JPS63159835U - - Google Patents
Info
- Publication number
- JPS63159835U JPS63159835U JP5256387U JP5256387U JPS63159835U JP S63159835 U JPS63159835 U JP S63159835U JP 5256387 U JP5256387 U JP 5256387U JP 5256387 U JP5256387 U JP 5256387U JP S63159835 U JPS63159835 U JP S63159835U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- contact portion
- transport
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5256387U JPS63159835U (ar) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5256387U JPS63159835U (ar) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159835U true JPS63159835U (ar) | 1988-10-19 |
Family
ID=30877841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5256387U Pending JPS63159835U (ar) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159835U (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009022589A1 (ja) * | 2007-08-13 | 2009-02-19 | Hirata Corporation | 自動倉庫システム及びその容器移載方法 |
-
1987
- 1987-04-06 JP JP5256387U patent/JPS63159835U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009022589A1 (ja) * | 2007-08-13 | 2009-02-19 | Hirata Corporation | 自動倉庫システム及びその容器移載方法 |