JPS63152035A - Optical disk - Google Patents

Optical disk

Info

Publication number
JPS63152035A
JPS63152035A JP61300445A JP30044586A JPS63152035A JP S63152035 A JPS63152035 A JP S63152035A JP 61300445 A JP61300445 A JP 61300445A JP 30044586 A JP30044586 A JP 30044586A JP S63152035 A JPS63152035 A JP S63152035A
Authority
JP
Japan
Prior art keywords
recording medium
recording
reflectance
guide groove
difference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61300445A
Other languages
Japanese (ja)
Inventor
Iwao Tsugawa
津川 岩雄
Kenichi Uchiumi
研一 内海
Yasuyuki Goto
康之 後藤
Tetsuya Yuasa
哲也 湯浅
Nagaaki Etsuno
越野 長明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61300445A priority Critical patent/JPS63152035A/en
Publication of JPS63152035A publication Critical patent/JPS63152035A/en
Pending legal-status Critical Current

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  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To improve sensitivity and to reduce a noise level by removing a recording medium interposing between the gaps of guiding grooves each other with etching. CONSTITUTION:In an optical disk which executes the recording and deleting of information on the recording medium 3 on the guiding groove 2 provided on a disk substrate 1 by utilizing the difference of reflection factor caused by the difference of the crystallization of the recording medium 3, the recording medium 3 interposing between the mutual gaps of the guiding grooves 2 is removed with etching so as to be used. Namely, the recording medium 3 formed on the disk substrate 1 is selectively etched in order to form the recording medium 3 only on the part of the guiding groove 2. Thus the reduction of the noise and high sensitivity can be realized.

Description

【発明の詳細な説明】 〔概要〕 光ディスクの感度を向上すると共にノイズレベルを低減
する方法として、情報の記録位置である案内溝と案内溝
の間に介在する記録媒体を除去した光ディスク。
DETAILED DESCRIPTION OF THE INVENTION [Summary] As a method for improving the sensitivity of an optical disc and reducing the noise level, an optical disc is provided in which a recording medium interposed between guide grooves, which are information recording positions, is removed.

〔産業上の利用分野〕[Industrial application field]

本発明はノイズレベルを低減した光ディスクに関する。 The present invention relates to an optical disc with reduced noise level.

光ディスクはレーザ光を用いて高密度の情報記録を行う
メモリであり、記録容量が大きく、非接触で記録と再生
とを行うことができ、また塵埃の影響を受けないなど優
れた特徴をもっている。
An optical disk is a memory that records high-density information using laser light, and has excellent features such as a large recording capacity, non-contact recording and playback, and being unaffected by dust.

ここで、光ディスクには記録媒体として低融点の金属或
いは合金を用い、情報の記録を穴の有無により行う読み
出し専用のメモリ(Write 0nce Memor
y)以外に結晶−非晶質あるいは結晶−結晶間の相変化
に伴う反射率の差を利用する書き換え可能なメモリ (
Erasable Memory)も実用化されている
Here, the optical disk uses a low-melting point metal or alloy as a recording medium, and is a read-only memory (Write 0nce Memory) that records information by the presence or absence of holes.
In addition to
Erasable Memory) has also been put into practical use.

本発明は後者特に結晶−結晶間の相変化を利用した光デ
ィスクの改良に関するものである。
The present invention relates to the latter, particularly to improvements in optical discs that utilize crystal-to-crystal phase change.

〔従来の技術〕[Conventional technology]

本発明に係る結晶−結晶間の相変化を利用するメモリは
発明者等が改良を進めているインジウム・アンチモン(
In−Sb)やインジウム・ビスマス(In−Bi)な
どの合金薄膜を記録媒体とするメモリであって、この記
録媒体にレーザビームを照射した場合に照射条件により
結晶構造が異なり反射率に差を生ずるのを利用するもの
である。
The memory that utilizes the phase change between crystals according to the present invention is made of indium antimony (
A memory that uses an alloy thin film such as In-Sb (In-Sb) or indium-bismuth (In-Bi) as a recording medium, and when this recording medium is irradiated with a laser beam, the crystal structure changes depending on the irradiation conditions and there is a difference in reflectance. It is something that takes advantage of what is generated.

