JPS63153528U - - Google Patents

Info

Publication number
JPS63153528U
JPS63153528U JP4556687U JP4556687U JPS63153528U JP S63153528 U JPS63153528 U JP S63153528U JP 4556687 U JP4556687 U JP 4556687U JP 4556687 U JP4556687 U JP 4556687U JP S63153528 U JPS63153528 U JP S63153528U
Authority
JP
Japan
Prior art keywords
substrate support
high frequency
frequency power
resistor
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4556687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4556687U priority Critical patent/JPS63153528U/ja
Publication of JPS63153528U publication Critical patent/JPS63153528U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4556687U 1987-03-30 1987-03-30 Pending JPS63153528U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4556687U JPS63153528U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4556687U JPS63153528U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63153528U true JPS63153528U (enrdf_load_stackoverflow) 1988-10-07

Family

ID=30864417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4556687U Pending JPS63153528U (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63153528U (enrdf_load_stackoverflow)

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