JPS6315548U - - Google Patents
Info
- Publication number
- JPS6315548U JPS6315548U JP10902786U JP10902786U JPS6315548U JP S6315548 U JPS6315548 U JP S6315548U JP 10902786 U JP10902786 U JP 10902786U JP 10902786 U JP10902786 U JP 10902786U JP S6315548 U JPS6315548 U JP S6315548U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- electron beam
- beam gun
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims 5
- 210000003092 coiled body Anatomy 0.000 claims 2
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- 230000035939 shock Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図ａは、本考案実施例の電子ビーム蒸着装
置の概略図、第１図ｂは同装置の電子ビーム発生
部の概略図、第１図ｃは、同装置の陰極の支持構
造を示す図、第１図ｄは、同陰極の形状を示す図
、第１図ｅは陰極の形状の変形例を示す図、第２
図は、電子ビーム銃の基本構造を示す図である。
１００……陰極、１０１……陽極、１０２……
グリツド、Ｓ……蒸発源、１……電子ビーム発生
室、２……電磁レンズ、３……処理室、Ｑ１，Ｑ
２……真空排気装置、４……陰極、５……グリツ
ド、ｈ……穴、６……陽極、７……傍熱用ヒータ
、８……イオン捕集用電極、９……支柱、１０…
…ホルダ、１１……ホルダ取付けネジ、１２……
カソード取付けネジ、１３……ヒータ用電源、１
４……陰極電子衝撃用電源、１５……加速用電源
、１６……捕集用電源。
FIG. 1a is a schematic diagram of an electron beam evaporation device according to an embodiment of the present invention, FIG. 1b is a schematic diagram of an electron beam generating section of the device, and FIG. Figure 1d is a diagram showing the shape of the same cathode, Figure 1e is a diagram showing a modified example of the shape of the cathode, Figure 2
The figure shows the basic structure of an electron beam gun. 100... cathode, 101... anode, 102...
Grid, S... Evaporation source, 1... Electron beam generation chamber, 2... Electromagnetic lens, 3... Processing chamber, Q1, Q
2... Vacuum exhaust device, 4... Cathode, 5... Grid, h... Hole, 6... Anode, 7... Indirect heater, 8... Ion collection electrode, 9... Support column, 10 …
...Holder, 11...Holder installation screw, 12...
Cathode mounting screw, 13... Power supply for heater, 1
4... Power source for cathode electron impact, 15... Power source for acceleration, 16... Power source for collection.
Claims (1)
べく、該陰極に相対向して配設された陽極とを具
えた電子ビーム銃において、 前記陰極を六硼化ランタンから形成すると共に
、その中央部に穴を穿設し、更に前記陰極の背面
側にイオン捕集用電極を配設したことを特徴とす
る電子ビーム銃。 (2) 前記加熱手段は、傍熱用ヒータであること
を特徴とする実用新案登録請求の範囲第(1)項記
載の電子ビーム銃。 (3) 前記加熱手段は、それ自身が発熱せしめら
れると共に、熱電子を放出するように構成された
コイル状体からなり、 前記陰極は、前記コイル状体からの放射熱と熱
電子衝撃とによつて加熱せしめられるようにした
ことを特徴とする実用新案登録請求の範囲第(1)
項記載の電子ビーム銃。 (4) 前記陰極は、背面および前記穴の内方から
熱衝撃に強く熱伝導性の高い材料からなるホルダ
によつて支持されており、該ホルダを介して加熱
せしめられるようにしたことを特徴とする実用新
案登録請求の範囲第(1)項乃至第(3)項のいずれか
に記載の電子ビーム銃。[Claims for Utility Model Registration] (1) A cathode for emitting electrons, heating means for heating the cathode, and disposed opposite to the cathode in order to accelerate thermoelectrons emitted from the cathode. In the electron beam gun, the cathode is made of lanthanum hexaboride, a hole is bored in the center of the cathode, and an ion-trapping electrode is provided on the back side of the cathode. An electron beam gun characterized by: (2) The electron beam gun according to claim 1, wherein the heating means is an indirect heating heater. (3) The heating means is composed of a coiled body that is configured to generate heat itself and emit thermionic electrons, and the cathode is configured to react to the radiant heat and thermionic bombardment from the coiled body. Utility model registration claim No. (1) characterized in that the device is heated by twisting it.
Electron beam gun described in section. (4) The cathode is supported from the back surface and from inside the hole by a holder made of a material that is resistant to thermal shock and has high thermal conductivity, and is heated through the holder. An electron beam gun according to any one of claims (1) to (3) of the utility model registration claims.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10902786U JPS6315548U (en) | 1986-07-16 | 1986-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10902786U JPS6315548U (en) | 1986-07-16 | 1986-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315548U true JPS6315548U (en) | 1988-02-01 |
Family
ID=30986757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10902786U Pending JPS6315548U (en) | 1986-07-16 | 1986-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315548U (en) |
-
1986
- 1986-07-16 JP JP10902786U patent/JPS6315548U/ja active Pending
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