JP3491550B2 - High-density energy beam processing method and apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-density energy beam processing method and apparatus having a structure for irradiating a high-density energy beam while supplying an assist gas from both front and back sides of a member to be processed for cutting. In particular, the present invention relates to a device that prevents dross from adhering to the cut portion as much as possible.

[0002]

Conventionally, a member to be machined is cut to separate an unnecessary portion from the member to be machined,
As a processing method for making a hole or forming a thin through groove, a high-density energy beam is applied to the part to be cut (hereinafter referred to as a cutting part) of the workpiece, and the heat is applied to the cutting part. There is a method of melting and cutting. At the time of this cutting, normally, at the same time as the irradiation of the high-density energy beam, an assist gas such as nitrogen or oxygen is jetted from the processing nozzle,
Dross (melt) and evaporates generated by cutting process are quickly removed by the assist gas,
They are prevented from adhering to the workpiece or the condenser lens of the processing nozzle.

When the member to be processed is cut while blowing the assist gas from the irradiation side of the high-density energy beam in this way, in many cases, as shown in FIG. 8, it is caused by the irradiation of the high-density energy beam. The dross D is caused to flow below the cutting portion by the assist gas and adheres to the peripheral portion of the cutting portion. In addition, in FIG. 8, the flow direction of the assist gas is indicated by an arrow.

Regarding the prevention of dross adhesion, there is a technique disclosed in, for example, Japanese Patent Laid-Open No. 5-329679.
This is because the front nozzle is attached to the processing nozzle so that the inclination angle can be adjusted, and the inclination angle of the front nozzle is converted into preset data based on the thickness, material, cutting speed, assist gas flow rate and pressure of the workpiece. By controlling based on this, the flow of the assist gas injected from the processing nozzle and the flow of the assist gas injected from the front nozzle are in the direction along the striations of the melted portion generated on the cut surface, and the dross is blown off. In addition to making it easier, the synthetic vector of the assist gas injected from both nozzles is increased to effectively remove the dross.

However, although this technique can reduce the adhesion of dross to the lower surface side of the member to be processed, the assist gas is supplied from the upper side, which is the irradiation side of the high-density energy beam, and the opposite side is supplied. Since the structure is such that the dross is blown off to a certain lower side, it cannot be said to be a reliable solution to the problem of dross adhering to the workpiece.

Another technique is disclosed in Japanese Patent Laid-Open No. 8-141764.
There is one disclosed in the publication. In all of these technologies, gas nozzles are provided on the upper and lower sides of the workpiece, and the assist gas injected from the lower gas nozzle is flown toward the side that is cut off and not used as a product, so that the dross is not used as a product. It is sprayed to reduce the adhesion of dross on the product side.

However, according to this method, when a very narrow penetrating groove which is opened between the front and back surfaces of the product is formed in the product by cutting with a high-density energy beam, Since it is required that dross does not adhere to the entire circumference of the cut portion (through groove), it cannot be applied in such a case.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a high-density energy beam processing method and apparatus capable of significantly reducing the adhesion of dross to the entire peripheral edge of the cutting portion. To provide.

[0009]

