JP2000225486A - Method and device for working by high density energy beam - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remarkably reduce the attachment of dross in the case of performing cutting working by an energy beam. SOLUTION: When assist gas B supplied from the lower side flows from the lower side to the upper side of a metallic plate 7 through a cut part A, dross D generated by cutting working is carried away from the lower side to the upper side of the metallic plate 7 through the cut part A. On the upper side where the dross D has been carried away, since another assist gas C flows from the outside periphery of a part irradiated by a beam to the inside, the dross D carried away from the lower side to the upper side of the metallic plate 7, is blown out by the assist gas. By this mechanism, the attachment of the dross D can be remarkably reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-density energy beam processing method and apparatus for irradiating a high-density energy beam while supplying assist gas from both the front and back sides of a workpiece to perform cutting. In particular, the present invention relates to a device that minimizes the attachment of dross to a cut portion.

[0002]

Conventionally, a workpiece is cut and processed to separate unnecessary portions from the workpiece.
As a processing method for forming a hole or forming a thin through-groove, a high-density energy beam is applied to a portion to be cut (hereinafter referred to as a cutting portion) of a member to be processed, and the heat is applied to the cutting portion. There is a method of melting and cutting. At the time of this cutting, usually, an assist gas such as nitrogen or oxygen is injected from the processing nozzle simultaneously with the irradiation of the high-energy energy beam,
The dross (melt) and evaporate generated by the cutting process are quickly removed by the assist gas,
They are prevented from adhering to the workpiece and the condenser lens of the processing nozzle.

When a workpiece is cut while blowing an assist gas from the high-energy energy beam irradiation side as described above, in many cases, as shown in FIG. The dross D is flowed below the cutting portion by the assist gas, and adheres to the periphery of the cutting portion. In FIG. 8, the flow direction of the assist gas is indicated by arrows.

A technique for preventing the dross from adhering is disclosed in, for example, Japanese Patent Application Laid-Open No. 5-329679.
This means that the front nozzle is attached to the processing nozzle so that the inclination angle can be adjusted, and the inclination angle of the front nozzle is set to data set in advance based on the thickness, material, cutting speed, flow rate and pressure of the assist gas of the workpiece. Blow off the dross by controlling the flow of the assist gas ejected from the processing nozzle and the assist gas ejected from the front nozzle in a direction along the streak of the melted portion generated on the cut surface. In addition, the combined vector of the assist gas ejected from both nozzles is increased to more effectively remove the dross.

[0005] However, in this technique, dross can be reduced from adhering to the lower surface side of the workpiece, but the assist gas is supplied from the upper side which is the irradiation side of the high-energy energy beam, and the opposite side is supplied. Since the dross is blown off to a certain lower side, it cannot be said to be a reliable solution to the problem that the dross adheres to the workpiece.

Another technique is disclosed in Japanese Patent Laid-Open Publication No.
Is disclosed in Japanese Patent Application Laid-Open Publication No. HEI 9-203 (1995). In each of these technologies, gas nozzles are provided on both the upper and lower sides of the workpiece, and the assist gas injected from the lower gas nozzle is cut off and flows toward the side that is not used as a product, so that dross is not used as a product. This is to reduce dross adhesion to the product side by spraying.

However, according to this method, if a very narrow groove formed between the front and back surfaces of the product is formed by cutting with a high-density energy beam, this method is not suitable. Since it is required that dross does not adhere to the entire periphery of the cut portion (through groove), it cannot be applied in such a case.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a high-density energy beam processing method and apparatus capable of greatly reducing the dross adherence to the entire peripheral edge of a cut portion. To provide.

[0009]

According to the present invention, at least a part of the assist gas supplied to the beam irradiation unit from the irradiation side of the high-density energy beam and the opposite side is provided. Flows to the opposite side through the cut portion formed in the workpiece by the irradiation of the high-density energy beam, and the other assist gas is at least one of the inside and the outside of the beam irradiation section at the surface portion of the workpiece. It has a flow that flows from one side to the other side (claims 1 and 7).

