JPS63154287A - Nozzle for laser beam machine - Google Patents

Nozzle for laser beam machine

Info

Publication number
JPS63154287A
JPS63154287A JP61300813A JP30081386A JPS63154287A JP S63154287 A JPS63154287 A JP S63154287A JP 61300813 A JP61300813 A JP 61300813A JP 30081386 A JP30081386 A JP 30081386A JP S63154287 A JPS63154287 A JP S63154287A
Authority
JP
Japan
Prior art keywords
nozzle
gas
workpiece
laser beam
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61300813A
Other languages
Japanese (ja)
Inventor
Kimiharu Yasui
公治 安井
Masaaki Tanaka
正明 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP61300813A priority Critical patent/JPS63154287A/en
Publication of JPS63154287A publication Critical patent/JPS63154287A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • B23K26/1464Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476Features inside the nozzle for feeding the fluid stream through the nozzle
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor

Abstract

PURPOSE:To extend the service life of a nozzle and to stabilize the working quality by providing the gas exhaust port exhausting one part of the gas lad into a nozzle at the converging system side from the nozzle tip. CONSTITUTION:A gas exhaust port 501 is arranged at the position approaching to a converging system 3 in the vicinity of the tip of a nozzle 1. A laser beam 2 is converged by a condensing lens 3 to perform the work of the body 4 to be worked. In this case, when a shielding gas is fed from a gas lead-in port 500, one part of the gas is exhaused from an exhaust port 501, so the gas flow 502 from the nozzle inner part to the nozzle external part is caused. The spatter 6 intruded into the nozzle 1 at the laser machining time is carried out to the nozzle external part with the gas flow 502. consequently, the adhesion of the spatter 6 to the converging system 3 is prevented, the life of the nozzle 1 is extended and the working quality is improved as well.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 、この発明は、レーザによる被加工物からのスパッタに
よるレーザ集光系の汚染を防止するレーザ加工機用ノズ
ルに関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] This invention relates to a nozzle for a laser processing machine that prevents contamination of a laser condensing system due to sputtering from a workpiece being processed by a laser.

〔従来の技術〕[Conventional technology]

第6図は例えば実開昭和52−56689号公報に示さ
れた従来のレーザ加工機用ノズルを示す断面図で2図に
おいて、(1)はノズル、(2)はレーザビーム、(3
)はレーザビーム(2)の集光系で、ここでは集光レン
ズ、(4)はレーザビームで加工される被加工物、(5
)はノズル内のガスの流路を示す矢印。
FIG. 6 is a cross-sectional view showing a conventional nozzle for a laser processing machine disclosed in, for example, Japanese Utility Model Application Publication No. 52-56689. In FIG. 2, (1) is the nozzle, (2) is the laser beam, and (3) is the nozzle.
) is a condensing system for the laser beam (2), here it is a condensing lens, (4) is the workpiece to be processed by the laser beam, and (5)
) is an arrow indicating the gas flow path inside the nozzle.

(500)はガス導入口、(6)は被加工物(4)から
のスパッタである。
(500) is a gas inlet, and (6) is sputtering from the workpiece (4).

次に動作について説明する。レーザビーム(2)は集光
レンズ(3)により細くしぼられてノズルの先端から被
加工物(4)に照射され被加工物(4)の加工を行う。
Next, the operation will be explained. The laser beam (2) is narrowed down by a condensing lens (3) and irradiated onto the workpiece (4) from the tip of the nozzle to process the workpiece (4).

加工面を良質にするため、ノズル内にはガス導入口より
2例えばN2をシールガスとして導入し、ノズルの先端
から被加工物(4)の表面に噴出させる。一般にノズル
の先端は直径2〜3■で、ノズルの径(30〜100+
am)に比較して小さいため。
In order to improve the quality of the machined surface, 2, for example, N2 is introduced as a sealing gas into the nozzle from the gas inlet and is ejected from the tip of the nozzle onto the surface of the workpiece (4). Generally, the tip of the nozzle has a diameter of 2 to 3 cm, and the diameter of the nozzle (30 to 100+
am) because it is small compared to

シールガスはノズル内に圧縮され、したがってノズル内
部に例又は集光レンズ(3)の前面には緩やかなガス流
が発生する。
The sealing gas is compressed into the nozzle, thus creating a gentle gas flow inside the nozzle or in front of the condenser lens (3).