以下、In−5b系を例として説明する。The In-5b system will be explained below as an example.

この系の特徴はIn−Sb金属間化合物とsb金金属か
らなる固溶体が熱エネルギーの付与条件によってsb金
属原子の分散状態が異なり、この状態の相違により反射
率が異なることを利用するものである。
The feature of this system is that in a solid solution consisting of an In-Sb intermetallic compound and sb gold metal, the dispersion state of sb metal atoms differs depending on the conditions of application of thermal energy, and this difference in state makes use of the fact that the reflectance differs. .

例えば、Inとsbとの原子量比が40 : 60で膜
厚が1000人の薄膜を記録媒体とする光ディスクにつ
いて半導体レーザ(波長830nm)を用い、出力10
mW。
For example, for an optical disk whose recording medium is a thin film with an atomic weight ratio of In and sb of 40:60 and a film thickness of 1,000 mm, a semiconductor laser (wavelength of 830 nm) is used, and an output of 10:60 is used.
mW.

パルス幅200nsの条件で照射すると記録媒体の反射
率は約30%であったのに対し、被照射部の反射率は約
40%に増加する。
When irradiated with a pulse width of 200 ns, the reflectance of the recording medium was about 30%, but the reflectance of the irradiated area increases to about 40%.

一方、この被照射部に出力5m−、パルス幅800nS
のレーザビームを照射すると、被照射部の反射率は約3
0%の照射前の値に戻る。
On the other hand, this irradiated part has an output of 5 m and a pulse width of 800 nS.
When irradiated with a laser beam of , the reflectance of the irradiated area is approximately 3
Returns to the value before irradiation of 0%.

然し、出力2mWのレーザビームを照射したのでは被照
射部の反射率は変化しない。
However, when a laser beam with an output of 2 mW is irradiated, the reflectance of the irradiated area does not change.

すなわち、In−Sb合金薄膜からなる記録媒体には結
晶状態の変化を生ずるエネルギーレベルが存在し、この
上と下とでは反射率が異なり、またエネルギーの付与条
件により相互に変えることができる。
That is, a recording medium made of an In--Sb alloy thin film has an energy level that causes a change in crystalline state, and the reflectance above and below this level is different, and can be changed depending on the energy application conditions.

ここで、反射率が相違する理由はIn−Sb化合物(I
ns。SbS。)とsbとの固溶状態の相違に起因して
いる。
Here, the reason for the difference in reflectance is the In-Sb compound (I
ns. SbS. ) and sb in the solid solution state.

すなわち、X線回折によると低反射率部(30%部)で
はIns。sb、。の回折線が強く現れ、sbの回折線
は弱い。
That is, according to X-ray diffraction, Ins in the low reflectance part (30% part). sb,. The diffraction line of sb appears strongly, and the diffraction line of sb is weak.

一方、高反射率部(40%部)ではsbの回折線のほう
がIns。sbs。よりも強く現れている。
On the other hand, in the high reflectance part (40% part), the sb diffraction line is Ins. sbs. It appears stronger than.

ここで、純粋なsb薄膜の反射率は約70%であること
から高反射率部ではsbの析出量が多いことがわかる。
Here, since the reflectance of a pure sb thin film is about 70%, it can be seen that the amount of sb precipitated is large in the high reflectance portion.

このような現象を利用し、高反射率部が形成できるレー
ザビームの照射条件を記録条件とし、照射によっても反
射率が変わらない照射条件を再生条件とし、低反射率化
し得る条件を消去条件として光ディスクが開発されてい
る。
Utilizing this phenomenon, the recording conditions are the laser beam irradiation conditions that can form a high reflectance area, the reproduction conditions are the irradiation conditions where the reflectance does not change even with irradiation, and the erasing conditions are the conditions that can reduce the reflectance. Optical discs have been developed.