According to this configuration, when one of the assist gases flows from one side of the workpiece through the cutting portion to the opposite side, dross generated by the cutting process is removed from one side of the workpiece through the cutting portion. Is washed away to the side. On the other side where the dross is swept away, the other assist gas flows from the inside to the outside periphery of the beam irradiation part or from the outside periphery to the inside, so the dross swept away from one side of the workpiece to the opposite side. Is blown off by the other assist gas. For this reason, the adhesion of dross can be significantly reduced.

It is preferable that the other assist gas has a flow from the outer periphery to the inner side rather than a flow from the inner side to the outer periphery of the beam irradiation portion at the surface portion of the workpiece. The reason is that if the other assist gas is flowing from the outer periphery to the inside of the beam irradiation part, the dross that has been washed away to the opposite side of the workpiece will be removed from the outer periphery by the other assist gas. Because it can be wrapped around and can be prevented from scattering around the outside, it is more effective in preventing dross from adhering.

In the present invention, the other assist gas is used as a means for flowing the other assist gas from the inside to the outside periphery of the beam irradiation portion on the surface portion of the workpiece, and the other assist gas is provided on the surface of the workpiece. (The second and eleventh aspects).

Further, as another means, it is possible to provide an inclined surface for receiving the other assist gas flowing out from the gas supply means and guiding it to flow inward from the outer periphery to the inner side of the beam irradiation part ( Claim 8). According to this configuration, such a flow of the assist gas can be easily generated by a simple configuration in which the inclined surface is provided, and furthermore, a variation in the direction in which the assist gas is ejected from the gas supply means such as a nozzle is corrected. As a result, a stable flow of the assist gas from the outer periphery to the inner side of the beam irradiation unit can be generated.

In this case, the gas supply means may be configured to supply the other assist gas so as to flow along the inclined surface. With this configuration, the assist gas can be reliably flowed along the inclined surface, and the dross removing effect is improved.

Further, a gas passage may be formed as a gas supply means in the member having the inclined surface, and the other assist gas may be supplied from the gas passage so as to flow along the inclined surface. (Claim 10). With this configuration, it is not necessary to separately provide a nozzle for supplying the assist gas, so that the piping configuration can be simplified and space can be saved.

In the present invention, the assist gas supplied from the beam irradiation side may be configured to be supplied to a beam irradiation unit through the inside of a processing nozzle for irradiating a high-density energy beam. , 13). According to this configuration, it is not necessary to separately provide a nozzle for ejecting the assist gas supplied from the beam irradiation side.

According to the present invention, the supply pressure of the one assist gas can be higher than the supply pressure of the other assist gas. Thereby, one of the assist gases can be reliably flowed to the opposite side through the cutting portion. For this reason, the dross generated by the cutting process is
One of the assist gases can reliably push the workpiece from one side to the opposite side, and the dross flushed to the opposite side can be blown off by the other assist gas.

In the present invention, one of the assist gases is supplied to a chamber provided so as to communicate with the cutting section,
It can be configured to flow to the opposite side through the cutting portion (claims 4 and 12). According to this configuration, the assist gas is stabilized so as to have a constant pressure in the chamber, and there is no danger of pressure drop due to gas leakage, so that the assist gas can be more reliably discharged from the cutting portion. .

In the present invention, a mist or liquid fluid can be supplied in place of the assist gas (claims 6 and 14). If the atomized or liquid fluid is supplied to the beam irradiating unit, the cooling effect is enhanced. Further, depending on the member to be processed, a chemical solution capable of improving workability may be supplied. Further, when a chemical or the like has adhered to the workpiece, the chemical or the like can be more reliably removed.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. FIG.
In the processing apparatus shown in FIG. 1, a processing nozzle 1 is connected to an oscillator 3 via a transmission pipe 2, and a protective glass 4a is provided above a tip outlet 1a of the processing nozzle 1, and a condenser lens 4b is further provided thereon. Is provided. The direction of the high-density energy beam HB emitted from the oscillator 3 is changed by the bent mirror 5 in the transmission pipe 2,
b and the protective glass 4a, and is irradiated from the outlet 1a of the processing nozzle 1 toward the workpiece.

