TW201313373A - Laser head - Google Patents

Abstract

The invention relates to a method and a device for the heat-based and fluid-based treatment of a workpiece. The method comprises the following steps: - introducing fluid (F) through a fluid feed zone (6) arranged in a wet zone (4); - creating a fluid jet by discharging the fluid (F) through a nozzle (7), likewise arranged in the wet zone (4), in the direction of the workpiece surface (2'); - emitting a focused laser beam (L) from a dry zone (5) through a transparent separation layer separating the dry zone (5) from the wet zone (4) into the nozzle (7) in the direction of the workpiece surface (2'); - adjusting the machining distance (3) between tool head (1) and workpiece surface (2'); the fluid jet being surrounded, over a first portion of the entire length thereof, by the nozzle (7), and the machining distance (3) being adjusted such that a machining gap (3') forms between the nozzle end face (7') and workpiece surface (2'), which gap is filled at least in the region of the at least one laser beam (L) with a fluid film (F'), such that the fluid jet is surrounded and protected over the remaining portion thereof by said fluid film (F'), characterised in that the processing distance (3) is controlled by the pressure of the fluid (F).

Description

Tool head

The present invention relates to an apparatus and method for laser and liquid based processing of materials. More particularly, the present invention relates to an apparatus and method for directing a laser beam contained within a liquid jet to a workpiece, and an apparatus and method for protecting a liquid jet.

In many areas of material processing, processing materials with laser beams has long been a prior art. The energy required for material processing is provided by the high energy of a particular wavelength that is incident on the workpiece and by the bundle of coherent optical radiation, and the optical radiation causes a high surface temperature rise at the illuminated portion. Depending on the amount of energy supplied to the site of action, heat treatment may cause surface changes and may also melt away the material to be removed.

It is often advantageous to carry out such processing with liquid assistance. The liquid can only be used to cool the environment near the location of action. Lasers can be used only for heating to initiate a chemical process through thermal induction for a real process. In this case, thermal energy can be introduced with the treatment fluid to initiate a chemical reaction on the material that is limited to a local extent, such as laser assisted chemical treatment (LCP). Another task of the liquid is to guide the laser beam as if it were a fiber. According to the prior art, there are many different devices for material processing with a liquid guided laser beam.

For example, EP 0 762 947 B1 discloses a method of guiding a focused laser beam with a liquid jet. In this case, the liquid is used as a guide A medium for a laser beam, wherein the laser beam contains high energy sufficient to process the workpiece.

According to the theory of the invention, the liquid jet must be layered to achieve good processing results. Otherwise, the laser beam may leave radially due to interference on the casing, that is, local and temporary no total reflection on the casing. In order to obtain a layered liquid jet, the pressure and flow rate of the liquid jet are adjusted to a high level. However, due to the high speed relationship, the liquid jet will have normal inhalation interference factors, such as water droplets or particles formed at the time of injection. This in turn has a negative impact on the uniformity of the outer casing.

DE 10 2006 003 606 and the same registrant, DE 10 2006 003 607, disclose a device and method suitable for chemical treatment, which utilizes a layered flowing liquid jet to direct a laser beam. The laser is fed through a window to feed the liquid. The liquid contains a treatment medium such as a corrosive liquid or a dopant dissolved in the liquid. Due to the total reflection, the laser beam does not leave the liquid and heats the active site, i.e., heats the surface of the substrate, thereby enabling or accelerating the desired chemical reaction.

The disadvantage of this solution is that the liquid jet is "free", that is to say laterally close to the ambient air. The small water droplets formed when the liquid is ejected from the nozzle may adversely affect the shape of the jet when it is recombined with the jet. Variations in the concentration of particulate or corrosive media can cause non-uniformities within the jet and can also adversely affect the shape of the jet. This may cause the laser light to exit from the liquid jet too early, thus causing energy loss, so there is not enough energy in the active position for a short time. For processing purposes.

In order to improve the jet quality of the laser-directed liquid jet, the European patent EP 1 657 020 proposes to additionally use an "impingement gas" which acts to surround the liquid stream to avoid environmental influences. This gas is accompanied by a fluid jet on a section of the section whose length is determined by the gas pressure. An advantageous way is to use a shielding gas, such as nitrogen, as the impinging gas.

