処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887832A (ja) * 1981-11-20 1983-05-25 Toshiba Corp 半導体処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005005339A (ja) * 2003-06-10 2005-01-06 Tokyo Ohka Kogyo Co Ltd 基板の現像装置

Also Published As

Publication number Publication date
JPH051075Y2 (US07714131-20100511-C00024.png) 1993-01-12

Similar Documents

Publication Publication Date Title
JPS63162528U (US07714131-20100511-C00024.png)
JPS63172127U (US07714131-20100511-C00024.png)
JPH0170338U (US07714131-20100511-C00024.png)
JPS6351435U (US07714131-20100511-C00024.png)
JPS6364032U (US07714131-20100511-C00024.png)
JPS61186233U (US07714131-20100511-C00024.png)
JPS6378949U (US07714131-20100511-C00024.png)
JPS63144953U (US07714131-20100511-C00024.png)
JPS6292646U (US07714131-20100511-C00024.png)
JPH01140824U (US07714131-20100511-C00024.png)
JPH0330427U (US07714131-20100511-C00024.png)
JPS6325949U (US07714131-20100511-C00024.png)
JPS62120341U (US07714131-20100511-C00024.png)
JPH03109328U (US07714131-20100511-C00024.png)
JPS5974888U (ja) 洗浄装置
JPS6417369U (US07714131-20100511-C00024.png)
JPS60153287U (ja) 赤ちやんが一人で風呂に入れる器具
JPS6351445U (US07714131-20100511-C00024.png)
JPS61203360U (US07714131-20100511-C00024.png)
JPH0265341U (US07714131-20100511-C00024.png)
JPS63140623U (US07714131-20100511-C00024.png)
JPS6111979U (ja) レジスト塗布装置
JPS6278287U (US07714131-20100511-C00024.png)
JPS6446737U (US07714131-20100511-C00024.png)
JPS62169688U (US07714131-20100511-C00024.png)