JPS63153519U - - Google Patents

Info

Publication number
JPS63153519U
JPS63153519U JP4598687U JP4598687U JPS63153519U JP S63153519 U JPS63153519 U JP S63153519U JP 4598687 U JP4598687 U JP 4598687U JP 4598687 U JP4598687 U JP 4598687U JP S63153519 U JPS63153519 U JP S63153519U
Authority
JP
Japan
Prior art keywords
workpiece
transfer table
endless belt
workpiece transfer
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4598687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521865Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4598687U priority Critical patent/JPH0521865Y2/ja
Publication of JPS63153519U publication Critical patent/JPS63153519U/ja
Application granted granted Critical
Publication of JPH0521865Y2 publication Critical patent/JPH0521865Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP4598687U 1987-03-28 1987-03-28 Expired - Lifetime JPH0521865Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4598687U JPH0521865Y2 (enrdf_load_stackoverflow) 1987-03-28 1987-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4598687U JPH0521865Y2 (enrdf_load_stackoverflow) 1987-03-28 1987-03-28

Publications (2)

Publication Number Publication Date
JPS63153519U true JPS63153519U (enrdf_load_stackoverflow) 1988-10-07
JPH0521865Y2 JPH0521865Y2 (enrdf_load_stackoverflow) 1993-06-04

Family

ID=30865231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4598687U Expired - Lifetime JPH0521865Y2 (enrdf_load_stackoverflow) 1987-03-28 1987-03-28

Country Status (1)

Country Link
JP (1) JPH0521865Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0521865Y2 (enrdf_load_stackoverflow) 1993-06-04

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