A processing table 6 is provided below the processing nozzle 1, and a workpiece to be processed is disposed on the processing table 6. Then, the high-density energy beam HB emitted from the oscillator 3 passes through the condenser lens 4b as described above, and is focused on a cut portion of the workpiece to perform a cutting process. The oscillator 3 has a laser oscillation, an electron beam,
Although a light beam or the like can be applied, a laser is preferable in terms of handling.

The processing nozzle 1 is configured to be movable in the Z-axis direction (vertical direction), and the processing table 6 is configured to be movable in the XY-axis directions (vertical and horizontal directions in a horizontal plane). At the time of cutting, the processing nozzle 1 and the processing table 6 move, whereby the processing nozzle 1 irradiates the workpiece with the high-density energy beam HB along the cutting portion (line to be cut). So that they move relative to each other.

In this embodiment, the member to be processed is a metal plate 7 as shown in FIG. 4, and a very narrow linear groove formed in the metal plate 7 in the front and back directions by the high-density energy beam HB. 8 is cut. The metal plate 7 is detachably mounted on a mounting jig 9 fixed on the processing table 6 and cut.

As shown in FIG. 1, the mounting jig 9 is mainly composed of a box-shaped jig main body 10, and a metal plate 7 is fitted on the upper surface of the jig main body 10. A concave portion 11 for positioning is formed. Jig 1
A holding jig 12 for holding the metal plate 7 accommodated in the concave portion 11 and preventing the metal plate 7 from being lifted is detachably attached to an upper surface portion of the recess 3 with a screw 13.

The holding jig 12 has an elongated hole 14 (FIG. 4) so as to surround the portion where the through-groove 8 to be cut into the metal plate 7 is formed.
Is indicated by a two-dot chain line). Then, the high-density energy beam HB emitted from the processing nozzle 1 is
The metal plate 7 is irradiated through the long holes 14.

The cutting process is performed while supplying an assist gas such as nitrogen or oxygen from both the upper and lower sides to a portion of the metal plate 7 irradiated with the high-density energy beam HB (hereinafter, simply referred to as a beam irradiated portion). . The supply of one of the assist gases, for example, the assist gas from the lower side (back side) opposite to the irradiation side of the high-density energy beam HB is configured to be performed via the mounting jig 9.

That is, an assist gas introduction pipe 16 is connected to a cover plate 15 that closes the open lower surface of the jig body 10. The assist gas introduction pipe 16 is connected to a gas supply source (not shown), and the assist gas from the gas supply source is introduced into the jig body 10. This jig body 1
The internal space 0 is a chamber 17 having a relatively large volume as gas supply means, and the assist gas from the gas supply source is temporarily stored in the chamber 17.

An elongated gas outlet 18 is formed in the upper surface of the jig body 10 so as to surround the portion where the through-groove 8 is formed, which is a cut portion of the metal plate 7 housed in the recess 11. I have. When the metal plate 7 is cut by irradiation of the high-density energy beam HB to form a cut portion A (groove 8) which is opened vertically, the assist gas stored in the chamber 17 is supplied from the gas outlet 18. Through the cut portion A, it flows out to the upper side which is the opposite side. The flow of the assist gas is indicated by an arrow B in FIG.

In order to prevent the assist gas stored in the chamber 17 from flowing out only from the cut portion A formed in the metal plate 7 and from leaking out from the others, the jig body 10 and the cover plate 15 Gasket 19 is attached between them,
Between metal plate 7 and jig body 10, metal plate 7 and holding jig 1
O-rings 20 are mounted between the two.

On the other hand, the other assist gas supplied from the upper side which is the irradiation side of the high-density energy beam HB is supplied by using the processing nozzle 1 in a gas passage as gas supply means. This eliminates the need to separately install a supply nozzle and the like. As a specific configuration for this purpose, the processing nozzle 1 is located closer to the outlet 1a than the condenser lens 4b,
1 is provided, and this assist gas introduction pipe 21 is
An assist gas is connected to a gas supply source (not shown) and introduced into the processing nozzle 1 from the gas supply source. Then, the assist gas introduced into the processing nozzle 1 is blown out from a distal end outlet 1a of the processing nozzle 1 and supplied to a beam irradiation unit of the metal plate 7 below.

