JPS63156640A - Substrate reversing device - Google Patents

Abstract

PURPOSE:To aim at miniaturizing a substrate reversing device, by providing a substrate setting table therein with a reversing section on which a substrate is set, and by retracting the remaining section as a non-reversing section of the table away from the rotating motion locus of the substrate during the substrate set on the reversing section is absorbed, held and reversed. CONSTITUTION:A table 100 is divided into an L-like reversing section 102 and a non- reversing section 101. When a substrate 11 makes contact with reference limit members 46, 47 to complete imageformation, a conveying belts 12 is elevated while the base plate 11 is moved in the direction X2, and thereafter the conveying belt 12 is lowered. Then, the substrate 11 is moved in the direction Y1 by means of an absorbing pad 102 and is then set on the reversing section 102. Further, the substrate is absorbed by an absorbing pad provided in the reversing section 102, and is reversed over 180 deg. by means of a rotary shaft 24. Simultaneously with the initiation of the reversing motion, the non-reversing section 101 is lowered, and therefore, it does not hinder the reversing motion of the substrate 11. After completion of the reversing motion, the non-reversing section 101 and the conveying belt 12 are elevated, and therefore, the substrate 11 is moved in the directions X1, Y2 by the conveying belt 12 and the absorbing pad 20 so as to be made into contact with the reference limit members 46, 47, thereby the substrate is subjected to rear surface copying.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a reversing device used in a printed circuit board manufacturing apparatus such as a multilayer printed circuit board or a double-sided printed circuit board.

n.2 Previous technologies and their problemsIn the pattern exposure process during the manufacture of printed circuit boards,
The pre-aligned printed circuit board is carried onto the stage of an exposure machine using a carrier, and when exposure is completed, the printed circuit board is carried out from the stage by the carrier. If the back side is also to be exposed, the unloaded printed circuit board is conveyed to a reversing machine, where it is reversed and prealigned again, and then sent to an exposure machine.

Incidentally, due to the recent demand for multi-layered and high-density printed circuit boards, the exposure process has come to be performed in a clean room in order to prevent manufacturing defects due to adhesion of dust during the exposure process. In this case, since the clean room equipment has a limited space, it is necessary to downsize the conveyor and reversing machine attached to the exposure machine. In particular, in laser drawing machines that directly draw patterns by irradiating a laser beam onto a substrate to which a photosensitive dry film is attached without using a workpiece film, the film is sensitive to visible light due to the wavelength of the laser used. used. Therefore, a dark room is required within the clean room, and the demand for space saving is even higher.

However, in conventional reversing machines, the center of rotation is at one end of the table where the printed circuit board is placed, and the table after reversing protrudes outside the area of the table before reversing, so it occupies approximately twice as much space. I needed space. Furthermore, since the entire table was configured to be inverted, a large capacity driving source was required, leading to an increase in the size of the inverting machine.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate reversing device in which the occupied area of the table before and after reversal is substantially the same, and only a portion of the occupied area is reversed, thereby solving the above-mentioned problems.

Means for Solving Problem D1 The present invention will be explained with reference to FIG. Reversing section 1 where is placed
02, a non-inverting part 101 provided on the table surface adjacent to the inverting part 102, and on which the other part of the substrate 11 is placed;
A holding means 23 provided in the reversing section 102 and holding the substrate 11 placed on the reversing section 102;
and a retracting means 9 for temporarily retracting the non-reversing section 101 from the locus of movement of the substrate 11 when the substrate 11 is reversed.

E0 action The non-reversing portion 1 moves to a position where it does not interfere with the substrate 11 which is undergoing reversal movement.
01 is evacuated by the evacuating means 9. Then table 10
While holding the substrate 11 placed on the substrate 0 by the holding means 23, the reversing section 102 is inverted by the driving means 29 to invert the front and back of the substrate 11.

I? , Embodiment An embodiment of the present invention will be explained with reference to FIGS. 1 to 8. FIG. 1 shows the overall configuration of a device installed in the front stage of a drawing machine to perform prealignment and inversion, and a table 100 includes:
It is composed of a non-inverting section 101 and an inverting section 102, and the surfaces of the non-inverting section 101 and the inverting section 102 serve as table surfaces.

As shown in FIG. 2, the non-inverting portion 100 is supported by a stud 3 on a base member 2 located at the bottom thereof. A linear motion bearing 4 is attached to the base member 2, and this bearing 4 is provided so as to be movable up and down on a shaft 7 whose both ends are fixed to structural members 5, 6. Furthermore, a piston 10 of an air cylinder 9 fixed to the lower structural member 8 is connected to the base member 2, and a non-reversible portion 101 is guided by the shaft 7 and moves up and down.

