JPS6175126U - - Google Patents
Info
- Publication number
- JPS6175126U JPS6175126U JP15935084U JP15935084U JPS6175126U JP S6175126 U JPS6175126 U JP S6175126U JP 15935084 U JP15935084 U JP 15935084U JP 15935084 U JP15935084 U JP 15935084U JP S6175126 U JPS6175126 U JP S6175126U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion furnace
- temperature distribution
- heating
- reaction tube
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Control Of Temperature (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15935084U JPS6175126U (ru) | 1984-10-22 | 1984-10-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15935084U JPS6175126U (ru) | 1984-10-22 | 1984-10-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6175126U true JPS6175126U (ru) | 1986-05-21 |
Family
ID=30717307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15935084U Pending JPS6175126U (ru) | 1984-10-22 | 1984-10-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6175126U (ru) |
-
1984
- 1984-10-22 JP JP15935084U patent/JPS6175126U/ja active Pending
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