Most of the assist gas ejected from the processing nozzle 1 flows into the elongated hole 14 of the holding jig 12. As shown in FIG. 2, the inner peripheral surface of the elongated hole 14 is formed as an inclined surface 22 that is inclined downward from the upper end so as to gradually approach the cut portion of the metal plate 7. Therefore, the assist gas injected downward from the processing nozzle 1 and supplied into the elongated hole 14 hits the inclined surface 22 of the elongated hole 14, flows downward along the inclined surface 22, and flows to the metal plate 7. Heading.

Then, the assist gas is supplied to the inclined surface 22.
Is given from the peripheral portion of the long hole 14 toward the center when flowing along, the upper surface portion of the metal plate 7 flows toward the beam irradiating portion from the periphery toward the center side, and finally flows. First, the chamber 1 flowing upward from the cutting portion A
Multiplied by the assist gas from 7, the gas flows upward. Such a flow of the assist gas supplied from above is indicated by an arrow C in FIG.

In this case, the supply pressure of one assist gas from the lower side is set higher than the supply pressure of the other assist gas from the upper side. Strictly speaking, the pressure of the assist gas in the chamber 17 is set to be higher than the pressure in the vicinity of the long hole 14 of the assist gas supplied from the processing nozzle 1. This ensures that the gas flows upward through the cutting section A.

The pressure in the chamber 17 gradually decreases with the progress of cutting because the opening area of the cutting portion A increases and the amount of assist gas flowing out increases. Therefore, although it depends on the opening area, it is preferable to gradually increase the pressure in the chamber 17 as the cutting process proceeds.

Here, the advantage that the assist gas supplied from below to the beam irradiation section is ejected upward from the cut section A via the chamber 17 is that the pressure of the assist gas in the chamber 17 is stable. To do that.
That is, the assist gas flowing out from the assist gas introduction pipe 16 has a large pressure fluctuation. However, when it is ejected into the chamber 17 having a relatively large volume, the dynamic pressure component is converted into a static pressure component, and the pressure fluctuation is absorbed by expansion and contraction of the assist gas in the chamber 17.
In 7, the pressure stabilizes at a substantially constant pressure. Therefore, the pressure control of the assist gas in the chamber 17 becomes easy, and it is possible to easily maintain the pressure higher than the pressure of the assist gas supplied from the upper side.

Since the assist gas supplied from the upper side is ejected from the processing nozzle 1 which moves relatively to the workpiece, even if the beam irradiation unit moves due to the progress of the cutting process, the beam irradiation is performed. It is easy to supply the assist gas to the section. On the other hand, if the assist gas supplied from below is ejected from the nozzle, the nozzle must be configured to move with the progress of the cutting process, which is structurally complicated.

However, in the present embodiment, the chamber 17 is provided so as to cover the entire cutting portion of the metal plate 7, and the assist gas is supplied from the chamber 17. Even if the position changes, the assist gas can be stably supplied to the beam irradiation unit without moving the chamber 17.

In the above configuration, in order to cut the metal plate 7, the metal plate 7 is housed in the concave portion 11 of the jig main body 10, and then the holding jig 12 is screwed onto the jig main body 10. 1
3, and the metal plate 7 is pressed and fixed so as not to float.

Thereafter, the oscillator 3 is caused to oscillate, and the high-density energy beam HB emitted from the oscillator 3 is condensed on the upper surface of the metal plate 7 through a condenser lens. An assist gas is introduced into the nozzle 1, and an outlet 1 a passes through the inside of the processing nozzle 1.
To supply the assist gas to the beam irradiation unit from above. Further, assist gas is introduced into the chamber 17 of the mounting jig 7 from the assist gas introduction pipe 16.

When the metal plate 7 is irradiated with the beam HB, the beam irradiation part is heated and melted. By this melting (cutting), a cutting portion A in which a part of the cutting portion of the metal plate 7 opens vertically is opened. After that, when the processing table 5 is moved and the beam irradiating part is relatively moved along the cutting processing part, the cutting part A is linearly continuous and is formed as the through groove 8.

