JPS63155737A - Signal processor - Google Patents
Signal processorInfo
- Publication number
- JPS63155737A JPS63155737A JP61301714A JP30171486A JPS63155737A JP S63155737 A JPS63155737 A JP S63155737A JP 61301714 A JP61301714 A JP 61301714A JP 30171486 A JP30171486 A JP 30171486A JP S63155737 A JPS63155737 A JP S63155737A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- input
- correlation
- trigger
- secondary electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000737 periodic effect Effects 0.000 claims description 19
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Measurement Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
本発明は、ストロボ電子ビーム装置における2次電子信
号などの信号量を検出する信号処理装置において、入力
信号と該信号に相似な参照信号との相関を演算し、その
相関出力信号を積分して得た積分出力信号を用いて前記
入力信号の信号量を検出することにより、入力信号に重
畳したショットノイズ及び回路雑音を効果的に低減させ
ることのできる信号処理装置である。Detailed Description of the Invention [Summary] The present invention provides a signal processing device for detecting the amount of a signal such as a secondary electron signal in a strobe electron beam device, in which a correlation between an input signal and a reference signal similar to the signal is determined. By detecting the signal amount of the input signal using the integrated output signal obtained by calculating and integrating the correlation output signal, shot noise and circuit noise superimposed on the input signal can be effectively reduced. It is a signal processing device.
本発明は、入力周期信号の各周期毎の信号量を検出する
技術に関わり、特に検出時における雑音の影響を低減さ
せることのできる信号処理装置番こ関する。The present invention relates to a technique for detecting the signal amount for each period of an input periodic signal, and particularly to a signal processing device that can reduce the influence of noise during detection.
ストロボ電子ビーム装置では、電子ビームパルスを被検
ICのトリガに同期して照射し、検出される2次電子信
号の信号量を各トリガ毎に検出することにより、被検I
C上の電圧波形の測定を行なうことができる。A strobe electron beam device emits electron beam pulses in synchronization with the trigger of the IC under test, and detects the amount of secondary electron signals detected for each trigger.
Measurements of the voltage waveform on C can be made.
2次電子信号は、トリガに同期したパルスとして検出さ
れるが、そのパルス幅は上記トリガ周期に比較して非常
に短い時間幅であり、さらに検出回路の周波数応答の帯
域幅は上記パルスの帯域幅に比較して狭いため、検出回
路を介して検出される2次電子信号は、第4図(a)に
示すようなトリガ信号に同期して同図(blに示すよう
な三角波に近い波形となる。そして各周期毎のパルスは
、電子ビームのショットノイズの影響を受けて同図fb
)に示すように同一の形状にはならずゆらぎを生ずる。The secondary electron signal is detected as a pulse synchronized with the trigger, but its pulse width is very short compared to the trigger period, and the frequency response bandwidth of the detection circuit is greater than the pulse band. Because it is narrow compared to the width, the secondary electron signal detected via the detection circuit has a waveform close to a triangular wave as shown in Figure 4(a) in synchronization with the trigger signal as shown in Figure 4(a). Then, the pulse for each period is affected by the shot noise of the electron beam and becomes fb in the same figure.
), the shape is not the same and fluctuations occur.
このような波形から2次電子信号量を検出するためには
、従来、第4図の各トリガ間(t、、〜1、。1)にお
いて2次電子信号を積分し、その積分出力を該周期にお
ける信号量として検出し、これによりゆらぎの影響を除
去し、安定な2次電子信号量の検出を可能にしている。In order to detect the amount of secondary electron signal from such a waveform, conventionally, the secondary electron signal is integrated between each trigger (t, , ~1, .1) in Fig. 4, and the integrated output is It is detected as a signal amount in a period, thereby eliminating the influence of fluctuations and making it possible to detect a stable secondary electron signal amount.
この場合、積分手段としてはボックスカー積分器、ディ
ジタル信号積分器などが用いられている。In this case, a boxcar integrator, a digital signal integrator, or the like is used as the integrating means.