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

従来のレーザ加工機用ノズルは以上のように構成されて
いるので、被加工物からのスパッタ(6)がノズル(1
)の先端からのシールガスの噴出に逆らってノズル内に
進入した場合に(よ、集光系(3)前面の緩やかなガス
流に運ばれて集光系(3)上に付着し。
Since the conventional nozzle for a laser processing machine is configured as described above, the spatter (6) from the workpiece is transferred to the nozzle (1).
) If the gas enters the nozzle against the jet of seal gas from the tip of the condenser (3), it will be carried by the gentle gas flow in front of the condenser (3) and adhere to the condenser (3).

その付着物がレーザビームを吸収して発熱することによ
り集光系(3)が破壊されるという問題があった。
There was a problem in that the condensing system (3) was destroyed due to the deposit absorbing the laser beam and generating heat.

乙の発明は2.上記のような問題点を解消するためにな
されたもので、集光系(3)に被加工物からのスパッタ
が付着しないレーザ加工機用ノズルを得ることを目的と
する。
Party B's invention is 2. This was made to solve the above-mentioned problems, and the object is to obtain a nozzle for a laser processing machine in which spatter from a workpiece does not adhere to the condensing system (3).

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係るレーザ加工機用ノズル(よ、被加工物に
照射され被加工物を加工するレーザビームを集光系で集
光して通過させるノズル、このノズルの先端から被加工
物の表面に噴出されるガスをノズル内に導入するガス導
入口、及び上記ノズルの先端より上記集光系側に設けら
れ、上記ノズル内に導入されたガスの一部を排出してガ
スの外部への流れを発生させるガス排出口を備えたもの
である。
A nozzle for a laser processing machine according to the present invention (a nozzle in which a laser beam that is irradiated onto a workpiece and used to process the workpiece is condensed by a condensing system and passes through, from the tip of this nozzle to the surface of the workpiece) A gas introduction port for introducing the ejected gas into the nozzle, and a gas inlet provided on the condensing system side from the tip of the nozzle, and discharging a part of the gas introduced into the nozzle to cause the gas to flow to the outside. It is equipped with a gas outlet that generates gas.

〔作 用〕[For production]

この発明におけろガス排出口により、ノズル内にはガス
導入口から排出口へ向かうガスの流れが発生し、ノズル
内の被加工物からのスパッタはこの流れによってノズル
内の外部に運び出される。
In this invention, the gas outlet generates a gas flow in the nozzle from the gas inlet to the outlet, and spatter from the workpiece in the nozzle is carried out to the outside of the nozzle.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第1
図はこの発明の一実施例のレーザ加工機用ノズルの断面
図で2図において、 (501)はガス排出口であり、
ガス導入口(500)と集光系、ここでは集光レンズ(
3)間に設けられている。
An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a cross-sectional view of a nozzle for a laser processing machine according to an embodiment of the present invention. In Figure 2, (501) is a gas exhaust port;
A gas inlet (500) and a condensing system, here a condensing lens (
3) It is provided in between.

次に動作について説明する。レーザビーム(2)は集光
レンズ(3)により集光されて被加工物(4)の加工を
行う。この時ガス導入口(500)より2例えばシール
ガスN2が導入され、ノズル(1)の先端から噴出され
ている。ここでガス排出口(501)を設けたことによ
り、ノズル内に導入されたガスの一部はガス排出口から
排出されるので、ノズル内一部からノズルの外部へのガ
スの流れ(502)が発生する。
Next, the operation will be explained. The laser beam (2) is focused by a condensing lens (3) to process the workpiece (4). At this time, seal gas N2, for example, is introduced from the gas inlet (500) and is ejected from the tip of the nozzle (1). By providing the gas exhaust port (501), a part of the gas introduced into the nozzle is discharged from the gas exhaust port, so that the gas flows from a part of the nozzle to the outside of the nozzle (502). occurs.

レーザ加工時には被加工物(4)からスパッタ(6)が
発生するが、このスパッタのノズル内に進入したものは
、上述したガスの流れ(502)によりノズル(1)の
外部へ運び出される。したがってスパッタ(6)が集光
系(3)の面上に付着することは無い。
During laser processing, spatter (6) is generated from the workpiece (4), and the spatter that enters the nozzle is carried out of the nozzle (1) by the above-mentioned gas flow (502). Therefore, spatter (6) does not adhere to the surface of the condensing system (3).

