JPS63155997U - - Google Patents
Info
- Publication number
- JPS63155997U JPS63155997U JP4724287U JP4724287U JPS63155997U JP S63155997 U JPS63155997 U JP S63155997U JP 4724287 U JP4724287 U JP 4724287U JP 4724287 U JP4724287 U JP 4724287U JP S63155997 U JPS63155997 U JP S63155997U
- Authority
- JP
- Japan
- Prior art keywords
- support tube
- detection device
- displacement
- temperature detection
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
- B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
- B30B11/002—Isostatic press chambers; Press stands therefor
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Powder Metallurgy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4724287U JPH058476Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4724287U JPH058476Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63155997U true JPS63155997U (enrdf_load_stackoverflow) | 1988-10-13 |
| JPH058476Y2 JPH058476Y2 (enrdf_load_stackoverflow) | 1993-03-03 |
Family
ID=30867663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4724287U Expired - Lifetime JPH058476Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058476Y2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6380751B2 (en) | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
| US6002263A (en) | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
| US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
| US6861856B2 (en) | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
-
1987
- 1987-03-30 JP JP4724287U patent/JPH058476Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058476Y2 (enrdf_load_stackoverflow) | 1993-03-03 |