JPS63149522U - - Google Patents
Info
- Publication number
- JPS63149522U JPS63149522U JP4138887U JP4138887U JPS63149522U JP S63149522 U JPS63149522 U JP S63149522U JP 4138887 U JP4138887 U JP 4138887U JP 4138887 U JP4138887 U JP 4138887U JP S63149522 U JPS63149522 U JP S63149522U
- Authority
- JP
- Japan
- Prior art keywords
- recess
- pressure oil
- vapor pressure
- reaction chamber
- low vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4138887U JPH0610673Y2 (ja) | 1987-03-20 | 1987-03-20 | 光ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4138887U JPH0610673Y2 (ja) | 1987-03-20 | 1987-03-20 | 光ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63149522U true JPS63149522U (enExample) | 1988-10-03 |
| JPH0610673Y2 JPH0610673Y2 (ja) | 1994-03-16 |
Family
ID=30856344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4138887U Expired - Lifetime JPH0610673Y2 (ja) | 1987-03-20 | 1987-03-20 | 光ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610673Y2 (enExample) |
-
1987
- 1987-03-20 JP JP4138887U patent/JPH0610673Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610673Y2 (ja) | 1994-03-16 |
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