JPS63149965U - - Google Patents
Info
- Publication number
- JPS63149965U JPS63149965U JP4020387U JP4020387U JPS63149965U JP S63149965 U JPS63149965 U JP S63149965U JP 4020387 U JP4020387 U JP 4020387U JP 4020387 U JP4020387 U JP 4020387U JP S63149965 U JPS63149965 U JP S63149965U
- Authority
- JP
- Japan
- Prior art keywords
- cvd apparatus
- cleaning
- entrance window
- photo
- cleaning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims 3
- 239000012495 reaction gas Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4020387U JPS63149965U (enExample) | 1987-03-19 | 1987-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4020387U JPS63149965U (enExample) | 1987-03-19 | 1987-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149965U true JPS63149965U (enExample) | 1988-10-03 |
Family
ID=30854081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4020387U Pending JPS63149965U (enExample) | 1987-03-19 | 1987-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149965U (enExample) |
-
1987
- 1987-03-19 JP JP4020387U patent/JPS63149965U/ja active Pending
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