JPS63147999U - - Google Patents

Info

Publication number
JPS63147999U
JPS63147999U JP3926087U JP3926087U JPS63147999U JP S63147999 U JPS63147999 U JP S63147999U JP 3926087 U JP3926087 U JP 3926087U JP 3926087 U JP3926087 U JP 3926087U JP S63147999 U JPS63147999 U JP S63147999U
Authority
JP
Japan
Prior art keywords
tank
low
temperature liquid
cooling
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3926087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3926087U priority Critical patent/JPS63147999U/ja
Publication of JPS63147999U publication Critical patent/JPS63147999U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP3926087U 1987-03-19 1987-03-19 Pending JPS63147999U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3926087U JPS63147999U (ko) 1987-03-19 1987-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3926087U JPS63147999U (ko) 1987-03-19 1987-03-19

Publications (1)

Publication Number Publication Date
JPS63147999U true JPS63147999U (ko) 1988-09-29

Family

ID=30852268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3926087U Pending JPS63147999U (ko) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPS63147999U (ko)

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