JPS63149524U - - Google Patents
Info
- Publication number
- JPS63149524U JPS63149524U JP4102287U JP4102287U JPS63149524U JP S63149524 U JPS63149524 U JP S63149524U JP 4102287 U JP4102287 U JP 4102287U JP 4102287 U JP4102287 U JP 4102287U JP S63149524 U JPS63149524 U JP S63149524U
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- heating means
- infrared heating
- semiconductor substrate
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000006096 absorbing agent Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4102287U JPS63149524U (fi) | 1987-03-20 | 1987-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4102287U JPS63149524U (fi) | 1987-03-20 | 1987-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149524U true JPS63149524U (fi) | 1988-10-03 |
Family
ID=30855637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4102287U Pending JPS63149524U (fi) | 1987-03-20 | 1987-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149524U (fi) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09237764A (ja) * | 1996-02-28 | 1997-09-09 | Shin Etsu Handotai Co Ltd | 輻射加熱装置および加熱方法 |
| JP2006100549A (ja) * | 2004-09-29 | 2006-04-13 | Fujitsu Ltd | 急速熱処理装置 |
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1987
- 1987-03-20 JP JP4102287U patent/JPS63149524U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09237764A (ja) * | 1996-02-28 | 1997-09-09 | Shin Etsu Handotai Co Ltd | 輻射加熱装置および加熱方法 |
| JP2006100549A (ja) * | 2004-09-29 | 2006-04-13 | Fujitsu Ltd | 急速熱処理装置 |