しかし、上記影響の他に2次電子信号に重畳する雑音と
して、第5図(alに示すような2次電子検出系の回路
雑音である白色雑音も存在し、その場合、2次電子信号
には第5図山)に示すよ・うに該雑音が重畳してしまい
、この雑音は前記積分器によっては完全に取り除くこと
ができないという問題点を有していた。However, in addition to the above-mentioned effects, there is also white noise, which is the circuit noise of the secondary electron detection system as shown in Figure 5 (al), as noise superimposed on the secondary electron signal. The problem is that the noise is superimposed as shown in Figure 5, and this noise cannot be completely removed by the integrator.
本発明は上記問題点を解決するために、入力信号と予め
取得しであるそれに相似な参照信号との相関をトリガに
同期して計算し、その相関出力を積分器へ入力させるこ
とにより2次電子信号等の入力信号に重畳した白色雑音
を効率良く低減させることのできる信号処理装置を提供
することを目的とする。In order to solve the above-mentioned problems, the present invention calculates the correlation between an input signal and a reference signal similar to the input signal obtained in advance, in synchronization with a trigger, and inputs the correlation output to an integrator. It is an object of the present invention to provide a signal processing device that can efficiently reduce white noise superimposed on an input signal such as an electronic signal.
本発明は上記問題点を解決するために第1図に示す構成
を有する。すなわち、トリガ信号5に同期して入力する
入力周期信号4と参照信号6との相関を演算する相関手
段1、参照信号6として予め取得した入力周期信号波形
をトリガ信号5に同期して発生ずる参照信号発生手段2
、及び外部からの開始信号9に同期して相関手段1がら
の相関出力信号7を積分し積分出力信号8を入力周期信
号4の信号量として出力する積分手段3とを有する。The present invention has the configuration shown in FIG. 1 in order to solve the above problems. That is, a correlation means 1 calculates the correlation between an input periodic signal 4 inputted in synchronization with the trigger signal 5 and a reference signal 6, and generates an input periodic signal waveform obtained in advance as the reference signal 6 in synchronization with the trigger signal 5. Reference signal generation means 2
, and an integrating means 3 which integrates the correlation output signal 7 from the correlation means 1 in synchronization with a start signal 9 from the outside and outputs an integral output signal 8 as the signal amount of the input periodic signal 4.
上記各手段において、まず、入力周期信号4は相関手段
1においてそれと相似な参照信号6と相関を演算される
ことにより、入力周期信号4に重畳した白色雑音が低減
される。次に、相関手段1からの相関出力信号7を積分
手段3において積分することにより、入力周期信号4の
ゆらぎの影響が除去され、その積分出力信号8が入力周
期信号4の信号量として安定に検出される。In each of the above means, first, the input periodic signal 4 is correlated with a reference signal 6 similar to it in the correlation means 1, so that the white noise superimposed on the input periodic signal 4 is reduced. Next, by integrating the correlation output signal 7 from the correlation means 1 in the integration means 3, the influence of fluctuations in the input periodic signal 4 is removed, and the integrated output signal 8 becomes stable as the signal amount of the input periodic signal 4. Detected.
以下、本発明の実施例につき詳細に説明を行なう。まず
、信号処理装置の実施例の構成は、第1図の基本構成と
同一であり、この時、相関手段1は表面弾性波素子を用
いたSAWコンポリューバなどにより実現することが可
能である。Embodiments of the present invention will be described in detail below. First, the configuration of the embodiment of the signal processing device is the same as the basic configuration shown in FIG. 1, and at this time, the correlation means 1 can be realized by a SAW compolver using a surface acoustic wave element or the like.
第1図において、まず、入力周期信号4である2次電子
信号は、トリガ5(第4図(81参照)に同期して入力
し、第5図(blに示したように白色雑音が重畳されて
いる。この時同時に参照信号発生手段2からは、トリガ
5に同期して参照信号6が発生される。参照信号6は、
入力する2次電子信号4に相似な波形であり、特には図
示しない手段により、予め同一の信号路にパルスを入力
すること6一
により取得された波形である。In Fig. 1, first, the secondary electronic signal which is the input periodic signal 4 is input in synchronization with the trigger 5 (see Fig. 4 (see 81)), and white noise is superimposed as shown in Fig. 5 (bl). At this time, the reference signal generating means 2 simultaneously generates a reference signal 6 in synchronization with the trigger 5.The reference signal 6 is
It is a waveform similar to the input secondary electronic signal 4, and is a waveform obtained by previously inputting a pulse to the same signal path by means not particularly shown.