Now, when the cut portion A is opened in the metal plate 7, the assist gas in the chamber 17 of the mounting jig 7 is discharged as shown in FIG.
Flows upward through the cutting portion A as shown by the arrow B, and
The assist gas pushes dross generated by the cutting process of the cutting portion A to the upper surface side of the metal plate 7.
This prevents dross from adhering to the inner peripheral surface of the cut portion A and the periphery of the opening of the cut portion A on the lower surface of the metal plate 7.

The dross that has been flushed upward from the chamber 17 through the cutting portion A to the upper surface side of the metal plate 7 by the assist gas that has been blown upwardly, when the assist gas that is blown upward from the cutting portion A spreads outward, the metal plate 7 is removed. May adhere to the periphery of the opening of the cut portion A on the upper surface of the substrate. However, in this embodiment, the assist gas ejected from the processing nozzle 1 and supplied from above to the beam irradiating portion is located on the upper surface portion of the metal plate 7 at the outer periphery of the cutting portion A as shown by the arrow C in FIG. It flows obliquely downward from the inside.

Therefore, the assist gas C from above is
The spread of the assist gas B flowing out of the cutting portion A is suppressed, and the dross pushed to the upper surface side of the metal plate 7 flows from the outer periphery to the inner side of the cutting portion A. The gas C allows the cutting portion A to be pushed inward from the periphery. The dross is scattered from the periphery of the opening of the cutting portion A by the assist gas C flowing inward from the outer periphery of the cutting portion A and the assist gas B flowing upward through the cutting portion A. It is made to fly upward by multiplying the assist gas B flowing upward through the cut portion A, and dross can be prevented from adhering to the opening peripheral portion of the cut portion A on the upper surface of the metal plate 7.

FIG. 5 shows a second embodiment of the present invention.
The difference from the first embodiment is that the high-density energy beam HB
Instead of passing the assist gas supplied from the irradiation side to the beam irradiation section through the inside of the processing nozzle 1, a dedicated nozzle 23 is provided as a gas supply means. The nozzle 23 is provided just above the holding jig 12 in an inclined state in accordance with the inclination of the inclined surface 22 so that the assist gas can be jetted along the inclined surface 22 of the long hole 14. ing.

According to this configuration, since the assist gas is ejected from the nozzle 23 along the inclined surface 22, the assist gas is further rectified and flows along the upper surface of the metal plate 7. For this reason, the assist gas flows from the outside to the inside of the cut portion A more favorably, and the adhesion of dross can be more reliably prevented.

FIG. 6 shows a third embodiment of the present invention.
The difference from the first embodiment is that the high-density energy beam HB
Instead of passing the assist gas supplied from the irradiation side to the beam irradiation unit through the inside of the processing nozzle 1, a dedicated gas passage 24 is formed inside the holding jig 12 as gas supply means.

A plurality of the gas passages 24 are provided on both sides of the long hole 14 at a predetermined interval. The upper ends of the gas passages 24 are integrated into one connection port and connected to an assist gas supply source, and the other ends are opened at predetermined intervals below the inclined surface 22 of the holding jig 12.

According to this configuration, since the gas passage 24 itself faces from the outside to the inside of the cut portion, the gas passage 2
Almost all of the assist gas ejected from 4 can more reliably flow from the outside to the inside of the cutting portion A,
Dross can be more reliably prevented from adhering. Note that the gas passage 24 may be a single gas passage, and the outlet of the gas passage 24 may be open to the entire inner periphery of the long hole 14.

The assist gas supplied from the beam irradiation side does not necessarily need to be supplied to the beam irradiation section from obliquely above, and may be configured, for example, as in the fourth embodiment of the present invention shown in FIG. This fourth embodiment is similar to the first embodiment.
The difference from the embodiment is that the high-density energy beam HB
A dedicated nozzle 25 is provided as gas supply means for supplying an assist gas to be supplied to the beam irradiation unit from the irradiation side of
The assist gas is ejected from the nozzle 25 directly from outside to inside of the cutting portion.

