JPS63155997U - - Google Patents

Info

Publication number
JPS63155997U
JPS63155997U JP4724287U JP4724287U JPS63155997U JP S63155997 U JPS63155997 U JP S63155997U JP 4724287 U JP4724287 U JP 4724287U JP 4724287 U JP4724287 U JP 4724287U JP S63155997 U JPS63155997 U JP S63155997U
Authority
JP
Japan
Prior art keywords
support tube
detection device
displacement
temperature detection
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4724287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058476Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4724287U priority Critical patent/JPH058476Y2/ja
Publication of JPS63155997U publication Critical patent/JPS63155997U/ja
Application granted granted Critical
Publication of JPH058476Y2 publication Critical patent/JPH058476Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B30B11/002Isostatic press chambers; Press stands therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Powder Metallurgy (AREA)
JP4724287U 1987-03-30 1987-03-30 Expired - Lifetime JPH058476Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (OSRAM) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4724287U JPH058476Y2 (OSRAM) 1987-03-30 1987-03-30

Publications (2)

Publication Number Publication Date
JPS63155997U true JPS63155997U (OSRAM) 1988-10-13
JPH058476Y2 JPH058476Y2 (OSRAM) 1993-03-03

Family

ID=30867663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4724287U Expired - Lifetime JPH058476Y2 (OSRAM) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPH058476Y2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure

Also Published As

Publication number Publication date
JPH058476Y2 (OSRAM) 1993-03-03

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