However, experiments have shown that the addition of a gas shield to the fluid jet can only provide little help in solving the problems described above. The pressure of the supply gas should not be too high, otherwise the air flow will interfere with the fluid jet. However, the smaller pressure will shorten the effective distance of the gas hood, and its range will be limited in both directions. Other disturbances may also occur in the gas feed zone, as the liquid jet may have formed small water droplets when ejected from the nozzle, and these droplets will collect into larger water droplets in the gas feed zone. When these water droplets enter the outlet of the gas feed zone, one possible consequence is that the jets all fail. Another disadvantage is that the use of a shielding gas as a gas shield increases the cost.

EP 1 940 579 B1 addresses another problem in the use of liquid guided laser beams. In order to increase the processing energy at the active position, this patent proposes not to direct the laser beam to the active position by total reflection, but to additionally focus the laser beam through an optical device to focus its focal plane with the liquid surrounding it. The nozzle openings of the jet are separated by a great distance. Special attention is also placed on the precise location where the focal plane of the laser beam feeding the liquid should be located. According to this patent, there must be a laminar flow at this location. But the focal plane is not located The plane in which the action position lies, that is to say not on the working surface, is again guided by the liquid jet via total reflection in the subsequent process. This patent also produces a gas shield that encircles the liquid jet and the surface of the gas should remain smooth. This patent also does not provide any solution to the problems mentioned earlier in this article.

The task and solution of the present invention

It is therefore an object of the invention to avoid the problems encountered in the prior art.

In particular, the present invention is to ensure that the liquid jet containing the laser beam is insensitive to external disturbances, such as insensitivity to water droplet formation when the liquid exits the nozzle, or to particles in the ambient air entering the outer surface of the liquid jet. The high cost of using shielding gas should be avoided. The flow velocity of the fluid jet should be as independent as possible of its jet quality.

Furthermore, the size of the active position on the surface of the workpiece should be as close as possible to the size of the liquid jet, in particular the cross-sectional dimension.

The above task can be achieved by using the main patent application of the present invention and the device of claim 7 of the patent application. The contents of the attached patent application and the following description and drawings are various advantageous embodiments of the invention.

The method of the present invention will be described first below. Next, the apparatus of the present invention will be described in detail with reference to FIG.

The method of the present invention performs a laser and liquid based heat treatment of the workpiece by a tool head, wherein the tool head is disposed at a processing distance from the surface of the workpiece. The method of the present invention includes the following Steps:--Input liquid through a liquid delivery zone arranged in the wet zone; --- Passing the liquid out through a nozzle that is also placed in the wet zone, producing a jet of liquid that is directed toward the surface of the workpiece; --- from the dry The area injects at least one focused laser beam into the nozzle in the direction of the surface of the workpiece; -- adjusting the machining distance between the tool head and the surface of the workpiece.

Preferably, the laser beam is incident through a transparent separation layer separating the dry zone from the wet zone. The axis of the laser beam is parallel to the axis of the fluid jet and the longitudinal axis of the nozzle and is preferably collinear with the axis of the fluid jet and the longitudinal axis of the nozzle.

The present invention ensures that the first paragraph in the entire length of the liquid jet is surrounded by the nozzle. The invention can also adjust the machining distance so as to form a machining gap between the nozzle end face and the workpiece surface, the machining gap being filled by at least one liquid film in the range of at least one laser beam, so that other passages of the liquid jet are used by the liquid The membrane surrounds and is protected by it, wherein the processing distance (3) can be adjusted via the pressure of the liquid (F). According to another embodiment, the machining gap is completely filled with the liquid film. In other words, there is no free jet of liquid between the nozzle end face and the working surface, but the liquid jet is entirely guided by the nozzle to the active position and surrounded by the nozzle. And protect it. The result is that the nozzle effectively isolates the outer surface of the liquid jet from environmental influences. A machining gap is formed between the nozzle end face and the workpiece surface that is filled with a liquid film in the range of the laser beam. Therefore, processing at this location is not affected by the environment. It is to be noted here that the length of the liquid film of the present invention in the jet direction It is usually significantly smaller than the length in the direction perpendicular to the jet. Conversely, the length of a "free jet" in the prior art in the direction of the jet is significantly greater than or equal to the length in the direction perpendicular to the jet. Furthermore, the "free jet" has a more or less precisely defined outer surface, but the liquid film has no outer surface that can be clearly defined.