Means for Solving the Problems The present invention is, with respect to the beam irradiation unit, the irradiation side of the high density energy beam, of the assist gas supplied from the opposite side, a high-density energy
One of the assist gases supplied from the side opposite to the beam irradiation side is at least partially elevated by the high-density energy beam irradiation through the cutting portion formed in the workpiece by opening.
Flows to the irradiation side of the density energy beam, high density Enerugibi
The other assist gas supplied to the irradiation side of the beam has a flow directed from one side of the inside and the outside of the beam irradiation section to the other side at least on the surface portion of the member to be processed. Characteristic (Claim 1,
6 ). In addition, the present invention provides a high density energy for the beam irradiation unit.
Supplied from the irradiation side of the nergie beam and the opposite side
Of the assist gases, one assist gas is the other
The supply pressure is higher than that of stogas, and one side of this high pressure
Processed by irradiating cyst gas with high-density energy beam
Flows to the opposite side through the cutting part formed in the member,
One of the assist gases is at least the surface part of the workpiece.
At one of the inside and outside of the beam irradiation unit
Characterized by having a flow from one side to the other
(Claims 2 and 7). Further, the present invention is a processed part.
One of the assist gases supplied from both sides of the material
Cyst gas is applied by irradiation with a high-density energy beam.
To include the entire cutting portion formed in the work member
Installed in a chamber that communicates with the cutting part
After that, it flows to the other side through the cutting part, and the other assist gas
Illuminates the beam at least on the surface of the work piece.
From one side of the inside and outside periphery of the shooting part to the other side
It has a flow directed to (Claim 3).
8).

According to this structure, when one assist gas flows from one side of the member to be processed to the opposite side through the cutting portion, the dross generated by the cutting process passes from the one side of the member to be processed through the cutting portion to the opposite side. It is washed away to the side. On the opposite side where the dross is swept away, the other assist gas is flowing from the inside to the outside periphery of the beam irradiation part, or from the outside periphery to the inside, so the dross pushed away from one side of the workpiece to the opposite side. Is blown away by the other assist gas. Therefore, the adhesion of dross can be significantly reduced. Especially, supply of one assist gas
The pressure was made higher than the supply pressure of the other assist gas
If one of the assist gases is definitely opposite through the cutting
Can be drained to the side. Therefore, by cutting
Reliably apply the generated dross with one assist gas
It is possible to flush from one side of the engineering member to the other side,
The dross swept to the other side is assisted by the other assist gas.
Can be blown away. Also, one assist gas
The chamber into a chamber that communicates with the cutting section.
After feeding, it was configured to flow to the other side through the cutting part
In some cases, the assist gas has a constant pressure in the chamber.
Is stabilized and the pressure is low due to gas leakage.
Since there is no fear of lowering, the assist gas is cut more reliably
Can be drained from the department.

On the surface portion of the member to be processed, it is preferable that the other assist gas has a flow from the outer periphery to the inner side rather than a flow from the inner side to the outer periphery of the beam irradiation portion. The reason is that if the other assist gas is flowing from the outer periphery of the beam irradiation section toward the inner side, the dross that has been swept away to the opposite side of the workpiece will be removed from the outer periphery by the other assist gas. This is because it can be wrapped up and can be prevented from scattering around the outside, which is more effective in preventing the adhesion of dross.

In the present invention, the other assist gas is used as a means for causing the other assist gas to flow from the inner side to the outer periphery of the beam irradiation portion on the surface portion of the member to be processed. it is possible to adopt a configuration for supplying to flow toward the beam irradiation unit along the (0 claim 1).

As another means, an inclined surface may be provided to guide the other assist gas flowing from the gas supply means so as to flow from the outer periphery of the beam irradiating portion to the inner portion (inward direction). Claim 9 ). According to this structure, such a flow of the assist gas can be easily generated by the simple structure of providing the inclined surface, and further, the variation in the ejection direction of the assist gas from the gas supply means such as the nozzle is corrected. As a result, a stable flow of the assist gas can be generated from the outer periphery of the beam irradiation unit to the inner side thereof.

[0014]

[0015]

In the present invention, the assist gas supplied from the beam irradiation side can be configured to be supplied to the beam irradiation unit through the inside of the processing nozzle that irradiates the high-density energy beam (claim 4). 1 1 ). According to this structure, it is not necessary to separately provide a nozzle for ejecting the assist gas supplied from the beam irradiation side.

In the present invention, the member to be processed is formed on the jig body.
It is stored in the formed recess and the jig
It is possible to adopt a configuration in which the body is pressed and fixed on the body.

