JPS63149396U - - Google Patents
Info
- Publication number
- JPS63149396U JPS63149396U JP4305487U JP4305487U JPS63149396U JP S63149396 U JPS63149396 U JP S63149396U JP 4305487 U JP4305487 U JP 4305487U JP 4305487 U JP4305487 U JP 4305487U JP S63149396 U JPS63149396 U JP S63149396U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- data
- ship
- control
- creates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 9
- 238000012806 monitoring device Methods 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000007405 data analysis Methods 0.000 claims description 2
- 208000003028 Stuttering Diseases 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Feedback Control In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4305487U JPS63149396U (ko) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4305487U JPS63149396U (ko) | 1987-03-24 | 1987-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63149396U true JPS63149396U (ko) | 1988-09-30 |
Family
ID=30859554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4305487U Pending JPS63149396U (ko) | 1987-03-24 | 1987-03-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63149396U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
-
1987
- 1987-03-24 JP JP4305487U patent/JPS63149396U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
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