In addition, in FIG. 2, the non-inverting portion 101 and the base member 2
A belt 12 for conveying the substrate 11 in the X direction is provided between the two. This belt 12 performs endless orbital motion by a driving force transmitted to a belt pulley 13 by a drive motor (not shown). This movement is capable of forward and reverse movement, and the substrate 1 is transported in the Xi and X2 directions. This belt 12 is moved by an elevating mechanism (not shown) between a retracted position [(shown by a solid line) in which the substrate loading surface 12a of the belt 12 is lower than the substrate loading surface 101a of the non-inverting section 101, and
The belt 12 can be moved up and down between a long hole 101b provided in the long hole 101b and an advanced position (indicated by a dashed line) where the substrate loading surface 12a of the belt 12 protrudes. Raise to the advanced position.

In addition, in FIG. 1, the substrate 11 is transported in the Y direction.
l The feed arm 14 is connected to a bearing rail 1 installed on a pedestal 16 via a linear motion bearing 15 installed at the base end of the arm.
7, and is capable of reciprocating in the Y direction by a horizontal drive mechanism (not shown). A pad holding member 19 is provided on the Y transfer arm 14 via a linear motion bearing 18,
A plurality of suction pads 20 for vacuum suctioning the substrate 11 are attached to this holding member 19. The holding member 19 is guided by the linear motion bearing 18 and moves up and down by a vertical drive mechanism (not shown). Each suction pad 20 is connected to a valve (not shown), and only the pads used for vacuum suction are connected to a vacuum source depending on the substrate size. When the Y transport arm 14 is not transporting the substrate 11, the width alignment 9 described later is used.
Inverted.

It has been retracted to the illustrated position where it does not interfere with pre-alignment. Note that transport in the Y direction is carried out on table 1 in the same way as in the X direction.
A belt mechanism that moves up and down relative to the ground may also be used.

As shown in FIGS. 3 and 4, the reversing section (hereinafter referred to as reversing arm) 102 includes a suction pad mounting member 22
A plurality of suction pads 23 are attached via. The suction pad 23 is attached to the substrate suction surface 2 by a vertical mechanism (not shown).
3a is vertically movable between a retracted position where the arm 3a is located below the arm upper surface 102a and a protruding position where the arm 3a projects from the through hole 102b of the reversing arm 102 from the reversing arm upper surface 102a. At the protruding position, the transported substrate 11 is held by vacuum suction. The suction pad 23 is connected to a valve (not shown), and only the pad used for vacuum suction is connected to a vacuum source depending on the substrate size. Further, a rotating shaft 24 integral with the first reversing arm 102 is rotatably supported by a bearing 26 provided inside a bearing housing 25 . A worm wheel 27 is attached to the other end of the rotating shaft 24 and meshes with a worm 28 . This worm 28 is attached to a torque limiter 3 on the shaft of a motor 29 fixed to the frame 16.
It is attached via 0. Due to this structure, when a load torque greater than the transmission torque of the torque limiter 30 is applied to the reversing arm 102, the torque limiter 30 slips and spins.

The reversing 7-me 102 is prevented from rotating.

The motor 29 is attached with a pulse encoder 31 that generates a fixed number of pulses per unit rotation angle of the reversing arm 102.

Further, as shown in FIG. 4, the reversing arm 102 is provided with a locking pawl 32.

Positioning is performed in the home position state of 102 (the state shown in FIG. 4). That is, a positioning member 33 is attached to the pedestal 16, a compression spring 34 provided on this positioning member 33 biases a pressing member 35, and this pressing member 35 presses the inclined surface 32a of the locking claw 32. The reversing arm 102 is urged in the 02 direction to determine the home position.

Furthermore, in FIG. 1, columns 36 are erected on the pedestal 16, and bridging plates 37 are installed between the columns. Bridge plate 37
There are three pre-alignment mechanisms 38a to 3 at predetermined intervals.
8c is installed.

Here, the pre-alignment mechanism 38a corresponding to the tip corner in the substrate transport direction
is called the sub-reference side pre-alignment mechanism.

