JPS63147811U - - Google Patents
Info
- Publication number
- JPS63147811U JPS63147811U JP3849287U JP3849287U JPS63147811U JP S63147811 U JPS63147811 U JP S63147811U JP 3849287 U JP3849287 U JP 3849287U JP 3849287 U JP3849287 U JP 3849287U JP S63147811 U JPS63147811 U JP S63147811U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafers
- semiconductor manufacturing
- transfer mechanism
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038492U JPH0534108Y2 (US07923587-20110412-C00022.png) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987038492U JPH0534108Y2 (US07923587-20110412-C00022.png) | 1987-03-18 | 1987-03-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63147811U true JPS63147811U (US07923587-20110412-C00022.png) | 1988-09-29 |
| JPH0534108Y2 JPH0534108Y2 (US07923587-20110412-C00022.png) | 1993-08-30 |
Family
ID=30850792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987038492U Expired - Lifetime JPH0534108Y2 (US07923587-20110412-C00022.png) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534108Y2 (US07923587-20110412-C00022.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06196542A (ja) * | 1992-12-24 | 1994-07-15 | Nissin Electric Co Ltd | エアーロック室およびそのクリーニング方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5972739A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | 真空処理装置 |
| JPS59117108A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | 気相成長装置 |
| JPS6173334A (ja) * | 1984-09-19 | 1986-04-15 | Hitachi Ltd | 処理装置 |
| JPS61111524A (ja) * | 1984-11-06 | 1986-05-29 | Denkoo:Kk | 縦形半導体熱処理炉 |
-
1987
- 1987-03-18 JP JP1987038492U patent/JPH0534108Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5972739A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | 真空処理装置 |
| JPS59117108A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Ltd | 気相成長装置 |
| JPS6173334A (ja) * | 1984-09-19 | 1986-04-15 | Hitachi Ltd | 処理装置 |
| JPS61111524A (ja) * | 1984-11-06 | 1986-05-29 | Denkoo:Kk | 縦形半導体熱処理炉 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06196542A (ja) * | 1992-12-24 | 1994-07-15 | Nissin Electric Co Ltd | エアーロック室およびそのクリーニング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534108Y2 (US07923587-20110412-C00022.png) | 1993-08-30 |
