JPS63153528U - - Google Patents
Info
- Publication number
- JPS63153528U JPS63153528U JP4556687U JP4556687U JPS63153528U JP S63153528 U JPS63153528 U JP S63153528U JP 4556687 U JP4556687 U JP 4556687U JP 4556687 U JP4556687 U JP 4556687U JP S63153528 U JPS63153528 U JP S63153528U
- Authority
- JP
- Japan
- Prior art keywords
- substrate support
- high frequency
- frequency power
- resistor
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001312 dry etching Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4556687U JPS63153528U (enExample) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4556687U JPS63153528U (enExample) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153528U true JPS63153528U (enExample) | 1988-10-07 |
Family
ID=30864417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4556687U Pending JPS63153528U (enExample) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153528U (enExample) |
-
1987
- 1987-03-30 JP JP4556687U patent/JPS63153528U/ja active Pending