JPS63155630U - - Google Patents
Info
- Publication number
- JPS63155630U JPS63155630U JP4928987U JP4928987U JPS63155630U JP S63155630 U JPS63155630 U JP S63155630U JP 4928987 U JP4928987 U JP 4928987U JP 4928987 U JP4928987 U JP 4928987U JP S63155630 U JPS63155630 U JP S63155630U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- core tube
- furnace core
- hereinafter referred
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002485 combustion reaction Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Regulation And Control Of Combustion (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987049289U JPH069503Y2 (ja) | 1987-03-31 | 1987-03-31 | 半導体素子製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987049289U JPH069503Y2 (ja) | 1987-03-31 | 1987-03-31 | 半導体素子製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63155630U true JPS63155630U (ru) | 1988-10-12 |
| JPH069503Y2 JPH069503Y2 (ja) | 1994-03-09 |
Family
ID=30871598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987049289U Expired - Lifetime JPH069503Y2 (ja) | 1987-03-31 | 1987-03-31 | 半導体素子製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069503Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116737A (ja) * | 1981-12-30 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
-
1987
- 1987-03-31 JP JP1987049289U patent/JPH069503Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58116737A (ja) * | 1981-12-30 | 1983-07-12 | Oki Electric Ind Co Ltd | 半導体ウエハの熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069503Y2 (ja) | 1994-03-09 |