なお、上記実施例ではガス排出口(501)はノズル(
1)に形成された穴単体のものを示したが、第2図に示
すようにガス排出口(501)  近くにガスの流れを
整えるガスガイド(503) を設ければガスの流れが
スムーズになり、効果は増す。
In addition, in the above embodiment, the gas discharge port (501) is a nozzle (
The hole formed in 1) is shown as a single hole, but as shown in Figure 2, if a gas guide (503) is provided near the gas outlet (501) to adjust the gas flow, the gas flow will be smooth. The effect will increase.

また、第3図に示したようにガス導入口を2個設け、一
方を加工用うガス導入口(504)  とし、他方をス
パッタ排出用ガス導入口(505) としてもよい。(
55)は通常のノズルの先端から噴出用のガスの流れを
示している。
Alternatively, as shown in FIG. 3, two gas inlets may be provided, one of which may be used as a gas inlet for processing (504), and the other may be used as a sputter discharge gas inlet (505). (
55) shows the flow of gas ejected from the tip of a normal nozzle.

また、第4図に示したように、ガス導入口(500)と
ガス排出口(501)をノズル(1)の外部で継ぎ2間
にポンプ(9)を設け、ポンプ(9)によりガスがノズ
ル内に循環するようにすれば、ガスの消費量を低減でき
る。
In addition, as shown in Fig. 4, a pump (9) is provided between the gas inlet (500) and the gas outlet (501) by connecting the gas inlet (500) and the gas outlet (501) outside the nozzle (1), and the pump (9) pumps the gas. By circulating the gas within the nozzle, the amount of gas consumed can be reduced.

さらに、第5図に示したように、レーザビームが集光レ
ンズ(3)を通過した後、ベンドミラー(7)により折
り曲げられてノズルの先端に達して被加工物表面に導か
れる構成とし、ガス排出口(501)をベンドミラー(
7)の周囲に設けてもよい。この場合。
Furthermore, as shown in FIG. 5, the laser beam is configured to pass through a condensing lens (3), then be bent by a bend mirror (7), reach the tip of the nozzle, and be guided to the surface of the workpiece, Connect the gas outlet (501) with a bend mirror (
It may be provided around 7). in this case.

集光レンズ(3)とベンドミラー(7)合わせて集光系
とする。
The condensing lens (3) and the bend mirror (7) together form a condensing system.

−なお、上記実施例では集光系として集光レンズを用い
たが、その他日レンズなどの場合も考えられ、同様の効
果を奏する。
-Although a condensing lens was used as the condensing system in the above embodiment, other types of lenses, such as a day lens, may also be used, and the same effects would be achieved.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、被加工物(4)に照
射され被加工物を加工するレーザビームを集光系で集光
して通過させるノズル、このノズルの先端から被加工物
の表面に噴出されるガスをノズル内に導入するガス導入
口、及び上記ノズルの先端より上記集光系側に設けられ
、上記ノズル内に導入されたガスの一部を排出してガス
の外部への流れを発生させるガス排出口を備えたので、
被加工物(4)からのスパッタによる集光系の汚染がほ
と八となく、シたがって集光系が長寿命となるため交換
回数が減少し、安定で且つ安価なレーザ加工ができろレ
ーザ加工機用ノズルが得られる効果がある。
As described above, according to the present invention, there is provided a nozzle through which a laser beam that is irradiated onto the workpiece (4) and processes the workpiece is focused by a condensing system and passes through the workpiece. A gas introduction port for introducing the gas ejected onto the surface into the nozzle, and a gas inlet provided on the condensing system side from the tip of the nozzle, and discharging a part of the gas introduced into the nozzle to the outside of the gas. Equipped with a gas outlet that generates a flow of
There is almost no contamination of the condensing system due to spatter from the workpiece (4), and therefore the condensing system has a long lifespan, reducing the number of replacements and enabling stable and inexpensive laser processing. This has the effect of providing a nozzle for laser processing machines.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明の実施例のレーザ加工機用ノズルを
示す断面図、第2図、第3図、第4図2第5図はそれぞ
れこの発明の田の実施例を示す断面図、第6図は従来の
レーザ加工機用ノズルを示す断面図である。 (1トノズル、 +21 ・レーザビーム、 +31・
・・JI光系。 (4)・被加工物、 (SOO)  ガス導入口、 (
501)−ガス排出口、 (502)  ガスの流れ。 なお1図中同一行号は同一、又は相当部分を示す。
FIG. 1 is a sectional view showing a nozzle for a laser processing machine according to an embodiment of the present invention, and FIGS. 2, 3, 4, 2, and 5 are sectional views showing embodiments of the invention. FIG. 6 is a sectional view showing a conventional nozzle for a laser processing machine. (1 nozzle, +21 ・Laser beam, +31・
...JI optical system. (4) Workpiece, (SOO) gas inlet, (
501) - Gas outlet, (502) Gas flow. Note that the same line numbers in Figure 1 indicate the same or equivalent parts.