[0018]

[0019]

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described below with reference to FIGS. Figure 3
In the processing apparatus shown in FIG. 1, the processing nozzle 1 is connected to the oscillator 3 via the transmission tube 2, and the protective glass 4a is provided above the tip exit 1a of the processing nozzle 1, and the condenser lens 4b is further provided thereon. It is provided. Then, the high-density energy beam HB emitted from the oscillator 3 is redirected by the bent mirror 5 in the transmission tube 2, and the condenser lens 4
After passing through b and the protective glass 4a, the workpiece 1 is irradiated from the exit 1a of the processing nozzle 1.

A processing table 6 is provided below the processing nozzle 1, and a member to be processed is arranged on the processing table 6. Then, the high-density energy beam HB emitted from the oscillator 3 passes through the condenser lens 4b as described above, is focused on the cutting portion of the member to be processed, and performs the cutting process. The oscillator 3 is a laser oscillator, an electron beam,
Although a light beam or the like can be applied, it is preferable to use a laser from the viewpoint of handling.

The processing nozzle 1 is configured to be movable in the Z-axis direction (vertical direction), and the processing table 6 is configured to be movable in the XY-axis directions (vertical and horizontal directions in the horizontal plane). Then, during the cutting process, the processing nozzle 1 and the processing table 6 move, whereby the processing nozzle 1 irradiates the workpiece with the high-density energy beam HB along the cutting portion (line to be cut). It is designed to move relative to each other.

In this embodiment, the member to be processed is the metal plate 7 as shown in FIG. 4, and the metal plate 7 is a linear through groove which is opened in the front and back direction by the high-density energy beam HB. 8 is cut. The metal plate 7 is detachably attached to an attachment jig 9 fixed on the processing table 6 and cut.

As shown in FIG. 1, the mounting jig 9 mainly comprises a jig body 10 formed in a box shape, and a metal plate 7 is fitted on the upper surface of the jig body 10. Then, a concave portion 11 for positioning the concave portion is formed. Jig subject 1
A pressing jig 12 for pressing the metal plate 7 housed in the recess 11 to prevent the metal plate 7 from rising is detachably attached by screws 13 to the upper surface of 3.

The holding jig 12 is provided with a long hole 14 (see FIG. 4) so as to surround a portion where the through groove 8 to be cut on the metal plate 7 is formed.
Is indicated by a chain double-dashed line). Then, the high-density energy beam HB emitted from the processing nozzle 1 is
The metal plate 7 is irradiated through the long hole 14.

The cutting process is performed while supplying an assist gas such as nitrogen or oxygen to the high-density energy beam HB irradiation part of the metal plate 7 (hereinafter referred to simply as the beam irradiation part) from above and below. . The assist gas is supplied from one of the assist gases, for example, the assist gas from the lower side (back side) opposite to the irradiation side of the high-density energy beam HB through the mounting jig 9.

That is, the assist gas introducing pipe 16 is connected to the lid plate 15 that closes the open lower surface of the jig body 10. The assist gas introduction pipe 16 is connected to a gas supply source (not shown), and the assist gas from the gas supply source is introduced into the jig body 10. This jig body 1
The inner space of 0 is a chamber 17 having a relatively large volume as a gas supply means, and the assist gas from the gas supply source is temporarily stored in the chamber 17.

An elongated gas outlet 18 is formed on the upper surface of the jig body 10 so as to surround the portion where the through groove 8 which is the cut processing portion of the metal plate 7 housed in the recess 11 is surrounded. There is. The assist gas stored in the chamber 17 is discharged from the gas outlet 18 when the metal plate 7 is cut by the irradiation of the high-density energy beam HB to form a cut portion A (through groove 8) that opens vertically. It flows through the cutting portion A to the upper side which is the opposite side. The flow of this assist gas is shown by arrow B in FIG.

