JPS63147641U - - Google Patents

Info

Publication number
JPS63147641U
JPS63147641U JP3844087U JP3844087U JPS63147641U JP S63147641 U JPS63147641 U JP S63147641U JP 3844087 U JP3844087 U JP 3844087U JP 3844087 U JP3844087 U JP 3844087U JP S63147641 U JPS63147641 U JP S63147641U
Authority
JP
Japan
Prior art keywords
clean
air
laminar flow
outlet
straightening plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3844087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3844087U priority Critical patent/JPS63147641U/ja
Publication of JPS63147641U publication Critical patent/JPS63147641U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP3844087U 1987-03-18 1987-03-18 Pending JPS63147641U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3844087U JPS63147641U (OSRAM) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3844087U JPS63147641U (OSRAM) 1987-03-18 1987-03-18

Publications (1)

Publication Number Publication Date
JPS63147641U true JPS63147641U (OSRAM) 1988-09-29

Family

ID=30850688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3844087U Pending JPS63147641U (OSRAM) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPS63147641U (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155205A (ja) * 2005-12-05 2007-06-21 Nippon Spindle Mfg Co Ltd クリーンブース
JP2009180441A (ja) * 2008-01-31 2009-08-13 Orion Mach Co Ltd 恒温空気供給装置
JP2010103001A (ja) * 2008-10-24 2010-05-06 Panasonic Electric Works Co Ltd 照明システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142748A (en) * 1975-06-03 1976-12-08 Hitachi Plant Eng & Constr Co Ltd Local cleaning device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142748A (en) * 1975-06-03 1976-12-08 Hitachi Plant Eng & Constr Co Ltd Local cleaning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007155205A (ja) * 2005-12-05 2007-06-21 Nippon Spindle Mfg Co Ltd クリーンブース
JP2009180441A (ja) * 2008-01-31 2009-08-13 Orion Mach Co Ltd 恒温空気供給装置
JP2010103001A (ja) * 2008-10-24 2010-05-06 Panasonic Electric Works Co Ltd 照明システム

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