As shown in FIG. 5, the normal reference side pre-alignment mechanism 38a includes a linear movement guide 39 provided on the bridging plate 37, a linear movement member 40 attached thereto, and the member 4.
It consists of a pin support member 41 fixed to the pin support member 41, a positioning pin 42 that vertically passes through the pin support member 41, a spring 43 that urges the positioning pin 42 downward, and a stopper 44 that prevents the pin 42 from being removed. Further, the pre-alignment mechanisms 38b and 38c on the sub-reference side have almost the same configuration as the pre-alignment mechanism 38a on the main reference side, and the difference is that the pin support member 41 is connected to the linear motion member via the linear swing member 45. 40
The point is that it is attached to.

As a result, the sub-reference side pre-alignment mechanism 38b.

38c can be slightly moved in the X direction.

As shown in FIG. 7, the board 11 to be transported, regardless of its size, is provided with a positioning hole 11a on the standard side and a positioning hole 11b on the sub-standard side, and after one width alignment. ,
The two positioning pins 42 on the positive and secondary reference sides are inserted into the positioning hole 1.
Pre-alignment of the substrate 11 is performed by inserting it into the substrates 1a and llb.

Furthermore, in FIG. 1, 46 is an X-limiting member with a width in the X direction, and 47 is a Y-limiting member with a width in the Y direction. It protrudes and retreats from the upper surface 101a of the non-inverting portion 101. A contact detection sensor (not shown) is attached to each of these limiting members to detect contact with the substrate 11. When it comes into contact with the X limiting member 46, the belt drive motor is stopped and the Y
When it comes into contact with the limiting member 47, the suction by the suction pad 20 is released and the Y transport arm 14 is retracted to the illustrated position.

In the above embodiment, the suction pad 23 serves as a holding means.
The air cylinder 9 constitutes a retracting means, and the drive motor 29 constitutes a driving means.

The operation of the device configured in this way will be explained.

When the substrate 11 is loaded from the input section IN in FIG.
2 is driven and the substrate 11 is conveyed in the X direction until it comes into contact with the X restriction member 46. When the contact detection sensor of the X-limiting member 46 detects contact with the substrate, the belt 12 is stopped. Next, the Y transport arm 14 advances onto the non-reversing section 101, lowers the suction pad 20, and grips the substrate 11 by vacuum suction. Note that only the pads used depending on the substrate size are connected to the vacuum source. After vacuum suction, the suction pad 20 is raised, and the horizontal drive mechanism causes the Y transport arm 14 to travel in the Y2 direction, thereby transporting the substrate 11 until it abuts against the Y restriction member 47. When the contact detection sensor of the Y restriction member 47 detects contact with the substrate, the suction pad 20 breaks the vacuum, releases the substrate 11, and places it on the non-inverting section 101. after that,
The Y transport arm 14 returns to the retracted position and the width alignment is completed.

Next, the X and Y restriction members 46 and 47 are retracted from the upper surface of the non-inversion section 101 to perform pre-alignment. and a normal reference side pre-alignment mechanism 38a.

Sub-reference side pre-alignment mechanism 38 according to board size
b. Lower the positioning pin 42 (38c).

The substrate 11 is positioned using the taper 42a at the tip of the pin. That is, the pin 42 is lowered to open the main and sub-positioning holes 11a of the substrate 11.

11b, the conical tapered surface 42 at the tip of the pin
The substrate 11 is moved by a, and pre-alignment is performed. In addition, during this pre-alignment, even if the distance between the main reference positioning hole 1], a drilled in the substrate 11 and the sub-reference positioning hole 11b changes due to processing errors or expansion and contraction due to temperature and humidity, the sub-reference side pre-alignment Since the positioning pin 42 on the sub-reference side moves in the X direction by the linear swinging member 45 provided in the alignment mechanism 38a (38c), the positioning pin 42 can be inserted easily and the board can be positioned. Although the thickness of the substrate varies, the thickness shown in FIGS.
As shown in the figure, the positioning pins 42 inserted into the board positioning holes 11a and llb have their tapered portions 42a in the middle contacting the etches of the holes, and after that, the pre-alignment mechanism 38 is lowered by compression of the compression spring 43. The driving force of the substrate 11 is absorbed, and positioning is possible without applying excessive force to the substrate 11 and even if the thickness of the substrate changes.

Further, in this embodiment, two positioning pins are provided on the sub-reference side, but if the types of substrate sizes to be transported increase, the number of these pins will be increased.

When the pre-alignment is completed, both the primary and secondary reference side pre-alignment mechanisms are raised, and the substrate 11 is transported to a stage on the drawing machine by a transport mechanism (not shown). Substrate 11
There, fine alignment is performed, and then drawing is done on the surface. When the drawing on the front side is completed, the substrate 11 is carried out from the stage by the transport mechanism, placed on a predetermined position P1 on the table 100 shown in FIG. 8, and enters an inversion process for drawing on the back side.

