JPH0476033U - - Google Patents
Info
- Publication number
- JPH0476033U JPH0476033U JP11949390U JP11949390U JPH0476033U JP H0476033 U JPH0476033 U JP H0476033U JP 11949390 U JP11949390 U JP 11949390U JP 11949390 U JP11949390 U JP 11949390U JP H0476033 U JPH0476033 U JP H0476033U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- insertion port
- shaped member
- wafer insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11949390U JPH0476033U (ru) | 1990-11-15 | 1990-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11949390U JPH0476033U (ru) | 1990-11-15 | 1990-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0476033U true JPH0476033U (ru) | 1992-07-02 |
Family
ID=31867449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11949390U Pending JPH0476033U (ru) | 1990-11-15 | 1990-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0476033U (ru) |
-
1990
- 1990-11-15 JP JP11949390U patent/JPH0476033U/ja active Pending