続いて上記2次電子信号4及び参照信号6は、相関手段
1において両者の相関が演算される。これによって相関
手段1から出力される相関出力信号7は、2次電子信号
4と参照信号6の積であり、該信号は積分手段3に入力
する。Subsequently, the correlation between the secondary electron signal 4 and the reference signal 6 is calculated in the correlation means 1. The correlation output signal 7 output from the correlation means 1 is the product of the secondary electron signal 4 and the reference signal 6, and this signal is input to the integration means 3.
積分手段3は、外部から開始信号9を受けることにより
、相関出力信号7を所定時間積分し、その積分出力信号
8を入力した2次電子信号4の信号量として出力する。The integrating means 3 receives a start signal 9 from the outside, integrates the correlation output signal 7 for a predetermined period of time, and outputs the integrated output signal 8 as the signal amount of the inputted secondary electron signal 4.
今、第1図の入力周期信号4である2次電子信号の1周
期を第2図(atに示すようなのこぎり波で近似しく横
軸の時間は正規化した値である)、参照信号6として同
図(blに示すように同図(alの入力信号と同一にし
て相関を計算し積分した場合と、同図(C1に示すよう
に矩形波の参照信号を用いた場合とでS/N (信号対
雑音比)を求めてみる。ここで同図(C)を参照信号と
した場合は、従来のボックスカー積分器を用いた場合と
等価である。第3図に、ボックスカー積分器を用いた方
式のウィンドウ輻x=1の場合に対する相対的なS/N
をプロノトシた結果を示す。図中Aで示したプロットは
、本発明に基いて参照信号6を第2図fb)に示すよう
に同図(a)の入力信号と同一にした場合のものであり
、これにより本発明の方式によれば、第34Bに示すボ
ックスカー積分器を用いた方式におけるS / Nより
常に高いS/Nを維持することができ、入力周期信号4
中の白色雑音が効果的に低減されることがわかる。Now, one period of the secondary electron signal which is the input periodic signal 4 in Fig. 1 is approximated by a sawtooth wave as shown in Fig. 2 (the time on the horizontal axis is a normalized value), and the reference signal 6 S/ Let's find N (signal-to-noise ratio).Here, if the same figure (C) is used as a reference signal, it is equivalent to using a conventional boxcar integrator.Figure 3 shows the boxcar integral Relative S/N for the case of window vergence x=1 of the method using a device
The results are shown below. The plot indicated by A in the figure is obtained when the reference signal 6 is made the same as the input signal in FIG. 2(a) as shown in FIG. According to this method, it is possible to maintain a higher S/N than in the method using a boxcar integrator shown in No. 34B, and the input periodic signal 4
It can be seen that the white noise inside is effectively reduced.
本発明によれば、ストロボ電子ビーム装置における2次
電子信号などのような入力周期信号の各周期毎の信号量
を検出する場合に、予め求めておいた参照信号との相関
を演算し、その相関出力を積分して信号量を検出するこ
とにより、入力周期信号に重畳した白色雑音を効果的に
低減させ、ゆらぎによる影響を除去し、安定した信号量
の測定を行なうことが可能となる。According to the present invention, when detecting the signal amount for each period of an input periodic signal such as a secondary electron signal in a strobe electron beam device, the correlation with a reference signal determined in advance is calculated, and the By integrating the correlation output and detecting the signal amount, it is possible to effectively reduce the white noise superimposed on the input periodic signal, remove the influence of fluctuation, and perform stable signal amount measurements.
