JPS63149973U - - Google Patents
Info
- Publication number
- JPS63149973U JPS63149973U JP1987041561U JP4156187U JPS63149973U JP S63149973 U JPS63149973 U JP S63149973U JP 1987041561 U JP1987041561 U JP 1987041561U JP 4156187 U JP4156187 U JP 4156187U JP S63149973 U JPS63149973 U JP S63149973U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- compound semiconductor
- area
- growth
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987041561U JPS63149973U (enExample) | 1987-03-19 | 1987-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987041561U JPS63149973U (enExample) | 1987-03-19 | 1987-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149973U true JPS63149973U (enExample) | 1988-10-03 |
Family
ID=30856676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987041561U Pending JPS63149973U (enExample) | 1987-03-19 | 1987-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149973U (enExample) |
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1987
- 1987-03-19 JP JP1987041561U patent/JPS63149973U/ja active Pending