JPS63160126A - Formation of pressure receiving element for pressure sensor - Google Patents
Formation of pressure receiving element for pressure sensorInfo
- Publication number
- JPS63160126A JPS63160126A JP31022886A JP31022886A JPS63160126A JP S63160126 A JPS63160126 A JP S63160126A JP 31022886 A JP31022886 A JP 31022886A JP 31022886 A JP31022886 A JP 31022886A JP S63160126 A JPS63160126 A JP S63160126A
- Authority
- JP
- Japan
- Prior art keywords
- pressure receiving
- pressure
- receiving element
- diaphragm
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 title description 2
- 238000007740 vapor deposition Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 7
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 239000000057 synthetic resin Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 description 7
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Switches Operated By Changes In Physical Conditions (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（イ）発明の分野
この発明は、ガス漏れその他の流体圧を検出する圧力セ
ンサに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of the Invention The present invention relates to a pressure sensor for detecting gas leakage and other fluid pressures.
（ロ）°発明の背景
例えば、２０〜８０ミリ水柱の微厚で作動するように設
計されたガス漏れ検出用の圧力センサは、圧力変化を検
出するための受圧素子としてダイヤフラム、金属ベロー
ズその他を用い、このダイヤフラム等の動きをスイッチ
のオン・オフ動作に置き換えるように構成されている。(b) Background of the Invention For example, a pressure sensor for detecting gas leaks designed to operate in a water column with a slight thickness of 20 to 80 mm uses a diaphragm, metal bellows, etc. as a pressure receiving element to detect pressure changes. The device is constructed so that the movement of this diaphragm or the like is replaced by the on/off operation of a switch.
その場合、上記受圧素子を受圧ケースに取付ける方法と
して、
第４図（イ）のように、ダイヤフラム３１の周縁部を保
護板３２とパツキン３３との間で挟みつけた状態で受圧
ケース３４にカシメ部３５により加圧固定するもの、
第４図（ロ）のように、ダイヤフラム３１を受圧ケース
３４に溶接３６に固定するもの、また第４図（ハ〉のよ
うに、ベローズ３７を上下のパツキン３８．３８で挟ん
で受圧ケース３４にカシメ部３９で加圧固定するもの、
等が採用されている。In that case, the method of attaching the pressure receiving element to the pressure receiving case is as shown in FIG. As shown in FIG. 4(B), the diaphragm 31 is fixed to the pressure receiving case 34 by welding 36, and as shown in FIG. 38. Something that is sandwiched between 38 and fixed to the pressure receiving case 34 under pressure with the caulking part 39,
etc. have been adopted.
しかし、これらの方法ではパツキン等の必要から部品点
数が増加し１．カシメ加工および溶接加工による固定方
法が難しく、部品精度をきびしくする必要が生じると共
に、カシメ時の加圧力、溶接時の熱歪がダイヤフラム３
１、ベローズ３７に及んでその反転動作特性、伸縮動作
特性が変化し、しかして、圧力センサのスイッチング特
性にバラツキを生じさせることになっている。However, in these methods, the number of parts increases due to the need for packing etc.1. Fixing methods using caulking and welding are difficult, and it is necessary to maintain strict precision of the parts, and the pressurizing force during caulking and thermal distortion during welding may cause damage to the diaphragm 3.
1. The reversal operation characteristics and expansion and contraction operation characteristics of the bellows 37 change, resulting in variations in the switching characteristics of the pressure sensor.
また、溶接部の残留応力による応力腐蝕、クラックの成
長、粒界腐蝕の問題を生じた。Additionally, problems of stress corrosion, crack growth, and intergranular corrosion due to residual stress in the welded portion occurred.
（ハ）発明の目的
この発明は、センサ本体に受圧素子をカシメ加工や溶接
加工を用いることなく一体に取付（プることにより、上
記問題を解決する圧力センサの受圧素子形成方法の提供
を目的とする。(C) Purpose of the Invention The purpose of the present invention is to provide a method for forming a pressure receiving element of a pressure sensor that solves the above problem by integrally attaching the pressure receiving element to the sensor body without using caulking or welding. shall be.