第1図は、本発明による信号処理装置の構成図、第2図
(a)、(bl、(c)は、2次電子信号と参照信号の
説明図、
第3図は、本発明によるS/N改善効果の説明図、
第4図(al、(b)は、2次電子信号のゆらぎの影響
の説明図、
第5図(al、(b)は、2次電子信号における白色雑
音の影響の説明図である。
1・・・相関手段、
2・・・参照信号発生手段、
3・・・積分手段、
4・・・入力周期信号(2次電子信号)、5・・・外部
トリガ、
6・・・参照信号、
7・・・相関出力信号、
8・・・積分出力信号。FIG. 1 is a block diagram of a signal processing device according to the present invention, FIGS. 2(a), (bl, and c) are explanatory diagrams of a secondary electronic signal and a reference signal, and FIG. Figure 4 (al, (b) is an explanatory diagram of the effect of fluctuation in the secondary electron signal. Figure 5 (al, (b) is an illustration of the effect of white noise on the secondary electron signal. It is an explanatory diagram of influences. 1... Correlation means, 2... Reference signal generation means, 3... Integrating means, 4... Input periodic signal (secondary electronic signal), 5... External trigger , 6... Reference signal, 7... Correlation output signal, 8... Integral output signal.
Claims (1)
力周期信号(4)の各周期毎の信号量を検出する信号処
理装置において、 前記トリガ信号(5)に同期して前記入力周期信号(4
)と所定の参照信号(6)との相関を演算する相関手段
(1)と、 該相関手段(1)からの相関出力信号(7)を積分する
積分手段(3)とを有し、 該積分手段(3)からの積分出力信号(8)を用いて前
記入力周期信号(4)の信号量を検出することを特徴と
する信号処理装置。 2)予め取得した前記入力周期信号(4)を前記参照信
号(6)として前記トリガ信号(5)に同期して発生す
る参照信号発生手段(2)を有することを特徴とする特
許請求の範囲第1項記載の信号処理装置。 3)前記入力周期信号(4)はストロボ電子ビーム装置
における2次電子検出信号であることを特徴とする特許
請求の範囲第1項記載の信号処理装置。[Claims] 1) In a signal processing device that detects the signal amount for each cycle of an input periodic signal (4) input in synchronization with an external trigger signal (5), the trigger signal (5) The input periodic signal (4
) and a predetermined reference signal (6); and an integrating means (3) for integrating a correlation output signal (7) from the correlation means (1). A signal processing device characterized in that a signal amount of the input periodic signal (4) is detected using an integral output signal (8) from an integrating means (3). 2) A reference signal generating means (2) that generates the input periodic signal (4) obtained in advance as the reference signal (6) in synchronization with the trigger signal (5). The signal processing device according to item 1. 3) The signal processing device according to claim 1, wherein the input periodic signal (4) is a secondary electron detection signal in a strobe electron beam device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61301714A JPS63155737A (en) | 1986-12-19 | 1986-12-19 | Signal processor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61301714A JPS63155737A (en) | 1986-12-19 | 1986-12-19 | Signal processor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63155737A true JPS63155737A (en) | 1988-06-28 |
Family
ID=17900268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61301714A Pending JPS63155737A (en) | 1986-12-19 | 1986-12-19 | Signal processor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63155737A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000003142A (en) * | 1998-02-04 | 2000-01-07 | Shimadzu Corp | Pixel inspection method of flat panel display by electronic beam and inspection apparatus |
JP4825219B2 (en) * | 2004-11-21 | 2011-11-30 | カイペル ゲーエムベーハー アンド カンパニー カーゲー | Vehicle seat |
US9102257B2 (en) | 2010-12-02 | 2015-08-11 | Ud Trucks Corporation | Cushion structure for vehicle seat |
-
1986
- 1986-12-19 JP JP61301714A patent/JPS63155737A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000003142A (en) * | 1998-02-04 | 2000-01-07 | Shimadzu Corp | Pixel inspection method of flat panel display by electronic beam and inspection apparatus |
JP4825219B2 (en) * | 2004-11-21 | 2011-11-30 | カイペル ゲーエムベーハー アンド カンパニー カーゲー | Vehicle seat |
US9102257B2 (en) | 2010-12-02 | 2015-08-11 | Ud Trucks Corporation | Cushion structure for vehicle seat |
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