In order to prevent the assist gas stored in the chamber 17 from flowing out only from the cutting portion A formed on the metal plate 7 and from leaking from other parts, the jig body 10 and the cover plate 15 are separated from each other. A gasket 19 is installed between them, and
Between the metal plate 7 and the jig body 10, the metal plate 7 and the holding jig 1
An O-ring 20 is attached between each of them.

On the other hand, the supply of the other assist gas, which is performed from the upper side which is the irradiation side of the high-density energy beam HB, is performed by using the processing nozzle 1 in the gas passage as the gas supply means. This eliminates the waste of separately installing equipment such as a supply nozzle. As a specific configuration for this, the processing nozzle 1 is positioned closer to the outlet 1a than the condenser lens 4b, and the assist gas introduction pipe 2 is provided.
1 is provided, and the assist gas introduction pipe 21 is
The assist gas is connected to a gas supply source (not shown) so that the assist gas is introduced into the processing nozzle 1 from the gas supply source. The assist gas introduced into the processing nozzle 1 is ejected from the tip exit 1a of the processing nozzle 1 and supplied to the beam irradiation section of the metal plate 7 below.

Most of the assist gas ejected from the processing nozzle 1 flows into the elongated hole 14 of the holding jig 12. As shown in FIG. 2, the inner peripheral surface of the elongated hole 14 is formed as an inclined surface 22 that gradually inclines downward from the upper end so as to approach the cut portion of the metal plate 7. Therefore, the assist gas injected downward from the processing nozzle 1 and supplied into the elongated hole 14 hits the inclined surface 22 of the elongated hole 14, flows downward along the inclined surface 22, and is directed to the metal plate 7. Go to

The assist gas is applied to the inclined surface 22.
Since a flow that is directed from the peripheral portion of the elongated hole 14 toward the center side is given when flowing along, the upper surface of the metal plate 7 flows toward the beam irradiation portion from the periphery to the center side, and finally reaches the beam irradiation portion. The chamber 1 flowing upward from the cutting portion A
The assist gas from 7 flows to flow upward. The flow of the assist gas supplied from such an upper side is shown by an arrow C in FIG.

In this case, the supply pressure of one assist gas from the lower side is set higher than the supply pressure of the other assist gas from the upper side. Strictly speaking, the pressure of the assist gas in the chamber 17 is set so as to be higher than the pressure of the assist gas supplied from the processing nozzle 1 in the vicinity of the elongated hole 14, whereby the assist gas in the chamber 17 is assisted. It is ensured that the gas flows upward through the cutting portion A.

The pressure in the chamber 17 gradually decreases as the cutting process progresses because the opening area of the cutting part A increases and the outflow amount of the assist gas increases as the cutting part A becomes longer. Therefore, although depending on the opening area, it is preferable to gradually increase the pressure in the chamber 17 as the cutting process progresses.

Here, the advantage that the assist gas supplied from the lower side to the beam irradiation section is jetted upward from the cutting section A through the chamber 17 is that the pressure of the assist gas in the chamber 17 is stable. There are things to do.
That is, the assist gas flowing out of the assist gas introducing pipe 16 has a large pressure fluctuation. However, when jetted into the chamber 17 having a relatively large volume, the dynamic pressure component is converted into a static pressure component, and the pressure fluctuation is absorbed by the expansion and contraction of the assist gas in the chamber 17.
Within 7, the pressure stabilizes at a substantially constant pressure. Therefore, the pressure control of the assist gas in the chamber 17 becomes easy, and the pressure higher than the pressure of the assist gas supplied from the upper side can be easily maintained.

Further, since the assist gas supplied from the upper side is ejected from the processing nozzle 1 which moves relative to the member to be processed, even if the beam irradiation unit moves due to the progress of cutting processing, the beam irradiation is performed. It is easy to supply the assist gas to the section. On the other hand, if the assist gas supplied from below is ejected from the nozzle, the nozzle must be configured to move as the cutting process progresses, which is structurally complicated.

