JPS63155232U - - Google Patents

Info

Publication number
JPS63155232U
JPS63155232U JP4783587U JP4783587U JPS63155232U JP S63155232 U JPS63155232 U JP S63155232U JP 4783587 U JP4783587 U JP 4783587U JP 4783587 U JP4783587 U JP 4783587U JP S63155232 U JPS63155232 U JP S63155232U
Authority
JP
Japan
Prior art keywords
diaphragm
conductive layer
switch
operating device
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4783587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4783587U priority Critical patent/JPS63155232U/ja
Publication of JPS63155232U publication Critical patent/JPS63155232U/ja
Pending legal-status Critical Current

Links

JP4783587U 1987-03-31 1987-03-31 Pending JPS63155232U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4783587U JPS63155232U (de) 1987-03-31 1987-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4783587U JPS63155232U (de) 1987-03-31 1987-03-31

Publications (1)

Publication Number Publication Date
JPS63155232U true JPS63155232U (de) 1988-10-12

Family

ID=30868814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4783587U Pending JPS63155232U (de) 1987-03-31 1987-03-31

Country Status (1)

Country Link
JP (1) JPS63155232U (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000057892A (ja) * 1999-05-31 2000-02-25 Hokuriku Electric Ind Co Ltd プッシュスイッチ
JP2009024749A (ja) * 2007-07-18 2009-02-05 Ckd Corp ダイアフラム式流体機器
JP2010121689A (ja) * 2008-11-19 2010-06-03 Tokyo Electron Ltd ダイヤフラム弁
JP2010192199A (ja) * 2009-02-17 2010-09-02 Canon Inc 電子機器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6149926B2 (de) * 1981-10-12 1986-10-31 Shinsaku Murakami

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6149926B2 (de) * 1981-10-12 1986-10-31 Shinsaku Murakami

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000057892A (ja) * 1999-05-31 2000-02-25 Hokuriku Electric Ind Co Ltd プッシュスイッチ
JP2009024749A (ja) * 2007-07-18 2009-02-05 Ckd Corp ダイアフラム式流体機器
JP2010121689A (ja) * 2008-11-19 2010-06-03 Tokyo Electron Ltd ダイヤフラム弁
JP2010192199A (ja) * 2009-02-17 2010-09-02 Canon Inc 電子機器

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