JPS63157749U - - Google Patents
Info
- Publication number
- JPS63157749U JPS63157749U JP1987050366U JP5036687U JPS63157749U JP S63157749 U JPS63157749 U JP S63157749U JP 1987050366 U JP1987050366 U JP 1987050366U JP 5036687 U JP5036687 U JP 5036687U JP S63157749 U JPS63157749 U JP S63157749U
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- dust
- release liner
- pellicle
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012790 adhesive layer Substances 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 3
- 239000002390 adhesive tape Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987050366U JPS63157749U (enExample) | 1987-04-01 | 1987-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987050366U JPS63157749U (enExample) | 1987-04-01 | 1987-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157749U true JPS63157749U (enExample) | 1988-10-17 |
Family
ID=30873665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987050366U Pending JPS63157749U (enExample) | 1987-04-01 | 1987-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157749U (enExample) |
-
1987
- 1987-04-01 JP JP1987050366U patent/JPS63157749U/ja active Pending
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