Another possible way of describing this is to use the term "liquid column", where the so-called liquid includes the beam located in the nozzle and the end section of the beam on the end face of the nozzle, and is entirely subjected to the nozzle and / at all times. Or the protection of the liquid film from environmental influences. The laser beam is directed through the column of liquid.

A typical situation is that the tool head moves parallel to the tool surface, so it is necessary at all times to ensure sufficient lateral distance between the laser beam and the sides of the liquid film at the end section of the protective liquid jet. The so-called sufficient distance means that the laser beam is 1 to 2 mm apart. As far as the outer edge of the plane defined by the liquid film is not located on a circular orbit, and/or the laser beam does not exactly pass through the center point of this plane, it does not matter.

Further information can be found from the description and drawings of the device of the present invention.

The invention further relates to a method of protecting a liquid jet from environmental influences when performing laser and liquid based processing on a workpiece surface of a workpiece using at least one focused laser beam. The laser beam is directed through a liquid jet in the direction of the working surface by a nozzle of the tool head as previously described. Here you must distinguish between "boot" and "steering". By "guided" is meant that the laser beam utilizes the wall of the liquid jet, that is to say the laser beam is reflected by the total reflection on the wall of the liquid jet. Conversely, "guidance" refers to the passage of a laser beam through a liquid film of a liquid jet without binding to the wall of the liquid jet. Therefore, unlike the prior art, the quality of the wall is not important to the processing result as long as the laser beam is surrounded by the liquid at all times. Therefore, the protection of the tool head range is the responsibility of the wall surface of the nozzle, while the protection of the tool head is responsible for the liquid film surrounding the liquid jet.

The first protection is therefore the responsibility of the nozzle, which should be long enough to be as close as possible to the surface of the workpiece. This will not form a "free jet" as known in the prior art. The outer surface of the liquid jet protected by the nozzle wall is completely unaffected by the sprayer.

In addition, the protection outside the nozzle, that is to say the protection of the end face of the nozzle, is the responsibility of the liquid jet. In order to avoid the problem of free jets, the effluent liquid forms a liquid film in the machining gap which surrounds the entire laser beam in the range of the action position (i.e. on the surface of the workpiece). The use of a gas to protect the outer surface of the liquid jet is superfluous because the precise geometry of the outer surface of the liquid film is not critical. The protection of the nozzle side is entirely responsible for the liquid flowing through the nozzle and is preferably responsible for the treatment liquid itself.

Summarizing the above description, the method of the present invention has the following steps: - introducing a liquid into the nozzle, - forming a first jet of liquid jet in the nozzle, - forming a liquid film between the end face of the nozzle and the surface of the workpiece, -- the remaining passage of the liquid jet is formed in the machining gap, so this passage is surrounded by the liquid film, -- guiding the focused laser beam through two passages of the liquid jet protected by the nozzle wall and/or the liquid film, reaching The surface of the workpiece.

An advantageous embodiment is to adjust the focal plane of the laser beam so that the laser beam reaches the active position on the surface of the workpiece in a direct path that is not reflected on the fluid jet. This means that the section of the action position is independent of the section of the liquid jet. Another advantage of this is that the quality of the guided laser beam within the fluid jet is no longer affected by the quality of the surface outside the liquid jet, since in this case the laser beam does not interact with the fluid jet. Surface bonding.

An advantageous embodiment is to adjust the focal plane of the laser beam so that it lies on the surface of the workpiece. This means that the maximum laser energy available is concentrated on the surface of the workpiece. This is done to ensure that the laser as a source of energy can be fully utilized as much as possible at the point of action.