ここで、光ディスクの構成としては透明なプラスチック
或いはガラスからなる光デイスク基板上に約1.6μm
のピンチで同心円状あるいはスパイラル状に案内溝(プ
リグループ)が設けられていて、かかる光デイスク基板
上にIn−Sb記録媒体が膜形成されており、この案内
溝に沿って約1μm径のレーザビームを照射することに
より情報の記録・再生・消去が行われている。
Here, the structure of the optical disc is about 1.6 μm thick on an optical disc substrate made of transparent plastic or glass.
A guide groove (pre-group) is provided concentrically or spirally in a pinch, and an In-Sb recording medium is formed as a film on the optical disk substrate, and a laser beam with a diameter of approximately 1 μm is formed along this guide groove. Information is recorded, reproduced, and erased by beam irradiation.

ここで、書き換え可能メモリの必要条件は、■ なるべ
く少ないレーザパワーと時間で記録と消去が行えること
、すなわち記録媒体の感度が良いこと。
Here, the necessary conditions for a rewritable memory are: (1) Recording and erasing can be performed with as little laser power and time as possible, that is, the recording medium must have good sensitivity.

■ 経時変化の少ないこと、すなわち記録と消去を繰り
返した場合にノイズの増加が少ないこと。
■ Little change over time, that is, little increase in noise when recording and erasing is repeated.

などが挙げられる。Examples include.

然し、従来の光ディスクは約1000回の繰り返しによ
ってノイズは5dB程度にまで増加しており、この改良
が必要であった。
However, with conventional optical discs, the noise increases to about 5 dB after about 1000 repetitions, and an improvement is needed.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

以上記したように結晶−結晶間の相変化を利用する書き
換え可能な光ディスクにおいて、高信頼性を維持するた
めには記録媒体の感度が良く、また記録と消去を繰り返
す場合にノイズの増加が少ないことが必要であり、これ
を実現することが課題である。
As mentioned above, in order to maintain high reliability in rewritable optical discs that utilize phase changes between crystals, the recording medium must have good sensitivity, and when recording and erasing is repeated, noise increases little. This is necessary, and the challenge is to realize this.

〔問題点を解決するための手段〕[Means for solving problems]

上記の問題は記録媒体の結晶化の相違による反射率の差
を利用し、基板に設けられている案内溝上の記録媒体に
情報の記録と消去とを行う光ディスクにおいて、該案内
溝の相互の間隙に介在する記録媒体をエツチングにより
除去して使用する光ディスクにより達成することができ
る。
The above problem occurs in optical discs that record and erase information on a recording medium on guide grooves provided on a substrate by utilizing the difference in reflectance due to the difference in crystallization of the recording medium. This can be achieved by using an optical disc in which the intervening recording medium is removed by etching.

〔作用〕 本発明は記録と消去を繰り返す場合にノイズが増加する
原因を探究した結果としてなされたものである。
[Operation] The present invention was developed as a result of research into the cause of noise increase when recording and erasing are repeated.

すなわち、情報の記録と消去はビーム径が約1μmのレ
ーザビームを幅が約0.7μmの案内溝に沿って走査し
、情報に応じてON、OFFを繰り返すことにより行わ
れているが、このビーム径は強度分布の半値幅をとって
いるので、分布の裾は案内溝を外れた部分にまで及んで
いる。
In other words, information is recorded and erased by scanning a laser beam with a beam diameter of about 1 μm along a guide groove with a width of about 0.7 μm, and repeatedly turning it on and off depending on the information. Since the beam diameter takes the half width of the intensity distribution, the tail of the distribution extends to the part outside the guide groove.