（ニ）発明の＋１４成
この発明は、センサ本体の受圧素子取付は位置に素子取
付は形状に沿って合成樹脂製蒸着台を七−ルド成形し、
この蒸着台上に受圧素子を電気蒸着にて形成し、該蒸着
台を溶解して除去することにより上記受圧素子をセンサ
本体に一体に取イ」けた圧力センサの受圧素子形成方法
であることを特徴とする。(d) +14th feature of the invention In this invention, a pressure-receiving element of the sensor body is mounted at a position, and a synthetic resin vapor deposition stand is molded according to the shape of the element.
This is a method of forming a pressure receiving element of a pressure sensor, in which a pressure receiving element is formed on this vapor deposition table by electric vapor deposition, and the pressure receiving element is integrally attached to the sensor body by dissolving and removing the vapor deposition table. Features.
（ホ）発明の作用
この発明によれば、電気蒸着によって合成樹脂製蒸着台
の上に受圧素子を形成するから、この受圧素子の取付は
位置および形状は該蒸着台の成形形状によって決定され
、しかも受圧素子は該素子形成時に加圧力や熱歪等の外
力が作用することなくセンサ本体に一体化される。(E) Effect of the Invention According to the present invention, since the pressure receiving element is formed on the synthetic resin vapor deposition table by electrical vapor deposition, the mounting position and shape of the pressure receiving element are determined by the molded shape of the vapor deposition table. Moreover, the pressure-receiving element is integrated into the sensor body without any external force such as pressurizing force or thermal strain being applied during the formation of the element.
（へ）発明の効果
従って、受圧素子は、センサ本体に正確に位置決めされ
て取付りられると共に、受圧素子の反転動作特性、伸縮
動作特性が一体化してスイッチング特性のバラツキのな
い圧力センサが製作されるまた使用部品点数が少なくな
り、組立てが容易化して経済的なメリットがあると共に
、センサ本体と受圧素子との固定部の気密性が高く、受
圧素子の作動信頼性にすぐれる。(F) Effects of the Invention Therefore, the pressure receiving element can be mounted in a precisely positioned position on the sensor body, and the reversing operation characteristics and expansion and contraction operation characteristics of the pressure receiving element can be integrated to produce a pressure sensor with uniform switching characteristics. In addition, the number of parts used is reduced, and assembly is facilitated, which is an economical advantage. In addition, the fixing portion between the sensor body and the pressure receiving element has high airtightness, and the operation reliability of the pressure receiving element is excellent.
さらに、従来、問題となった溶接部の残留応力による応
力腐蝕、クラックの成長、粒界腐蝕等の発生がなくなる
。Furthermore, stress corrosion, crack growth, intergranular corrosion, etc. due to residual stress in welded parts, which have been problems in the past, are eliminated.
（ト）発明の実施例 以下、この発明の一実施例を図面に基づき説明する。(g) Examples of the invention Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１および第２図はガス漏れ検出用の圧力センサを示し
、該圧力センサは第１図に示ずように、所要機器との連
結を行なう受圧ケース１にダイヤフラム２を保持した受
圧部Ａと、スイッチ３をスイッチケース４に収めたセン
サ本体部Ｂとに別々に製作され、この受圧部Ａとセンサ
本体部Ｂとを相互嵌合によって組立てるようにしている
。1 and 2 show a pressure sensor for detecting gas leakage, and as shown in FIG. 1, the pressure sensor has a pressure receiving part A that holds a diaphragm 2 in a pressure receiving case 1 that is connected to necessary equipment. , and a sensor main body part B in which the switch 3 is housed in a switch case 4 are manufactured separately, and the pressure receiving part A and the sensor main body part B are assembled by mutual fitting.
