JPS63159706U - - Google Patents

Info

Publication number
JPS63159706U
JPS63159706U JP5286987U JP5286987U JPS63159706U JP S63159706 U JPS63159706 U JP S63159706U JP 5286987 U JP5286987 U JP 5286987U JP 5286987 U JP5286987 U JP 5286987U JP S63159706 U JPS63159706 U JP S63159706U
Authority
JP
Japan
Prior art keywords
laser
interference fringes
optical system
optical fiber
laser interferometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5286987U
Other languages
English (en)
Japanese (ja)
Other versions
JP2517929Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987052869U priority Critical patent/JP2517929Y2/ja
Publication of JPS63159706U publication Critical patent/JPS63159706U/ja
Application granted granted Critical
Publication of JP2517929Y2 publication Critical patent/JP2517929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987052869U 1987-04-08 1987-04-08 分離型レ−ザ干渉計 Expired - Lifetime JP2517929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987052869U JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987052869U JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Publications (2)

Publication Number Publication Date
JPS63159706U true JPS63159706U (US06272168-20010807-M00014.png) 1988-10-19
JP2517929Y2 JP2517929Y2 (ja) 1996-11-20

Family

ID=30878429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987052869U Expired - Lifetime JP2517929Y2 (ja) 1987-04-08 1987-04-08 分離型レ−ザ干渉計

Country Status (1)

Country Link
JP (1) JP2517929Y2 (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11213932A (ja) * 1998-01-23 1999-08-06 Jeol Ltd 荷電粒子ビーム装置における試料装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006002170B4 (de) * 2005-08-16 2011-01-20 Tokyo Seimitsu Co. Ltd., Mitaka-shi Laser-Entfernungsmessgerät
JP6285661B2 (ja) * 2013-08-09 2018-02-28 キヤノン株式会社 干渉計測装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018727A (ja) * 1983-07-12 1985-01-30 Hitachi Cable Ltd 光干渉計
JPS60176109U (ja) * 1984-04-28 1985-11-21 鈴木　範人 干渉縞の移動方向判定装置
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11213932A (ja) * 1998-01-23 1999-08-06 Jeol Ltd 荷電粒子ビーム装置における試料装置

Also Published As

Publication number Publication date
JP2517929Y2 (ja) 1996-11-20

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