JPS6175126U - - Google Patents

Info

Publication number

JPS6175126U

JPS6175126U JP15935084U JP15935084U JPS6175126U JP S6175126 U JPS6175126 U JP S6175126U JP 15935084 U JP15935084 U JP 15935084U JP 15935084 U JP15935084 U JP 15935084U JP S6175126 U JPS6175126 U JP S6175126U

Authority

JP

Japan

Prior art keywords

diffusion furnace

temperature distribution

heating

reaction tube

furnace

Prior art date

1984-10-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 5
• 238000010438 heat treatment Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000006243 chemical reaction Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 4
• 238000002485 combustion reaction Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 238000002791 soaking Methods 0.000 description 1