受圧部Ａの受圧ケース１には、該圧力センサを取付りる
所要機器側との連結を行なうために受圧フランジ５と、
該受圧フランジ５に貫設された取付は穴６が設けられる
。そして、受圧フランジ５の内周部に金属ダイヤフラム
２が反転作動自由にセットされると共に、その上側、つ
まり機器側に保護キャップ７がレーザ、アーク、プラズ
マ溶接等で重合固定される。この保護キャップ７には該
キャップとダイヤフラム２との間にガスを導入するだめ
の流通穴８が所要数貫設される。The pressure receiving case 1 of the pressure receiving part A includes a pressure receiving flange 5 for connection with the required equipment side to which the pressure sensor is attached.
A mounting hole 6 is provided through the pressure receiving flange 5. The metal diaphragm 2 is set on the inner periphery of the pressure-receiving flange 5 so that it can be rotated freely, and a protective cap 7 is superimposed and fixed on the upper side, that is, on the equipment side, by laser, arc, plasma welding, or the like. A required number of communication holes 8 for introducing gas between the protective cap 7 and the diaphragm 2 are provided through the protective cap 7.
上記受圧ケース１は受圧フランジ５側とは反対側にケー
ス筒部１ａを有し、そのケース筒部１ａの先端に係合用
段部９が切欠形成される。尚、受圧ケース１は金属部材
から製作される。The pressure receiving case 1 has a case cylindrical portion 1a on the side opposite to the pressure receiving flange 5 side, and an engagement step portion 9 is cut out at the tip of the case cylindrical portion 1a. Note that the pressure receiving case 1 is manufactured from a metal member.
受圧ケース１に対するダイヤフラム２の取付番プにあた
っては、第３図（イ）に示すように、受圧ケース１のケ
ース筒部１ａの内部に合成樹脂製の蒸着台１０をインサ
ート成形し、この蒸着台１０の上面１０ａにダイヤフラ
ム取付は位置および取付【ノ形状を決定する曲面形状を
与え、この上面１０ａを受圧ケース１側のダイヤフラム
取付は面１ｂに連続させる。次に第３図（ロ）のように
受圧ケース１と蒸着台１０とにわたってダイヤフラム２
を電気蒸着により形成し、その後第３図（ハ）のように
、蒸着台１０のみを溶解して除去し、ダイヤフラム２が
一体に取付けられた受圧ケース１を構成する。When attaching the diaphragm 2 to the pressure receiving case 1, as shown in FIG. The upper surface 10a of the pressure receiving case 10 is provided with a curved shape that determines the position and shape of the diaphragm, and this upper surface 10a is continuous with the surface 1b of the diaphragm on the pressure receiving case 1 side. Next, as shown in FIG.
is formed by electrical vapor deposition, and then, as shown in FIG. 3(c), only the vapor deposition table 10 is melted and removed, thereby constructing the pressure receiving case 1 to which the diaphragm 2 is integrally attached.
センサ本体部Ｂのスイッチケース４は合成樹脂体から成
り、その上下方向中間位置に金属板である保持板１１が
イン１ナートされている。The switch case 4 of the sensor main body part B is made of a synthetic resin body, and a holding plate 11, which is a metal plate, is inserted into the switch case 4 at an intermediate position in the vertical direction.
この保持板１１の外周はスイッチケース４より外方に突
出しており、センサ本体部Ｂを受圧ケース１のケース筒
部１ａに挿嵌した際、第１図のＪ−うに前記係合用段部
９が保持板１１の外端部に係合して、上記挿嵌状態が位
置決めされる。The outer periphery of this holding plate 11 protrudes outward from the switch case 4, and when the sensor main body part B is inserted into the case cylindrical part 1a of the pressure receiving case 1, the engaging step part 9 engages with the outer end of the holding plate 11, and the above-mentioned fitted state is determined.
スイッチケース４の内部には前記スイッチ３が装備され
る。このスイッチ３は図では上方に材料弾性で（＝ｌ勢
された可動接片１２ど固定接片１３とより成り、それぞ
れに端子１４．１５が接続され、これら端子１４．１５
がスイッチケース４外に突出される。この実施例では、
スイッチケース４はスイッチベース４ａと蓋体４ｂとか
ら成り、端子１４．１５はスイッチベース４ａに圧入固
定される。The switch 3 is installed inside the switch case 4. In the figure, this switch 3 is made up of a movable contact piece 12 and a fixed contact piece 13, which are biased upward by an elastic material (=l), and a terminal 14.15 is connected to each of them.
is projected outside the switch case 4. In this example,
The switch case 4 consists of a switch base 4a and a lid 4b, and the terminals 14 and 15 are press-fitted and fixed to the switch base 4a.
