JPS63149966U - - Google Patents

Info

Publication number
JPS63149966U
JPS63149966U JP4089687U JP4089687U JPS63149966U JP S63149966 U JPS63149966 U JP S63149966U JP 4089687 U JP4089687 U JP 4089687U JP 4089687 U JP4089687 U JP 4089687U JP S63149966 U JPS63149966 U JP S63149966U
Authority
JP
Japan
Prior art keywords
substrate
surface treatment
rectifier plate
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4089687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354139Y2 (enFirst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4089687U priority Critical patent/JPH0354139Y2/ja
Publication of JPS63149966U publication Critical patent/JPS63149966U/ja
Application granted granted Critical
Publication of JPH0354139Y2 publication Critical patent/JPH0354139Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP4089687U 1987-03-23 1987-03-23 Expired JPH0354139Y2 (enFirst)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089687U JPH0354139Y2 (enFirst) 1987-03-23 1987-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089687U JPH0354139Y2 (enFirst) 1987-03-23 1987-03-23

Publications (2)

Publication Number Publication Date
JPS63149966U true JPS63149966U (enFirst) 1988-10-03
JPH0354139Y2 JPH0354139Y2 (enFirst) 1991-11-28

Family

ID=30855396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089687U Expired JPH0354139Y2 (enFirst) 1987-03-23 1987-03-23

Country Status (1)

Country Link
JP (1) JPH0354139Y2 (enFirst)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017133078A (ja) * 2016-01-29 2017-08-03 株式会社ケミトロン エッチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017133078A (ja) * 2016-01-29 2017-08-03 株式会社ケミトロン エッチング装置

Also Published As

Publication number Publication date
JPH0354139Y2 (enFirst) 1991-11-28

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