First, the X conveyance belt 12 rises and conveys the substrate 11 in the X2 direction to the state shown in P2 in FIG.

Next, the substrate 11 is sucked by the suction pad 20 of the Y transfer arm 14 and transferred in the Y1 direction to the state shown in P3 in FIG.

In this XYI feeding for preparation for reversal, it is enough for one corner of the board 11 to rest on the reversing arm 102, so there is no need for accuracy as high as the contact positioning. Detect the position of the board with the sensor, or
The feeding amount of the belt 12 and the Y conveying arm 14 may be changed depending on the size of the substrate. In addition, the X, Y restriction member 4
It goes without saying that a device equivalent to 6.47 may be provided on the table 100 on the reversing arm 102 side so as to be retractable, thereby performing the width adjustment as described above.

When the substrate 11 is placed on the reversing arm 102 in the state of P3 in FIG. 8, the suction pad 23 of the reversing arm 102 rises and grips the substrate 11 by vacuum force. Next, the cylinder 9 lowers the non-inverting section 101 so that the substrate 11 does not interfere with the non-inverting section 101 during inversion, in other words, so that the non-inverting section 101 retreats from the motion trajectory of the substrate 11 being inverted.

Note that although the reversing arm 102 rotates in the direction θ in FIG.
It is sufficient that the amount of descent is approximately half the length of the substrate 11.

When the end of the descent of the non-inversion part 101 is detected by a sensor (not shown) located at the end point of the descent of the non-inversion part 101, the motor 2
9 is driven, and the reversing arm 102 starts reversing the θ□ force direction while gripping the substrate 11 about the rotation axis 24. A pressing member 35 is pressed against the inclined surface 32a of the locking claw 32 of the reversing arm 102.
Since the torque limiter 3o is set to a torque sufficient to overcome the moment in the direction, the reversing arm 102 rotates in the 01 direction against the pressing force. The pulse encoder 29 outputs pulses as the motor rotates, and counts these pulses to detect the rotation angle of the reversing arm 102.
The motor 29 is stopped when the rotation is 80 degrees. Since the worm 28 and the worm wheel 27 have a helix angle that cannot be reversed, the inverted state is maintained by their meshing.

Next, the cylinder 9 is extended to raise the non-inverting portion 101. The rising end position of the non-reversing portion 101 is set at the stroke end of the cylinder 9. When the non-reversing part 101 finishes rising, the reversing arm 102
The vacuum of the suction pad 23 is broken, and the substrate 11 is released and placed on the non-inversion part 101. At the same time as this vacuum destruction,
The Y restriction members 46, 47 advance from the retracted position, and with a slight delay, the belt 12 of the non-reversing portion 101 rises and the belt 12 is driven in the X1 direction. The substrate 11 transported in the X1 direction comes into contact with the X limiting member 46, and the X is drawn in the same manner as in the case of surface drawing described above.

7. Width alignment in both directions and pre-alignment are performed, and the sheet is transported to a stage of a drawing machine by a transport means (not shown), and drawing is performed on the back side. The substrate 11 on which the drawing on the back side has been completed is loaded onto the non-reversing section 101 by the transport means, and is transported by the Y transport arm 14 in the Y2 direction in FIG. It will be done. When this ejection is completed, the next substrate is loaded from the input port IN of the table 100.

Note that the inversion arm 102 that inverts the substrate 11
1 is returned to the home position while being aligned and pre-aligned. During the reverse rotation, the locking pawl 32 rotates while pushing back the pressing member 35 with the inclined surface 32b. At this time, the angles of the biasing member 35 and the inclined surface 32b are determined so that the torque limiter 30 does not slip and idle. As the rotation to the home position further progresses, the locking pawl 32 comes into contact with the positioning member 33, and the torque limiter 30
slips and spins idly. At the time of reversal, the motor 29 was rotated by the number of pulses corresponding to 180 degree rotation of the reversing arm 102, but at the time of reverse rotation, the motor 29 was rotated by the number of pulses corresponding to 180 degrees plus some pulses.
Rotate and stop. During rotation corresponding to the number of pulses of the additional bone, the 1-luke limiter 30 slips and idles. When the locking claw 32 comes into contact with the positioning member 33, the reversing arm 102 is positioned by the pressing force exerted by the suppressing member 35 on the inclined surface 32a as described above.

Regarding the dimensions of each part of the table 100 in the above embodiment, the ninth
The diagram is summarized as follows.