However, in this embodiment, since the chamber 17 including the entire cutting portion of the metal plate 7 is provided and the assist gas is supplied from the chamber 17, the beam irradiation portion of the beam irradiating portion is advanced as the cutting processing progresses. Even if the position changes, the assist gas can be stably supplied to the beam irradiation unit without moving the chamber 17.

In the above structure, in order to cut the metal plate 7, the metal plate 7 is housed in the recess 11 of the jig body 10, and then the holding jig 12 is screwed onto the jig body 10. 1
Then, the metal plate 7 is fixed by pressing and is fixed so as not to float up.

After that, the oscillator 3 is oscillated and the high-density energy beam HB emitted from the oscillator 3 is passed through a condenser lens to be focused on the upper surface of the metal plate 7 and, at the same time, processed from the assist gas introduction pipe 21. An assist gas is introduced into the nozzle 1, and the outlet 1a is passed through the inside of the processing nozzle 1.
And the assist gas is supplied to the beam irradiation unit from above. Further, the assist gas is introduced into the chamber 17 of the mounting jig 7 from the assist gas introduction pipe 16.

When the metal plate 7 is irradiated with the beam HB, the beam irradiation portion is heated and melted. By this melting (cutting), a cutting portion A in which a part of the cutting processing portion of the metal plate 7 is opened vertically is opened. After that, when the processing table 5 is moved and the beam irradiation section is relatively moved along the cutting processing section, the cutting section A is linearly continuous and is formed as the through groove 8.

Now, when the cut portion A is opened in the metal plate 7, the assist gas in the chamber 17 of the mounting jig 7 is released as shown in FIG.
As shown by arrow B, flows out through the cutting portion A to the upper side,
The assist gas causes the dross generated by the cutting process of the cutting portion A to flow toward the upper surface side of the metal plate 7.
This prevents the dross from adhering to the inner peripheral surface of the cut portion A and the peripheral edge portion of the opening of the cut portion A on the lower surface of the metal plate 7.

The dross, which is pushed up from the chamber 17 through the cutting portion A to the upper side by the assist gas, is pushed to the upper surface side of the metal plate 7, and when the assist gas ejecting upward from the cutting portion A spreads to the outside, the metal plate 7 is discharged. May be attached to the peripheral portion of the opening of the cut portion A on the upper surface of the. However, in this embodiment, the assist gas ejected from the processing nozzle 1 and supplied to the beam irradiation portion from the upper side is, as shown by an arrow C in FIG. It flows diagonally downward from the inside.

Therefore, the assist gas C from the upper side is
The spread of the assist gas B flowing out from the cutting portion A is suppressed, and accordingly, the dross pushed to the upper surface side of the metal plate 7 is assisted to flow in an inward direction from the outer periphery of the cutting portion A. The gas C pushes the cutting portion A inward from the peripheral portion thereof. Then, the dross is scattered from the opening peripheral portion of the cutting portion A by the assist gas C flowing inward from the outer periphery of the cutting portion A and the assist gas B flowing out to the upper side through the cutting portion A, and finally, The assist gas B flowing upward through the cutting portion A is blown and blown upward, and the dross can be prevented from adhering to the opening peripheral portion of the cutting portion A on the upper surface of the metal plate 7.

FIG. 5 shows a second embodiment of the present invention.
The difference from the first embodiment is that the high-density energy beam HB
The assist gas supplied from the irradiation side to the beam irradiation unit is not passed through the inside of the processing nozzle 1, but a dedicated nozzle 23 is provided as a gas supply means. The nozzle 23 is provided immediately above the holding jig 12 in an inclined state according to the inclination of the inclined surface 22 so that the assist gas can be ejected along the inclined surface 22 of the elongated hole 14. ing.

According to this structure, since the assist gas is ejected from the nozzle 23 along the inclined surface 22, the assist gas is rectified even better and flows along the upper surface of the metal plate 7. Therefore, the assist gas can flow from the outer side to the inner side of the cut portion A more favorably, and the adhesion of dross can be prevented more reliably.