さらに上記スイッチケース４の蓋体４ｂにはプランジャ
１６が摺動自由に貫装され、このプランジ１７１６が可
動接片１２の遊端側を押圧する。Further, a plunger 16 is slidably inserted through the lid 4b of the switch case 4, and this plunger 1716 presses the free end side of the movable contact piece 12.
このように別々に製作された受圧部Ａとセンサ本体部Ｂ
とはそれぞれについてダイヤフラム反転作動検査とオン
・オフ作動検査とが施こされ、これら検査にパスしたち
の同士を組合ばて圧力センサを構成する。Pressure receiving part A and sensor body part B are manufactured separately in this way.
A diaphragm reversal operation test and an on/off operation test are performed on each of these, and those that pass these tests are combined to form a pressure sensor.
即ち、受圧部Ａの受圧ケース１にセンサ本体部Ｂに挿嵌
して保持板１１に係合用段部９を係合させて位置させ、
この係合部分をレーザ、アーク、プラズマ溶接などで溶
接し、両部Ａ、Ｂを一体化する。That is, the sensor body part B is inserted into the pressure receiving case 1 of the pressure receiving part A, and the engagement step part 9 is engaged with the holding plate 11 and positioned.
This engaging portion is welded by laser, arc, plasma welding, etc. to integrate both parts A and B.
この一体化状態ではプランジャ１６の頂部１６ａが前記
可動接片１２の弾性力でダイヤフラム２に接し、この圧
力センサを所要機器に取付けた使用状態では、ガス圧の
変化に対応して反転作動するダイヤフラム２の動きでプ
ランジャ１６が摺動し、スイッチ３がオン・オフ制御さ
れる。In this integrated state, the top 16a of the plunger 16 is in contact with the diaphragm 2 by the elastic force of the movable contact piece 12, and when this pressure sensor is installed in a required device, the diaphragm operates in reverse in response to changes in gas pressure. 2, the plunger 16 slides and the switch 3 is controlled on and off.
以上のように、電気蒸着によってダイヤフラム２が一体
取付けされた受圧ケース１を用いる圧力センサでは、ダ
イヤフラム２の取付けにカシメ加工や溶接加工が用いら
れないので、ダイヤフラム取付は固定時に不当な外力や
熱歪が加わることがないので、ダイヤフラム２の動作特
性が安定化する。また、受圧ケース１に対するダイヤフ
ラム取付は位置、および該ダイヤフラム形状が蒸着台１
０で正確に規定されるので、一層動作特性が安定化する
と共に、ダイヤフラム２の取付けが簡単に行なえる。As described above, in a pressure sensor that uses the pressure receiving case 1 to which the diaphragm 2 is integrally attached by electro-deposition, caulking or welding is not used to attach the diaphragm 2. Since no strain is applied, the operating characteristics of the diaphragm 2 are stabilized. In addition, the mounting position of the diaphragm to the pressure receiving case 1 and the shape of the diaphragm are
Since it is precisely defined as 0, the operating characteristics are further stabilized and the diaphragm 2 can be easily attached.
さらに前記実施例構造の圧カセンザは、受圧部Ａとセン
サ本体部Ｂとを別々に製作して、これらについてダイヤ
フラム作動検査とオン・オフ作動検査とを個々に行なう
ようにしたから、両検査をパスしたもの同士を組合せて
圧力センサを構成できる。Furthermore, in the pressure sensor having the structure of the above embodiment, the pressure receiving part A and the sensor body part B are manufactured separately, and the diaphragm operation test and the on/off operation test are performed individually on these parts. A pressure sensor can be constructed by combining those that have passed.