Claims (4)

【特許請求の範囲】[Claims] (1)被加工物に照射され被加工物を加工するレーザビ
ームを集光系で集光して通過させるノズル、このノズル
の先端から被加工物の表面に噴出されるガスをノズル内
に導入するガス導入口、及び上記ノズルの先端より上記
集光系側に設けられ、上記ノズル内に導入されたガスの
一部を排出してガスの外部への流れを発生させるガス排
出口を備えたレーザ加工機用ノズル。
(1) A nozzle in which the laser beam that is irradiated onto the workpiece and used to process the workpiece is focused by a condensing system and passed through, and the gas that is ejected from the tip of this nozzle onto the surface of the workpiece is introduced into the nozzle. and a gas exhaust port that is provided on the condensing system side from the tip of the nozzle and that discharges a part of the gas introduced into the nozzle to generate a flow of gas to the outside. Nozzle for laser processing machines.
(2)ガス排出口は、ノズルのガス導入口と集光系間に
設けられた特許請求の範囲第1項記載のレーザ加工機用
ノズル。
(2) The nozzle for a laser processing machine according to claim 1, wherein the gas exhaust port is provided between the gas inlet of the nozzle and the condensing system.
(3)レーザビームはベンドミラーにより被加工物上に
導びかれており3ガス排出口は上記ベンドミラーの周囲
に設けられた特許請求の範囲第1項記載のレーザ加工機
用ノズル。
(3) A nozzle for a laser processing machine according to claim 1, wherein the laser beam is guided onto the workpiece by a bend mirror, and the three gas discharge ports are provided around the bend mirror.
(4)ガス導入口とガス排出口をノズルの外部で継ぎ、
ガスを循環させるようにした特許請求の範囲第1項ない
し第3項のいずれかに記載のレーザ加工機用ノズル。
(4) Connect the gas inlet and gas outlet on the outside of the nozzle,
A nozzle for a laser processing machine according to any one of claims 1 to 3, which circulates gas.
JP61300813A 1986-12-17 1986-12-17 Nozzle for laser beam machine Pending JPS63154287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61300813A JPS63154287A (en) 1986-12-17 1986-12-17 Nozzle for laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61300813A JPS63154287A (en) 1986-12-17 1986-12-17 Nozzle for laser beam machine

Publications (1)

Publication Number Publication Date
JPS63154287A true JPS63154287A (en) 1988-06-27

Family

ID=17889410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61300813A Pending JPS63154287A (en) 1986-12-17 1986-12-17 Nozzle for laser beam machine

Country Status (1)

Country Link
JP (1) JPS63154287A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308951A (en) * 1991-04-23 1994-05-03 Fanuc Ltd. Laser beam machine
US5430816A (en) * 1992-10-27 1995-07-04 Matsushita Electric Industrial Co., Ltd. Multiple split-beam laser processing apparatus generating an array of focused beams
US6538232B2 (en) * 2000-08-05 2003-03-25 Trumpf Gmbh & Company Laser processor with scavenging of optical element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5308951A (en) * 1991-04-23 1994-05-03 Fanuc Ltd. Laser beam machine
US5430816A (en) * 1992-10-27 1995-07-04 Matsushita Electric Industrial Co., Ltd. Multiple split-beam laser processing apparatus generating an array of focused beams
US6538232B2 (en) * 2000-08-05 2003-03-25 Trumpf Gmbh & Company Laser processor with scavenging of optical element

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