FIG. 6 shows a third embodiment of the present invention.
The difference from the first embodiment is that the high-density energy beam HB
The assist gas supplied from the irradiation side to the beam irradiation section is not passed through the inside of the processing nozzle 1, but a dedicated gas passage 24 is formed inside the holding jig 12 as a gas supply means.

A plurality of gas passages 24 are provided on both sides of the elongated hole 14 with a predetermined interval. The upper ends of these gas passages 24 are integrated into one connection port and connected to the assist gas supply source, and the other ends thereof are opened at predetermined intervals below the inclined surface 22 of the holding jig 12.

According to this structure, since the gas passage 24 itself faces from the outside to the inside of the cutting portion, the gas passage 2
Almost all of the assist gas ejected from No. 4 can flow more reliably from the outer side to the inner side of the cut portion A,
It becomes possible to more reliably prevent the adhesion of dross. The number of the gas passage 24 may be one, and the outlet may be opened to the entire inner circumference of the elongated hole 14.

The assist gas supplied from the beam irradiation side does not necessarily need to be supplied obliquely from above to the beam irradiation portion, and may be configured as in the fourth embodiment of the present invention shown in FIG. 7, for example. This fourth embodiment corresponds to the first
The difference from the embodiment is that the high-density energy beam HB
Is provided with a dedicated nozzle 25 as a gas supply means for supplying the assist gas to be supplied to the beam irradiation part from the irradiation side of
The assist gas is directly ejected from the nozzle 25 toward the inside of the cutting portion.

That is, the nozzles 25 are arranged in the vicinity of the upper surface of the metal plate 7 so as to face each other so as to sandwich the cutting portion therebetween. Then, the assist gas ejected from the nozzle 25 flows along the upper surface of the metal plate 7 from the outer periphery of the beam irradiation portion toward the inner portion thereof. With this configuration, almost all of the assist gas ejected from the nozzle 25 can be more reliably flowed from the outer side to the inner side of the cut portion A.

The present invention is not limited to the embodiments described above and shown in the drawings, and the following expansions and modifications are possible. The assist gas supplied from the upper side (beam irradiation side) may be configured to flow from the inside of the beam irradiation unit toward the outside periphery. Even in this case, the dross that has been swept up from the lower side through the cutting portion A,
The assist gas that flows vigorously from the inside of the beam irradiation unit toward the outside is scattered to the outside of the beam irradiation unit.

In order to allow the assist gas supplied from the upper side (beam irradiation side) to flow from the inner side to the outer peripheral side of the beam irradiation unit, a hollow guide is provided which spreads from the upper side to the lower side. The high-density energy beam HB and the assist gas from the lower side (the side opposite to the beam irradiation side) that flows out from the cutting portion A are passed through the inside of It is possible to adopt a configuration in which the fluid is guided toward the outer periphery.

Contrary to the first embodiment, the assist gas supplied from the upper side (beam irradiation side) is made to flow through the cutting portion to the lower side (the side opposite to the beam irradiation side), and the assist gas supplied from the lower side is covered. The surface of the lower side of the processing member may have a flow from one side of the inner side and the outer side of the beam irradiation section to the other side. The assist gas flowing from one side of the member to be processed through the cutting section to the other side may be directly blown from the nozzle to the cutting section and passed through the cutting section without providing a chamber.

Instead of the assist gas, a mist or liquid fluid (for example, water) may be supplied. By doing so, the cooling effect is enhanced. Further, when oil or a chemical agent is attached to the member to be processed, the oil or the chemical agent can be more surely removed as compared with the gas if the fluid is a mist or liquid. Depending on the member to be processed, a chemical liquid capable of improving workability may be supplied. A laser beam is preferable as the high-density energy beam in terms of handling, but the high-density energy beam is not limited to this.