That is, the nozzles 25 are arranged in the vicinity of the upper surface of the metal plate 7 on both sides of the cut portion so as to face each other with the cut portion therebetween. The assist gas ejected from the nozzle 25 flows along the upper surface of the metal plate 7 from the outer periphery of the beam irradiation unit to the inner side. According to this configuration, almost all of the assist gas ejected from the nozzle 25 can flow more reliably from the outside to the inside of the cut portion A.

The present invention is not limited to the embodiment described above and shown in the drawings, but can be extended or modified as follows. The assist gas supplied from the upper side (beam irradiation side) may be configured to flow from the inside to the outer periphery of the beam irradiation unit. Even in this case, the dross flushed upward from the lower side through the cutting portion A is
The assist gas, which vigorously flows from the inside of the beam irradiation unit toward the outside, scatters to the outside of the beam irradiation unit.

In order for the assist gas supplied from the upper side (beam irradiation side) to flow from the inside to the outer periphery of the beam irradiation part, a hollow guide extending from the upper side to the lower side is provided, and the guide is provided. Through the high-density energy beam HB and the assist gas from the lower side (the opposite side to the beam irradiation side) flowing out of the cutting section A, and supply the assist gas supplied from the upper side on the outer surface of the guide from the inside of the beam irradiation section It is possible to adopt a configuration in which the air is guided to flow toward the outer periphery.

Contrary to the first embodiment, the assist gas supplied from the upper side (beam irradiation side) flows through the cutting section to the lower side (opposite to the beam irradiation side), and the assist gas supplied from the lower side is covered. The lower surface portion of the processing member may be configured to have a flow from one side of the inside and outside periphery of the beam irradiation unit to the other side. The assist gas flowing from one side of the workpiece to the other side through the cutting portion may be directly blown from the nozzle to the cutting portion without passing through the chamber, and may pass through the cutting portion.

Instead of the assist gas, a mist or liquid fluid (for example, water) may be supplied. This increases the cooling effect. In addition, when oil or chemicals adhere to the workpiece, if the liquid is a mist or a liquid, the oil or chemicals can be more reliably removed as compared to gas. Depending on the member to be processed, a chemical solution capable of improving workability may be supplied. As the high-energy energy beam, a laser beam is preferable for handling, but is not limited thereto.

The case where the cutting portion (cutting line) continues along the straight line or the curve from end to end of the workpiece is cut off.
Assuming that the case where the cutting portion is closed is perforated, and the case where the cutting portion is a straight line or a curve having ends is the through groove shown in the first embodiment, the present invention is not limited to the through groove, and the present invention is not limited thereto. It can be applied to drilling.

[Brief description of the drawings]

FIG. 1 is a sectional view of a main part showing a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part for describing an operation.

FIG. 3 is a schematic configuration diagram of a processing apparatus.

FIG. 4 is a plan view of a metal plate showing a cut portion;

FIG. 5 is a view corresponding to FIG. 2, showing a second embodiment of the present invention;

FIG. 6 is a view corresponding to FIG. 2, showing a third embodiment of the present invention;

FIG. 7 is a view corresponding to FIG. 2, showing a fourth embodiment of the present invention;

FIG. 8 is a diagram corresponding to FIG. 2 for explaining a conventional problem.

[Explanation of symbols]

In the figure, 1 is a processing nozzle, 7 is a metal plate (workpiece), 9
Denotes a mounting jig, 12 denotes a holding jig, 17 denotes a chamber, 22 denotes an inclined surface, 23 denotes a nozzle, 24 denotes a gas passage, and 25 denotes a nozzle.

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Tetsuaki Kamiya 1-1-1, Showa-cho, Kariya-shi, Aichi Prefecture Inside Denso Co., Ltd. (72) Inventor Yoshifumi Iso ▲ saki ▼ 1-1-1, Showa-cho, Kariya-shi, Aichi Share F term in DENSO Corporation (reference) 4E068 AE01 CH05 CH07 CH08

Claims (14)

