JPS63150306U - - Google Patents
Info
- Publication number
- JPS63150306U JPS63150306U JP4295687U JP4295687U JPS63150306U JP S63150306 U JPS63150306 U JP S63150306U JP 4295687 U JP4295687 U JP 4295687U JP 4295687 U JP4295687 U JP 4295687U JP S63150306 U JPS63150306 U JP S63150306U
- Authority
- JP
- Japan
- Prior art keywords
- sensor element
- wear sensor
- thin film
- substrate
- ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4295687U JPS63150306U (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4295687U JPS63150306U (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63150306U true JPS63150306U (enrdf_load_stackoverflow) | 1988-10-04 |
Family
ID=30859364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4295687U Pending JPS63150306U (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63150306U (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56163404A (en) * | 1980-05-22 | 1981-12-16 | Mitsubishi Electric Corp | Abrasion detector for plain bearing |
JPS6183674A (ja) * | 1984-10-01 | 1986-04-28 | 株式会社日立製作所 | セラミツク配線基板及びその製造方法 |
-
1987
- 1987-03-24 JP JP4295687U patent/JPS63150306U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56163404A (en) * | 1980-05-22 | 1981-12-16 | Mitsubishi Electric Corp | Abrasion detector for plain bearing |
JPS6183674A (ja) * | 1984-10-01 | 1986-04-28 | 株式会社日立製作所 | セラミツク配線基板及びその製造方法 |
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