The table 100 has a rectangular shape with one vertical side having a length of A and one horizontal side having a length of B, and includes an L-shaped inverted portion 102 and an X, Y restriction member 46 installed at the opposite corner. 47 and inversion part 1
02 and a non-reversible part 101 that can be raised and lowered. When the length of each side of the reversing section 102 is determined as shown in the figure, and the dimensions of the maximum substrate that can be processed are Q1 x Q2, table 1
The dimensions A and B of 00 are defined as A>E+QI B>F-1112.

Moreover, the distance G to the rotation center 24 of the reversing unit 102 is.

G > (1/2)
P4 (Fig. 9) was assumed to be transported.

Therefore, the reversing arm 102 can be returned to the home position during the width alignment process or the rear alignment process. Furthermore, if the reversal is completed before the bria alignment process, the transport mechanism to the lithography machine stage can be kept on standby on the substrate during the bria alignment process, and one working time can be shortened. Further, at this time, since there is an empty space above the substrate, it is possible to use a transport mechanism that sucks and directly grips the substrate from above.

Note that the substrate carried out from the drawing machine or the next substrate inputted may be reversed by waiting with the reversing arm 102 in the reversed state and rotating it to return to the home position. In this case, the table 100 is set to the maximum dimension fi of the substrate 11.
It can be made into a rectangular shape that is approximately the same as IXQ2, which contributes to miniaturization of the device and reduces the number of times the reversing arm 102 is reversed, contributing to energy saving.

Further, as shown in FIG. 10, the table 100 is set to LIXL2, which is approximately larger than the maximum substrate dimension QIXΩ2, and the x, y limiting member 46. ．． 47 may be installed outside the corner of the table 100. In this case as well, substrates having the same maximum dimensions as in the above embodiment can be processed. According to this, the weight of the non-reversing table and the reversing table can be reduced, and their drive systems can be made smaller.

Furthermore, in the above description, the width alignment, pre-alignment, and reversal mechanisms were installed in the same frame, but the present invention.

It can also be applied to a device equipped with only a reversing mechanism; in this case, the rotation axis of the reversing arm is located approximately at the center of the pedestal, and the areas occupied by the reversing arm 11 during reversing and non-reversing are approximately the same. 1. The reversing mechanism is miniaturized.

G0 Effects of the Invention According to the present invention, since the occupied position of the reversing section after reversing is substantially contained within the table, the area occupied by the reversing device can be reduced. Furthermore, since only the reversing portion needs to be reversed, the drive source thereof can be made smaller, contributing to the miniaturization of the entire device.

Note that, according to the embodiment, since inversion and prealignment can be performed with one device, this type of device can be further miniaturized.

[Brief explanation of the drawing]

1 to 9 show an embodiment of the present invention, in which FIG. 1 is an overall configuration diagram, FIG. 2 is a sectional view taken along the line ■-■ in FIG. 1, and FIG.
The figure is a sectional view taken along the line ■-■ of Fig. 1, Fig. 4 is a perspective view of the reversing section and its drive section, Fig. 5 is a partial sectional view showing the pre-alignment mechanism on the main reference side, and Fig. 6 is a sub-standard A partial sectional view showing the side pre-alignment mechanism, FIG. 7 is a plan view of the board,
FIG. 8 is a plan view of the table, and FIG. 9 is a plan view illustrating the table dimensions of this embodiment. FIG. 10 is a plan view illustrating another example of the structure of the table. 2.16: Frame 4,15: Linear bearing 7.17: Shaft 9: Air cylinder 11: Board
12: Belt 14: Transport arm 20. 23: Suction pad 24: Rotating shaft 29: Drive motors 38a to 38c: Pre-alignment mechanism 42: Positioning pin 46: x restriction member 47: Y restriction member 1oO: Table 101: Non-reversing section 102: Reversal Part Patent Applicant Nippon Kogaku Kogyo Co., Ltd. Representative Patent Attorney Fuyuki Nagai XzX×1 Figure 2 Figure 2 Figure 3 Figure 5

Claims (1)

[Scope of Claims] An inversion part provided on a table surface on which a substrate is placed, on which a part of the substrate is placed, and an inversion part provided on the table surface adjacent to the inversion part, in which other part of the substrate is placed. a non-inverting part on which the part is placed; a holding means provided in the inverting part to hold the substrate placed on the inverting part; and a reversing part for inverting the substrate held by the holding means. 1. A substrate reversing device, comprising: a drive means for rotating the substrate; and a retracting means for temporarily retracting the non-reversing portion from a movement trajectory of the substrate when the substrate is reversed.