This also means that the size of the active position on the surface of the workpiece can be adjusted using only the focus of the laser beam. As already mentioned, this is possible because the sections of the laser beam and the liquid jet of the present invention are independent of each other, and the section of the laser beam is not larger than (not wider than) the section of the liquid jet. In the case where the cross section of the nozzle is not circular, in particular in the case where the cross section of the nozzle is a slit shape, the "scanning" of the laser beam can be additionally or completely achieved in cooperation with the size of the action position. For this purpose it is preferred to use a Galvo head.

It is best to adjust the laser energy by changing the pulse length of the laser beam, especially to adjust the energy released by the laser at the active position. This adjustment Very easy to implement. It can also be adjusted additionally or completely by changing the focal plane, weakening the optical path, or coordinating with the electrical power absorbed by the laser generated by the laser beam.

The following dimensional design is particularly advantageous for carrying out the method of the invention: the width of the machining gap is between 0.01 and 5 mm, preferably between 0.1 and 0.5 mm, preferably between 0.2 mm; or the width of the machining gap is equal to the outlet at the nozzle. The minimum mouth section size measured is between 5% and 500%, preferably between 20% and 100%, and most preferably 50%. In the case of a circular nozzle, it means the diameter, and in the case of a slit nozzle, it means the shorter one of the two sides of the rectangle constituting the section. Of course, in addition to the above numerical values, the present invention can also be implemented with other numerical values. It is only important that during operation it is possible to form the aforementioned machining gap which is at least filled by the liquid portion.

In an advantageous manner, the liquid flows from the liquid delivery zone into the nozzle at equal pressures. This makes it possible to achieve a uniform and laminar liquid jet.

As stated previously, maintaining the correct processing distance is critical to the invention. In principle, a method of actively adjusting the distance, that is to say a measuring method, can be used. However, it is preferred to use a passive method, such as automatically re-adjusting the machining distance when machining an uneven surface. The present invention adjusts the machining distance via the pressure of the liquid. This means that when the pressure is increased, the machining distance becomes large, and when the pressure is lowered, the machining distance becomes small. If the machining distance changes, the back pressure at which the tool head attempts to repel from the surface of the workpiece will also change. For example, if the tool head is suspended by a spring, the tool head will Automatically approach and/or stay away from the workpiece surface as much as possible until the back pressure and spring pressure are balanced. By changing the spring force or the outflow pressure, the machining distance can be actively changed.

According to a particularly advantageous embodiment, the tool head moves along the surface of the workpiece during processing. Since this movement belongs to the prior art, there is no need to explain more here.

The method of the invention is particularly suitable for wet chemical processing of workpiece surfaces. In this case, the liquid used is a corrosive liquid. A particular advantage is that the method of the invention can be used to structure a surface containing ruthenium. For example, the method of the present invention can be used for the microstructure of a very thin layer of tantalum nitride, which is an anti-reflective layer for solar cells. The process of the invention is also well suited for processing layers that can be treated with phosphoric acid. The desired substrate can be made of tantalum, glass, metal, ceramic or plastic, and if necessary wet chemically processed layers can be added.

According to another embodiment, the liquid contains at least one dopant and is doped with a surface containing ruthenium by the method of the invention. This makes it possible to locally dope the surface of the substrate in a simple manner. A metal-containing liquid can be used to form a thin metal layer on the surface of the workpiece. For example, this metal layer can be used as a seed layer for subsequent electroplating.

In addition, the present invention also discloses a tool head that functions to perform a laser and liquid based process on a workpiece in accordance with the previously described embodiments. Such a tool head will be described below in conjunction with FIG.

A liquid jet comprising a laser beam that is insensitive to external disturbances, such as water droplets when liquid exits the nozzle, is disclosed Formation is not sensitive. Since the method of the present invention does not require the use of a shielding gas, the high cost caused by the use of the shielding gas can be effectively avoided. The flow velocity of the fluid jet is independent of the jet quality, that is, the flow velocity can be varied over a wide range without affecting the quality of the liquid jet.

Furthermore, the size of the active position on the surface of the workpiece is actually independent of the cross-sectional dimension of the liquid jet.

The tool head of the present invention will be described in detail below with reference to FIG.

The tool head 1 of the present invention is for performing laser and liquid based processing on the workpiece 2.