When the cutting portion (cutting line) continues along the straight line or the curved line from the end of the member to be processed, it is cut off,
Assuming that the case where the cutting portion is closed is perforated, and the case where the cutting portion is a straight line or a curved line having the end is the through groove shown in the first embodiment, the present invention is not limited to the through groove, and is not limited to the through groove. It can also be applied when making holes.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing a first embodiment of the present invention.

FIG. 2 is a sectional view of a main part for explaining the operation.

FIG. 3 is a schematic configuration diagram of a processing device.

FIG. 4 is a plan view of a metal plate showing a cutting portion.

FIG. 5 is a view corresponding to FIG. 2 showing a second embodiment of the present invention.

FIG. 6 is a view corresponding to FIG. 2 showing a third embodiment of the present invention.

FIG. 7 is a diagram corresponding to FIG. 2 showing a fourth embodiment of the present invention.

FIG. 8 is a diagram corresponding to FIG. 2 for explaining a conventional problem.

[Explanation of symbols]

In the figure, 1 is a processing nozzle, 7 is a metal plate (member to be processed), 9
Is a mounting jig, 10 is a jig main body, 11 is a concave portion, 12 is a holding jig, 17 is a chamber, 18 is a gas outlet, 22 is an inclined surface, 23 is a nozzle, 24 is a gas passage, 25 is a nozzle , A
Is a cutting part .

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Iso ▲ Saki ▼ Yoshifumi, 1-chome, Showa-cho, Kariya city, Aichi Prefecture DENSO CORPORATION (56) References JP-A-62-72494 (JP, A) JP-A 1-249289 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B23K 26/00-26/42

Claims (12)