故に、従来の一体製作形の圧力センサでは、たとえばス
イッチ部が作動良好であっても、ダイヤフラム部分が作
動不良であれば、共に不良品として放てきしなければな
らなかったが、この発明によれば、良品部分まで放てき
する必要がなくなり、経済的な価値が高まるものである
。Therefore, with conventional integrally manufactured pressure sensors, for example, even if the switch part works well, if the diaphragm part does not work, both of them had to be rejected as defective products, but with this invention, In this case, there is no need to leave out even the good parts, which increases the economic value.
この発明の構成と、前記実施例との対応において、
この発明のセンサ本体は、実施例の受圧ケース１に対応
し、
以下同様に、
受圧素子は、ダイヤフラム２に対応するも、この発明は
上述の実施例の構成のみに限定されるものではない。Regarding the correspondence between the configuration of the present invention and the embodiments described above, the sensor main body of the present invention corresponds to the pressure receiving case 1 of the embodiment, and similarly, the pressure receiving element corresponds to the diaphragm 2. The present invention is not limited to the configuration of the embodiment.
また、前記実施例はガス漏れ検出用としての圧力センサ
について説明したが、この発明圧力センサの適用範囲は
流体圧検出用として広く解釈されるべきである。Furthermore, although the above embodiments have described a pressure sensor for detecting gas leaks, the scope of application of the pressure sensor of the present invention should be broadly interpreted as for detecting fluid pressure.
図面はこの発明の一実施例を示し、
第１図は圧力センサの断面図、
第２図は圧力センサの分解斜視図、
第３図（イ）、（ロ）、（ハ）は受圧ケースに対するダ
イヤフラム取付は方法の説明図、第４図（イ）、（ロ）
、（ハ）は従来の受圧素子取付は構造の各便を示す断面
図である。
１・・・受圧ケース １ａ・・・ケース筒部１ｂ
・・・ダイヤフラム取付は面
２・・・ダイヤフラム ３・・・スイッチ４・・・
スイッチケース １０・・・蒸着台１６・・・プラン
ジャThe drawings show one embodiment of the present invention, FIG. 1 is a sectional view of the pressure sensor, FIG. 2 is an exploded perspective view of the pressure sensor, and FIGS. 3 (a), (b), and (c) are views of the pressure receiving case. Diaphragm installation method explanatory diagram, Figure 4 (a), (b)
, (C) are cross-sectional views showing each structure of a conventional pressure-receiving element mounting structure. 1... Pressure receiving case 1a... Case cylindrical part 1b
...Diaphragm installation is on surface 2...Diaphragm 3...Switch 4...
Switch case 10... Vapor deposition table 16... Plunger
Claims (1)
受圧素子と、この受圧素子の変形 に追従してオン・オフするスイッチとを含 んだ圧力センサであって、 センサ本体の受圧素子取付け位置に、素子 取付け形状に沿って合成樹脂の蒸着台をモ ールド成形し、この蒸着台上に受圧素子を 電気蒸着にて形成して、該蒸着台を溶解し て除去することにより受圧素子をセンサ本 体に一体に取付けた 圧力センサの受圧素子形成方法。[Claims] 1. A pressure sensor including a pressure receiving element such as a diaphragm that deforms in response to changes in fluid pressure, and a switch that turns on and off in accordance with the deformation of the pressure receiving element, the sensor body comprising: By molding a synthetic resin vapor deposition table along the element mounting shape at the pressure receiving element mounting position, forming the pressure receiving element on this vapor deposition table by electric vapor deposition, and dissolving and removing the vapor deposition table. A method for forming a pressure receiving element of a pressure sensor in which the pressure receiving element is integrally attached to the sensor body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31022886A JPS63160126A (en) | 1986-12-24 | 1986-12-24 | Formation of pressure receiving element for pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31022886A JPS63160126A (en) | 1986-12-24 | 1986-12-24 | Formation of pressure receiving element for pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63160126A true JPS63160126A (en) | 1988-07-02 |
Family
ID=18002731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31022886A Pending JPS63160126A (en) | 1986-12-24 | 1986-12-24 | Formation of pressure receiving element for pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63160126A (en) |
-
1986
- 1986-12-24 JP JP31022886A patent/JPS63160126A/en active Pending
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