It is obvious that the workpiece 2 itself is not part of the device of the invention. Usually the workpiece is placed on a conveying plane of the conveying device (not shown). This conveying device does not necessarily have to be part of the invention, but can be provided as a functional device, as appropriate. This conveying device can be used to convey the workpiece 2. Conveyor belts, belts, clamps, or fluid mats based on air or liquid streams can be used as transport tools. The beam axis of the laser beam L and the liquid jet is preferably perpendicular to the working surface 2'. In general, the workpiece 2 is a flat substrate, so the beam axis is also perpendicular to the transport plane.

The tool head 1 is located at a machining distance of 3 from the surface 2' of the workpiece. Further, the tool head 1 is divided into a wet zone 4 located below the drawing surface and a dry zone 5 located above the drawing surface.

Liquid F (indicated by wavy hatching in the figure) can pass through the belt The liquid delivery zone 6 with the liquid chamber 10 enters the wet zone 4. In the figure, both sides of the liquid chamber are open, of course, this is only for the liquid F to flow into the wet zone. Since the configuration of the liquid chamber is not critical, according to an embodiment not depicted in the drawings, the liquid chamber can be placed in close proximity to the end of the nozzle 7, and/or by several smaller chambers or Channel composition. The liquid F then exits the wet zone 4 by means of a nozzle 7 which is also located in the wet zone 4 towards the workpiece surface 2'. In embodiments not depicted in the drawings, the tool head can have more than one nozzle.

At least one focused laser beam L that is incident on the nozzle 7 can be emitted from the dry zone 5. As shown, the laser beam preferably passes through a transparent separation layer 8 separating the dry zone 5 from the wet zone 4 into the nozzle 7. In the particular case not depicted in the drawings, it may not be necessary to have the separation layer 8, and/or the separation layer 8 is composed of air or another (mixed) gas. Another possible way is to place the laser source in the wet zone 4. The dotted line in the figure represents the outline of the laser beam L. The axis of the laser beam is parallel to the axis of the fluid jet and the longitudinal axis of the nozzle and is preferably collinear with the axis of the fluid jet and the longitudinal axis of the nozzle. It is obvious that the profile of the laser beam L should match the section of the nozzle 7. For example, if it is a circular nozzle 7, the outline of the laser beam is circular, and if it is a slit nozzle, the outline of the laser beam is linear or fan-shaped, wherein in order to form the linear laser beam L, it is preferably Use the Galvo head. In the case of a slit nozzle, it is preferred that a plurality of laser beams L (not shown) parallel to each other pass through the nozzle. The transparent material of the separation layer 8 is represented by a dotted shade in the drawing. Obviously, the separation layer 8 does not have to be horizontally penetrated, but as shown in the figure, it can be set in a non-transparent In the box, then put it on the light path. This embodiment is focused through a lens 9. The lens 9 can be a component of the tool head 1, or just a functional component. Obviously, it is also necessary to provide a corresponding jig to hold the lens 9 in place, but the jig is not drawn for the sake of simplicity of the drawing.

As shown, as long as the liquid F flows through the nozzle 7, a jet of liquid surrounding the laser beam L in the nozzle 7 can be formed with the nozzle 7.

According to the invention, the length of the nozzle 7 causes the first passage of the entire length of the liquid jet to be surrounded by the nozzle 7, so that the liquid jet of this passage can flow within the nozzle. Therefore, the laser beam L does not leave the liquid at all times in the nozzle 7 and does not come into contact with the outer surface of the liquid jet. Further, in the present invention, a machining gap 3' is formed in the machining distance 3 between the nozzle end face 7' and the workpiece surface 2', and when the tool head 1 is used, the machining gap 3' is entirely covered by the liquid film F' Filled up so that the remaining passages of the liquid jet are surrounded by the liquid film F' and protected. The machining distance 3 can be adjusted by changing the liquid pulse generated by the liquid F flowing out of the nozzle. The height of the machining gap 3' measured vertically in the figure corresponds to the machining distance 3. As implied by the figure, the range of the liquid film F' generally exceeds the width of the tool head 1, or at least exceeds the width of the nozzle end face 7'. However, the range of the liquid film F' may be smaller than the nozzle end face 7' as long as it is possible to ensure a sufficiently shortest distance between the side walls of the laser beam and the liquid film.