そのため、情報の記録と消去は案内溝部分の記録媒体を
中心として行われているが、案内溝以外の部分すなわち
案内溝と案内溝との間の領域もレーザビームの照射の影
響を受け、徐々に結晶化が進行している。
Therefore, information is recorded and erased mainly on the recording medium in the guide groove portion, but the area other than the guide groove, that is, the area between the guide grooves, is also affected by the laser beam irradiation and gradually Crystallization is progressing.

発明者等はこの周辺領域の結晶化がC/N(Carri
er−1evel/No1se−1evel)の低下と
密接な関係があることを見出した。
The inventors believe that the crystallization in this peripheral region is C/N (Carri
It was found that there is a close relationship with a decrease in er-1evel/No1se-1evel).

すなわち、再生に当たって案内溝の周辺部からの反射の
増加によりノイズが増加してくる。
That is, during reproduction, noise increases due to an increase in reflection from the peripheral portion of the guide groove.

また、情報の記録と消去はレーザビームの照射により照
射位置の記録媒体が局部的に加熱されることにより行わ
れているが、この際になるべく少ないレーザパワーで行
うことが必要であり、そのためにも記録媒体の形成位置
を案内溝に限定し、熱の発散を抑制することが必要であ
る。
Furthermore, recording and erasing of information is performed by locally heating the recording medium at the irradiation position by irradiating the laser beam, but it is necessary to perform this with as little laser power as possible. It is also necessary to limit the formation position of the recording medium to the guide groove to suppress heat dissipation.

本発明はこのことからディスク基板上に形成されている
記録媒体を選択的にエツチングして案内溝部分のみに記
録媒体を形成するものである。
In view of this, the present invention selectively etches the recording medium formed on the disk substrate to form the recording medium only in the guide groove portion.

第1図は本発明の原理図であって、ディスク基板1の案
内溝2の部分にのみ記録媒体3を形成することによりノ
イズ低減と高感度化を実現するものである。
FIG. 1 is a diagram showing the principle of the present invention, which realizes noise reduction and high sensitivity by forming a recording medium 3 only in the guide groove 2 of a disk substrate 1.

〔実施例〕〔Example〕

第3図(A)、  (B)は本発明の実施例を示すもの
で、ガラス基板上にスピンコード法によりアクリル酸エ
ステルを20μmの膜厚に形成した後、写真蝕刻(フォ
トリソグラフィ)により案内溝2のあるディスク基板1
を形成した。
FIGS. 3(A) and 3(B) show an example of the present invention, in which an acrylic ester is formed on a glass substrate to a thickness of 20 μm by spin coding, and then guided by photolithography. Disc substrate 1 with groove 2
was formed.

この上に共蒸着法により硫化亜鉛(ZnS)を10nm
の厚さに蒸着して下地層4を形成した。
On top of this, 10 nm of zinc sulfide (ZnS) was deposited by co-evaporation method.
The base layer 4 was formed by vapor deposition to a thickness of .

このZnSは干渉膜として働くもので、屈折率は2.4
と高く、コントラストを向上させる。
This ZnS acts as an interference film and has a refractive index of 2.4.
and higher, improving contrast.

次に、この上に共蒸着法によりIn、□5bsaを85
nmの厚さに蒸着して記録層5を形成した後、出力51
のレーザビーム6を案内溝4に沿って走査し、案内溝4
の部分の記録層5を結晶化させた。以上同図(A) 次に、アルゴン(Ar)ガス雰囲気でプラズマエツチン
グを行うと記録層5のうち、案内溝2の部分の結晶化記
録層7に較べ、非晶質状態の記録層は脆弱のためエツチ
ング速度が速く、そのため同図(B)に示すように案内
溝2の部分にのみ結晶化記録層7のある光ディスクが形
成される。
Next, 85% of In, □5bsa was applied on this by co-evaporation method.
After forming the recording layer 5 by vapor deposition to a thickness of nm, the output 51
The laser beam 6 of the guide groove 4 is scanned along the guide groove 4.
The portion of the recording layer 5 was crystallized. (A) Next, when plasma etching is performed in an argon (Ar) gas atmosphere, the recording layer 5 in an amorphous state is more fragile than the crystallized recording layer 7 in the guide groove 2 portion. Therefore, the etching speed is high, and therefore, an optical disk is formed with the crystallized recording layer 7 only in the guide groove 2, as shown in FIG. 2(B).