[Claims] 1. A high-density energy beam processing method for cutting a workpiece by irradiating a high-density energy beam to a workpiece, comprising: a beam irradiation section of the workpiece; An assist gas is supplied from the opposite side, and among the assist gases supplied from both sides of the workpiece, at least a part of the assist gas forms an opening in the workpiece by irradiation of the high-density energy beam. The other assist gas has a flow directed from one side of the inside and outside periphery of the beam irradiation unit to the other side at least at a surface portion of the workpiece, through the cut portion. A high-density energy beam processing method. 2. The other assist gas is supplied so as to flow toward the beam irradiating section along the surface of the workpiece, so that the beam is directed from the outer periphery to the inner side of the beam irradiating section. 2. The high-density energy beam processing method according to claim 1, wherein the flow is configured to have a flow directed to the energy beam. 3. The supply pressure of the one assist gas flowing to the opposite side through a cut portion formed in the member to be processed is higher than the supply pressure of the other assist gas. Or the high-density energy beam processing method according to 2. 4. The one assist gas, which flows to the opposite side through a cut portion formed in the workpiece to be processed, is introduced into a chamber provided so as to communicate with the cut portion, and then flows through the cut portion. 4. The high-density energy beam processing method according to claim 1, wherein the high-density energy beam processing method is configured to flow to the opposite side. 5. The beam irradiation unit according to claim 1, wherein the assist gas supplied from the beam irradiation side is supplied to the beam irradiation unit through an inside of a processing nozzle for irradiating the high-density energy beam. The high-density energy beam processing method according to any one of the above. 6. The high-density energy beam processing method according to claim 1, wherein a mist or liquid fluid is supplied instead of the assist gas. 7. A high-density energy beam processing apparatus for performing a cutting process by irradiating a high-density energy beam to a member to be processed, and irradiating a beam irradiation part of the member to be processed with the high-density energy beam. Gas supply means for supplying an assist gas from an opposite side; and at least one of the assist gases of the assist gas supplied to the beam irradiation unit from both sides of the high-density energy beam irradiation side and the opposite side. Means for flowing the portion to the opposite side through a cut portion formed in the workpiece by irradiation of the high-density energy beam; and supplying the beam to the beam irradiation portion from both sides of the high-density energy beam irradiation side and the opposite side. Out of the assist gas, the other assist gas is supplied at least to the surface of the workpiece by the beam irradiation unit. A high-density energy beam processing apparatus comprising: a means for flowing from one side to the other side of the inner side and the outer side. 8. A means for flowing the other assist gas at least at a surface portion of the workpiece to be directed from one side to the other side of the inside and outside periphery of the beam irradiation unit, 8. An inclined surface which is provided on the outside and guides the other assist gas flowing out from the gas supply means so as to flow from the outer periphery to the inner side of the beam irradiation unit. High-density energy beam processing equipment. 9. The high-density energy beam processing according to claim 8, wherein the gas supply means for the other assist gas is configured to supply the other assist gas along the inclined surface. apparatus. 10. A gas passage is formed as a gas supply means for the other assist gas in the member having the inclined surface, and the other assist gas flows along the inclined surface from the gas passage. 9. The high-density energy beam processing apparatus according to claim 8, wherein the high-energy energy beam processing apparatus is supplied to the apparatus. 11. A means for flowing the other assist gas at least at a surface portion of the workpiece to be directed from one side to the other side of the inside and outside of the beam irradiation section, A gas supply unit is arranged on a side of the beam irradiation unit, and the other assist gas is supplied from the gas supply unit so as to flow toward the beam irradiation unit along a surface of the workpiece. 8. The high-density energy beam processing apparatus according to claim 7, wherein the beam irradiation part is configured to flow from the outer periphery to the inner part. 12. A chamber which communicates with a cutting portion formed in said workpiece by irradiation with said high-density energy beam, said chamber being used as a gas supply means for said one assist gas, and said one assist gas The high-density energy beam processing apparatus according to any one of claims 7 to 11, wherein after flowing into the chamber, it flows to the opposite side through the cutting portion. 13. Use of the inside of a processing nozzle for irradiating the high-density energy beam as gas supply means for an assist gas supplied from the high-density energy beam irradiation side,
13. The assist gas according to claim 7, wherein the assist gas is supplied from the processing nozzle to the beam irradiation unit.
A high-density energy beam processing apparatus according to any one of the above. 14. The high-density energy beam processing apparatus according to claim 7, wherein a mist or liquid fluid is supplied instead of the assist gas.