JPS6315438U - - Google Patents
Info
- Publication number
- JPS6315438U JPS6315438U JP10855886U JP10855886U JPS6315438U JP S6315438 U JPS6315438 U JP S6315438U JP 10855886 U JP10855886 U JP 10855886U JP 10855886 U JP10855886 U JP 10855886U JP S6315438 U JPS6315438 U JP S6315438U
- Authority
- JP
- Japan
- Prior art keywords
- air blowing
- membrane
- slit
- clean room
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims description 10
- 239000012528 membrane Substances 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 2
- 239000004744 fabric Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Air-Flow Control Members (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986108558U JPH0413552Y2 (id) | 1986-07-15 | 1986-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986108558U JPH0413552Y2 (id) | 1986-07-15 | 1986-07-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6315438U true JPS6315438U (id) | 1988-02-01 |
| JPH0413552Y2 JPH0413552Y2 (id) | 1992-03-30 |
Family
ID=30985861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986108558U Expired JPH0413552Y2 (id) | 1986-07-15 | 1986-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413552Y2 (id) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021167722A (ja) * | 2021-07-15 | 2021-10-21 | 株式会社西部技研 | クリーンブース |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61265433A (ja) * | 1985-05-20 | 1986-11-25 | チヤ−ルズ ダブリユ− ソルテイス | 空気濾過分配構造 |
-
1986
- 1986-07-15 JP JP1986108558U patent/JPH0413552Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61265433A (ja) * | 1985-05-20 | 1986-11-25 | チヤ−ルズ ダブリユ− ソルテイス | 空気濾過分配構造 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021167722A (ja) * | 2021-07-15 | 2021-10-21 | 株式会社西部技研 | クリーンブース |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413552Y2 (id) | 1992-03-30 |