(57) [Claims] 1. A high-density energy beam processing method for irradiating a member to be processed with a high-density energy beam to perform a cutting process, wherein a beam irradiation part of the member to be processed is irradiated with an assist gas from the high-density energy beam irradiation side. Of the assist gas supplied from both sides of the member to be processed, one assist gas supplied from the side opposite to the irradiation side of the high-density energy beam is at least partly supplied. The other assist gas supplied from the irradiation side of the high-density energy beam flows toward the irradiation side of the high-density energy beam through the cutting portion formed in the member to be processed by the irradiation of the high-density energy beam. , At least on the surface of the workpiece on the irradiation side of the high-density energy beam, around the inside and outside of the beam irradiation part High density energy beam machining method characterized in that from one side of the inner has a flow directed to the other side. 2. A high-density energy beam processing method for irradiating a member to be processed with a high-density energy beam to perform a cutting process, comprising: a beam irradiation portion of the member to be processed; The assist gas is supplied from the opposite side, and among the assist gases supplied from both sides of the workpiece, one assist gas has a higher supply pressure than the other assist gas, and one of the assist gas having the higher supply pressure. At least partially flows to the opposite side through the cutting portion formed in the member to be processed by irradiation of the high-density energy beam, and the other assist gas is applied to the beam irradiation unit at least at the surface portion of the member to be processed. Density energy beam machining characterized by having a flow from one side to the other side of the inner and outer peripheries of the Law. 3. A high-density energy beam processing method for irradiating a member to be processed with a high-density energy beam to perform a cutting process, comprising: a beam irradiation section of the member to be processed; The assist gas is supplied from the opposite side, and one of the assist gases supplied from both sides of the workpiece is a cutting portion formed by opening the workpiece with the high-density energy beam irradiation. Is introduced into a chamber communicating with the cutting portion, and flows to the opposite side through the cutting portion, and the other assist gas is irradiated with the beam at least on the surface portion of the workpiece. A high-density energy beam processing method, characterized by having a flow from one side of the inner side and the outer side of the portion to the other side. 4. The assist gas supplied from the beam irradiation side is supplied to the beam irradiation unit through the inside of a processing nozzle that irradiates the high density energy beam. The high-density energy beam processing method according to any one of 1. 5. The member to be processed is housed in a recess formed in the jig body, and is pressed and fixed onto the jig body by a holding jig. A high-density energy beam processing method according to claim 1. 6. A high-density energy beam processing apparatus for irradiating a member to be processed with a high-density energy beam to perform cutting, wherein a beam irradiation part of the member to be processed is irradiated with an assist gas from the high-density energy beam side. And at least one of the assist gas supplied from both sides of the member to be processed, which is supplied from the opposite side to the irradiation side of the high-density energy beam. A part is made to flow toward the irradiation side of the high density energy beam through a cutting portion formed in the member to be processed by the irradiation of the high density energy beam, and is supplied from the irradiation side of the high density energy beam. The other assist gas is applied to at least the surface of the workpiece on the irradiation side of the high-density energy beam by the beam irradiation unit. High-density energy beam processing apparatus, comprising means for flowing from one side of the inner and outer peripheries of the same to the other side. 7. A high-density energy beam processing apparatus for irradiating a member to be processed with a high-density energy beam to perform cutting, wherein a beam irradiation section of the member to be processed is irradiated with the high-density energy beam, and Among the gas supply means for supplying the assist gas from the opposite side and the assist gas supplied from both sides of the member to be processed, the supply pressure of one assist gas is made higher than that of the other assist gas, A means for flowing at least a part of one assist gas having a high supply pressure to the opposite side through a cutting portion formed in the member to be processed by irradiation of the high-density energy beam, and is supplied from both sides of the member to be processed. Of the assist gas, the other assist gas is applied to at least the surface portion of the member to be processed around the inside and outside of the beam irradiation portion. A high-density energy beam processing apparatus, comprising: a means for flowing from one side to the other side. 8. A high-density energy beam processing apparatus for irradiating a member to be processed with a high-density energy beam to perform cutting, wherein a beam irradiation portion of the member to be processed is irradiated with the high-density energy beam and an opposite side thereof. One of the chambers, into which an assist gas is introduced, and a cutting portion which is opened in the workpiece by the irradiation of the high-density energy beam in the chamber are formed so as to include the entire chamber. A gas outlet for flowing the assist gas introduced into the chamber through the cutting portion from one side to the other side of both sides of the workpiece, a high-density energy beam irradiation side of a beam irradiation section of the workpiece and its At least the gas supply means for supplying the assist gas to the other side of the opposite side and the assist gas supplied from this gas supply means Engineering member said beam from one side of the inner and outer periphery of the irradiation unit formed by and means for flowing to face to the other side high density energy beam machining apparatus in the surface portion of the. 9. The means for causing the assist gas to flow from at least one of the inner side and the outer side of the beam irradiation section toward the other side at least on the surface portion of the member to be processed is provided outside the beam irradiation section. 9. An inclined surface provided to guide the assist gas flowing out from the gas supply means so as to flow inward from the outer periphery of the beam irradiation unit to the inner portion of the beam irradiation unit. The high-density energy beam processing apparatus described. 10. The assist gas is supplied to at least the target gas.
In the surface part of the processed member, the inside of the beam irradiation part and the
And the hand that flows from one side of the outside to the other side
The stage has the gas supply means arranged laterally of the beam irradiation unit.
The assist gas from the gas supply means
Flow toward the beam irradiation part along the surface of the engineering member
So that the beam irradiation part is
The structure is characterized in that it flows from the side to the inside.
The high-density energy beam processing according to any one of 6 to 8
Engineering equipment . 11. Irradiating with the high-density energy beam
Inside the processing nozzle, the irradiation side of the high-density energy beam
Used as a gas supply means of assist gas supplied from
The assist gas is emitted from the processing nozzle to the beam irradiation.
It is supplied to the firing part.
The high-density energy beam processing apparatus according to any one of 1 . 12. A recess for accommodating the member to be processed is formed.
Pressing the jig body and the workpiece to the jig body
7. A holding jig for fixing is provided.
1. The high-density energy beam processing apparatus according to any one of 1 to 11.