By using a nozzle 7 that surrounds the entire length of the liquid jet, the liquid jet is completely insensitive to external disturbances, while The configuration also solves the problem to be solved by the present invention. Unlike the prior art, according to the present invention, the nozzle end face 7' almost touches the workpiece surface 2', so that no small water droplets are formed at all. The first passage of the liquid jet ends at the outlet of the nozzle 7, i.e., at the nozzle end face 7'. The remaining passages of the liquid jet also do not come into contact with the ambient air, but diffuse from all sides into the machining gap 3', thus forming a liquid film F' that protects itself. In this way, it is also possible to effectively rinse off small bubbles or processing residues (such as residues from corrosion processes). The method of the present invention neither requires nor intends to use a gas jet that surrounds the remaining passages of the liquid jet (i.e., the passages on the side of the nozzle end face 7'). This saves additional construction and media costs. The flow velocity of the liquid jet no longer plays an important role in jet quality. In particular, lower flow velocities are also acceptable, i.e., as low as "free jet" (i.e., at least a portion of the liquid jet flows to the outside), it may become an unstable or susceptible jet. In addition, unnecessary media consumption and/or media throughput can be avoided.

According to another embodiment, not shown, the device of the invention also has a workpiece base. The role of the workpiece base is to accommodate the workpiece 2. The positioning of the workpiece 2 through the workpiece base enables the liquid film to be formed in the machining gap 3' between the workpiece surface 2' and the nozzle end surface 7' in accordance with the present invention. Preferably, the distance between the nozzle end face 7' and the base of the workpiece is adjustable. In the case of a flat, flat workpiece 2, the base distance is equal to the total thickness of the workpiece plus the thickness of the liquid film F' and/or the machining gap 3'.

As can be seen from the drawings, in this advantageous embodiment, the nozzle 7 is sized such that the laser beam L can pass through the nozzle 7 in a direct path, i.e., not reflected on the inner wall of the nozzle 7. The so-called "dimension design" refers to the geometry of the nozzle (that is, the length and cross section of the nozzle), and the geometry of the laser beam L shown by the dashed line in the drawing, so that the laser beam L is on the outer surface of the nozzle & range. "Does not combine with the outer surface of the liquid jet. It is obvious that this can be achieved through nozzle geometry and laser beam geometry. The exact design is determined by the desired parameters, such as flow rate, viscosity, flow, and section at the focal point. This must be decided by the person familiar with the technology, but this does not cause problems.

According to an advantageous embodiment shown by the figures, the nozzle 7 is sized such that the focal plane (i.e. the plane in which the "focus" of the laser beam L is located) is positioned on the workpiece surface 2'. This means that the laser beam L will reach the maximum heat release at the active position. As previously mentioned, the so-called "dimension design" herein refers to the cooperation of the nozzle geometry with the laser beam.

By using the laser beam L at the active position (i.e., the working surface 2') of the focal plane, the size of the working position on the working surface 2' can be adjusted only by focusing the laser beam L. This is a great advantage over prior art devices and methods. According to the prior art, the laser beam is guided through total reflection on the inner surface of the liquid jet because the liquid jet and the width of the laser beam are mutually Related or mutual influence. If a smaller size position is required, a thin liquid jet must be used. However, the flow velocity of a thin liquid jet must be fast to achieve sufficient stability. Sexuality, but this can result in an increase in water droplets formed at the tip of the nozzle (due to contact with air). Since the size of the water droplet does not become proportional to the flow speed, but does not substantially change the size, that is, regardless of the flow, the size of the water droplet and its interference effect on the thinned liquid The jet will become larger, which will result in a deterioration of the jet quality of the liquid jet and the laser beam at the applied position. The device of the present invention can effectively avoid this problem.