かかる光ディスクについて、従来の記録条件は10mW
 X 400ns、また消去条件は5 mW X 80
0ns程度であったが、このように作った光ディスクで
は10mWX 200nsで記録でき、また5m囚X 
400nsの条件で消去を行うことができた。
The conventional recording condition for such optical discs is 10 mW.
x 400ns, and the erase condition is 5 mW x 80
However, the optical disc made in this way can record at 10 mW x 200 ns, and can record at 5 m W x 200 ns.
Erasing could be performed under the condition of 400 ns.

第2図はこの条件で記録と消去を繰り返した場合のC/
Nの変化を示す実験結果であり、従来は約104回の繰
り返しで約5dBの低下が見られたが、実施例の場合は
105回までノイズの増加は認められなかった。
Figure 2 shows the C/C ratio when recording and erasing are repeated under these conditions.
These are experimental results showing changes in N. Conventionally, a decrease of about 5 dB was observed after about 104 repetitions, but in the case of the example, no increase in noise was observed until 105 repetitions.

〔発明の効果〕〔Effect of the invention〕

以上記したように本発明の実施により光ディスクの感度
と書き換え特性が向上し、品質を向上することができた
As described above, by implementing the present invention, the sensitivity and rewriting characteristics of the optical disc were improved, and the quality was improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の原理図、 第2図は書き換え回数とC/Nとの関係図、第3図(A
)、  (B)は本発明を実施する工程の断面図、 である。 図において、 1はディスク基板、   2は案内溝、3は記録媒体、
      5は記録層、6はレーザビーム、   7
は結晶化記録層、である。
Figure 1 is a diagram of the principle of the present invention, Figure 2 is a diagram of the relationship between the number of rewrites and C/N, and Figure 3 (A
), (B) are cross-sectional views of steps for carrying out the present invention. In the figure, 1 is a disk substrate, 2 is a guide groove, 3 is a recording medium,
5 is a recording layer, 6 is a laser beam, 7
is a crystallized recording layer.

Claims (1)

【特許請求の範囲】[Claims] 記録媒体の結晶化の相違による反射率の差を利用し、デ
ィスク基板に設けられている案内溝上の記録媒体に情報
の記録と消去とを行う光ディスクにおいて、該案内溝の
相互の間隙に介在する記録媒体をエッチングにより除去
し、使用することを特徴とする光ディスク。
In an optical disk that records and erases information on a recording medium on guide grooves provided on a disk substrate by utilizing the difference in reflectance due to the difference in crystallization of the recording medium, an optical disc that is located between the guide grooves. An optical disc characterized in that the recording medium is removed by etching.
JP61300445A 1986-12-16 1986-12-16 Optical disk Pending JPS63152035A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61300445A JPS63152035A (en) 1986-12-16 1986-12-16 Optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61300445A JPS63152035A (en) 1986-12-16 1986-12-16 Optical disk

Publications (1)

Publication Number Publication Date
JPS63152035A true JPS63152035A (en) 1988-06-24

Family

ID=17884886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61300445A Pending JPS63152035A (en) 1986-12-16 1986-12-16 Optical disk

Country Status (1)

Country Link
JP (1) JPS63152035A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01224948A (en) * 1988-03-04 1989-09-07 Fuji Xerox Co Ltd Manufacture of optical recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01224948A (en) * 1988-03-04 1989-09-07 Fuji Xerox Co Ltd Manufacture of optical recording medium

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