According to an advantageous embodiment of the drawing, the nozzle 7 is circular or slit-shaped and/or has a plate-like front surface 7'. The results of the study show that the shape of the nozzle using a very simple and easy to manufacture circular shape (including a cylindrical or tapered wedge shape) has been able to achieve good results, using the tail end near the exit, which is common in the prior art. Increasing the nozzle shape of the opening does not have a better effect (or even worse). The slit nozzle has a long passage and a rectangular section with a short side and a long side. Selecting the nozzle 7 having the plate-like end face 7' helps to form a uniform liquid film F'. The liquid film F' is not only to cover the direct acting position (the focus of the laser beam L), but at least to cover the nozzle 7 and the section of the liquid jet. This ensures that the laser beam is no longer located within the liquid jet (flowing within the nozzle 7), but that the tip end of the machining gap 3' (the remaining section of the liquid jet) is also protected from Affected by the environment.

In the case of a nozzle using a slit shape (not shown), it is preferable that only one laser beam L is fed into the nozzle, but a plurality of laser beams L are fed into the nozzle. For example, these laser beams are in the shape of a fan (like a scorpion The thorns are ejected from a common location, which is located at the beginning of the nozzle 7, or in the range of the lens or a complex optical unit. Another possibility is that the laser beams L pass parallel to each other (similar to the comb of the comb) through the nozzle 7. In this way, a line pattern can be created in one workflow and/or a planar process can be completed. By joining the individual laser beams L to the Galvo head (not shown), it is possible to produce a non-linear line pattern in a simple manner, as well as to perform a planar process with variable width on the work plane 2'.

According to an advantageous embodiment shown in the figures, the wet zone 4 comprises a disk-shaped liquid chamber 10. Preferably, the liquid chamber 10 is fed by a supply tube (not shown) that surrounds it annularly, through which the liquid F can flow in a symmetrical manner from the liquid delivery zone 6 at the same pressure from each other. A nozzle 7 at a central position of the liquid chamber 10. In this way it is possible to achieve a liquid jet that flows uniformly and as much as possible in a laminar flow.

As described above, the machining distance 3 can be adjusted by changing the liquid pulse generated by the liquid (F) flowing out of the nozzle and striking the workpiece 2'. However, it should be noted here that this may lead to a counter-thesis of fluid mechanics called "white effort effect". According to this effect, when it is below a minimum distance, the illuminating object moves toward the nozzle for which the fluid is ejected. This effect can be used to stabilize the machining distance 3. Those skilled in the art can adjust the geometry and pressure relationships without additional assistance, so that the method of the present invention can be implemented in the manner previously described, and thus the various corresponding possibilities need not be described in detail herein.

According to a particularly advantageous embodiment, the tool head 1 has a spring 11 which is symbolically drawn above the separating layer 8 on the right side of the drawing, or an appliance having the same function, the spring 11 or the appliance being fixed in the same A symbolic representation of the support (without symbol). The tool head is resiliently supported on the spring 11. In this way, the adjustability of the machining distance 3 described in the previous paragraph can be achieved very simply.

Furthermore, Figure 1 also shows in a schematic manner a lens 9 which acts to focus the laser beam L. It is clear that the lens 9 requires a corresponding fixture, and that the tool head can have a complex optical unit in addition to a simple lens 9. Another possible way is to make the functional optical element a way that can be attached to the tool head.

1‧‧‧Tool head

2‧‧‧Workpiece

2'‧‧‧Workpiece surface

3‧‧‧Processing distance

3'‧‧‧Machining gap

4‧‧‧ Wet area

5‧‧‧ dry area

6‧‧‧Liquid transport area

7‧‧‧ nozzle

7'‧‧‧Nozzle end face, end face

8‧‧‧Separation layer

9‧‧‧ lens

10‧‧‧Liquid room

11‧‧‧ Spring

F‧‧‧Liquid

F’‧‧‧Liquid film

L‧‧‧Laser beam

Figure 1: shows the main components of the tool head in a schematic manner.

1‧‧‧Tool head

2‧‧‧Workpiece

2'‧‧‧Workpiece surface

3‧‧‧Processing distance

3'‧‧‧Machining gap

4‧‧‧ Wet area

5‧‧‧ dry area

6‧‧‧Liquid transport area

7‧‧‧ nozzle

7'‧‧‧Nozzle end face, end face

8‧‧‧Separation layer

9‧‧‧ lens

10‧‧‧Liquid room

11‧‧‧ Spring

F‧‧‧Liquid

F’‧‧‧Liquid film

L‧‧‧Laser beam

Claims (12)

A method for performing laser and liquid based processing on a workpiece (2) with a tool head (1), wherein the tool head (1) is disposed at a processing distance from the workpiece surface (2') ( The position of 3) includes the following steps:-- inputting liquid (F) through a liquid transporting zone (6) disposed in a wet zone (4); --- passing liquid (F) through is also disposed in the wet zone a nozzle (7) of (4) is output outward to produce a jet of liquid that is directed toward the surface (2') of the workpiece; - from at least one dry zone (5) toward the surface of the workpiece (2') a focused laser beam (L) is injected into the nozzle (7); -- adjusting a machining distance (3) between the tool head (1) and the workpiece surface (2'); wherein the liquid jet A first paragraph of the entire length is surrounded by the nozzle (7) while adjusting the machining distance (3) to form a machining gap between the nozzle end face (7') and the workpiece surface (2') ( 3'), the machining gap (3') is filled by at least one liquid beam (F') in at least one laser beam (L), so that other passages of the liquid jet are surrounded by the liquid film (F') Live and be protected by it Characterized in that: the machining distance can be adjusted (3) via a pressure fluid (F) is. The method of claim 1, wherein the focal plane of the laser beam (L) is adjusted such that the laser beam (L) is not in the fluid The direct path reflected on the jet reaches the active position on the surface (2') of the workpiece. The method of claim 1 or 2, wherein the focal plane of the laser beam (L) is adjusted to be located on the surface (2') of the workpiece. The method of any of the preceding claims, wherein the machining gap (3') is between 0.01 and 5 mm, preferably between 0.1 and 0.5 mm, preferably between 0.2 mm, or the machining gap. It is equal to between 5% and 500% of the minimum nozzle cross-sectional dimension, preferably between 20% and 100%, and most preferably 50%. A method according to any one of the preceding claims, wherein the liquid (F) flows from the liquid delivery zone (6) into the nozzle (7) at the same pressure. The method of any one of claims 1 to 5, wherein the liquid (F) is an etching liquid, and the method is used for structuring a surface containing ruthenium or a liquid (F) At least one dopant is included and this method is used to dope the surface containing ruthenium. A tool head (1) for performing a patent application on a workpiece (2) A method of laser and liquid based treatment of any of items 1 to 6. The tool head (1) of claim 7 has a wet zone (4) and a dry zone (5), wherein the liquid (F) can flow into the wet zone (4) through a liquid transfer zone (6). At the same time, the liquid (F) can also flow out of the wet zone (4) through a nozzle (7) also located in the wet zone (4), wherein at least one injection into the nozzle (7) can be emitted from the dry zone (5). a laser beam (L), whereby a jet of liquid surrounding the laser beam (L) can be formed through the nozzle (7), wherein the length of the nozzle (7) is such that the entire length of the liquid jet A paragraph will be surrounded by the nozzle (7) so that the liquid jet of this section can flow within the nozzle while a machining distance between the nozzle end face (7') and the workpiece surface (2') (3) a machining gap (3') is formed, the machining gap (3') being filled by at least one liquid beam (F') in at least one laser beam (L), so the remaining passage of the liquid jet It is surrounded and protected by the liquid film (F'), and is characterized in that the machining distance (3) can be adjusted by changing the liquid pulse generated by the liquid (F) flowing out of the nozzle. The tool head (1) of claim 7 or 8 further has a workpiece base in which the distance between the nozzle end face (7') and the workpiece base is adjustable. The tool head (1) according to any one of claims 7 to 9, wherein the nozzle (7) has a plate-like end face (7'). The tool head (1) according to any one of claims 7 to 10, wherein the wet zone (4) comprises a disk-shaped liquid chamber (10) and a liquid chamber (10) is surrounded by the liquid chamber (10) An annular supply tube through which the liquid (F) can flow from the liquid delivery zone (6) in a symmetrical manner via the strip supply tube to a position starting from a central position of the liquid chamber (10) ( 7). The tool head (1) according to any one of claims 7 to 11, wherein the tool head (1) is supported in an elastic manner.