JPS63147397A - Electronic parts assembly - Google Patents

Electronic parts assembly

Info

Publication number
JPS63147397A
JPS63147397A JP61295259A JP29525986A JPS63147397A JP S63147397 A JPS63147397 A JP S63147397A JP 61295259 A JP61295259 A JP 61295259A JP 29525986 A JP29525986 A JP 29525986A JP S63147397 A JPS63147397 A JP S63147397A
Authority
JP
Japan
Prior art keywords
electronic component
holding
adhesive sheet
holding plate
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61295259A
Other languages
Japanese (ja)
Inventor
朗 壁下
浜根 徳人
田中 倉平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61295259A priority Critical patent/JPS63147397A/en
Priority to DE19873740594 priority patent/DE3740594A1/en
Priority to US07/127,030 priority patent/US4829665A/en
Publication of JPS63147397A publication Critical patent/JPS63147397A/en
Pending legal-status Critical Current

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  • Supply And Installment Of Electrical Components (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は電子部品を基板に装着する電子部品装着装置に
好適に使用される電子部品集合体に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an electronic component assembly suitable for use in an electronic component mounting apparatus for mounting electronic components onto a board.

従来の技術 従来、電子部品を基板に装着する電子部品装着装置とし
て、第8図に示すように、テープ状の電子部品保持体3
2に一列状に形成された収容空間33内に電子部品31
を収容してなる電子部品集合体30を用い、この電子部
品集合体30を間欠移動させながら前記収容空間33を
覆う保護テープ34を剥離し、内部の電子部品31を吸
着7ズル35にて吸着して順次取出して基板に装着する
ように構成されたものが知られている。また、収容空間
33の代わりに粘着テープを用いて電子部品を粘着保持
するようにした電子部品保持体も知られてす3す、さら
にトレー上にばらの状態で電子部品31を保持させて吸
着ノズルで取り出すものも知られている。又、第9図に
示すように、移動枠37に張設された伸縮性及び粘着性
を有する保持シート36上に電子部品31を保持させ、
突き上げ針38にて電子部品31を突き上げて保持シー
ト36から分離するとともに吸着ノズル35にて吸着し
て電子部品を取り出すようにした電子部品装着装置も知
られている。
2. Description of the Related Art Conventionally, as an electronic component mounting device for mounting electronic components on a board, as shown in FIG. 8, a tape-shaped electronic component holder 3 is used.
Electronic components 31 are placed in a housing space 33 formed in a line in 2.
Using an electronic component assembly 30 that accommodates a There is a known structure in which the semiconductor devices are sequentially taken out and mounted on a board. Furthermore, there is also known an electronic component holder in which an adhesive tape is used instead of the storage space 33 to adhesively hold electronic components. It is also known that the material can be taken out using a nozzle. Further, as shown in FIG. 9, the electronic component 31 is held on a holding sheet 36 that is stretchable and adhesive and is stretched over the moving frame 37.
An electronic component mounting device is also known in which the electronic component 31 is pushed up with a push-up needle 38 to be separated from the holding sheet 36, and the electronic component is sucked with a suction nozzle 35 to take out the electronic component.

さらに、特公昭61−30737号公報にはバンプ電極
を有する電子部品を基板のリードに金属間接合して装着
固定する方法において、伸縮性を有する粘着シートに電
子部品を保持させ、この粘着シートを介して中空ツール
にて電子部品を押し下げてバンブ電極を基板のリードに
当接させ、中空ツール内の針を突出させて粘着シートを
貫通して電T一部品を押圧し、その状態から中空ツール
を持ち上げることによって粘着シートを電子部品から引
き剥し、しかる(麦側を電子部品から離脱させることに
よって、電子部品を粘着シートから不測に移動すること
なく分離し、さらにボンディングツールを電子部品に当
ててバンブ電極とリードを金属間接合する方法が開示さ
れている。
Furthermore, Japanese Patent Publication No. 61-30737 discloses a method of attaching and fixing electronic components having bump electrodes to the leads of a board by metal-to-metal bonding, in which the electronic components are held in a stretchable adhesive sheet, and the adhesive sheet is Push down the electronic component with the hollow tool to make the bump electrode contact the lead of the board, make the needle inside the hollow tool protrude, penetrate the adhesive sheet and press the electronic component, and from that state, press down the electronic component with the hollow tool. The adhesive sheet is peeled off from the electronic component by lifting the adhesive sheet, and the electronic component is separated from the adhesive sheet without being accidentally moved by separating the adhesive sheet from the electronic component, and then the bonding tool is applied to the electronic component. A method for metal-to-metal bonding of bump electrodes and leads is disclosed.

発明が解決しようとする問題点 ところが、上記のように電子部品31を吸着7ズル35
で吸着して移送し、基板にvc着するようにした構成で
は、装着時の動作工程数が多く、それだけ能率が悪く、
かつ特に微小な電子部品の場合には吸着失敗の可能性が
大きい等の問題があった。
Problems to be Solved by the Invention However, as described above, the electronic component 31 is
In a configuration in which it is adsorbed and transferred with a VC and then attached to a board by VC, the number of operation steps during installation is large, which makes it less efficient.
In addition, especially in the case of minute electronic components, there is a high possibility of suction failure.

また、特公昭61−3.0737号公報に開示された方
法は、吸着ノズルを用いずに粘着シートから電子部品を
直接基板に装着するため、装着時の動作工程数が少なく
、吸着失敗等の虞れもないが、金属間接合による装着方
法だけに適用されてす(ワ、しかも装着時における粘着
シートの伸縮動産や針による突き破りの際に、他の電子
部品の保持が不安定となり、位置精度も悪くなるという
問題がある。
In addition, the method disclosed in Japanese Patent Publication No. 61-3.0737 mounts electronic components directly from the adhesive sheet to the board without using a suction nozzle, so the number of operation steps during mounting is small, and there are no problems such as suction failures. There is no need to worry, but this applies only to attachment methods using metal-to-metal bonding (wa, what's more, if the adhesive sheet is pierced by an elastic movable object or a needle during attachment, the holding of other electronic components may become unstable and the position may become unstable). There is also the problem that accuracy deteriorates.

本発明はこのような問題点に鑑み、電子部品の保持が確
実で位置精度が高く、しかも装着時の動作工程数が少な
くて済み、電子部品の装着失敗を生じ難い電子部品集合
体を提供することを目的とする。
In view of these problems, the present invention provides an electronic component assembly in which electronic components can be held reliably and with high positional accuracy, the number of operation steps during mounting is small, and electronic component mounting failures are less likely to occur. The purpose is to

問題点を解決するための手段 本発明は上記目的を達成するため、剛性を有する保持板
に、この保持板を貫通するように多数の保持孔を穿設し
、各保持孔内1こ電子部品を嵌合し、これら電子部品の
基板に対する装着面とは反対側の側面に対応する前記保
持板の一側面に接着層を設け、この接着層にて前記電子
部品を前記保持孔内に保持したことを特徴とする。
Means for Solving the Problems In order to achieve the above object, the present invention provides a rigid holding plate with a large number of holding holes penetrating through the holding plate, and one electronic component is inserted into each holding hole. an adhesive layer is provided on one side of the holding plate corresponding to the side opposite to the surface on which the electronic components are mounted on the board, and the electronic component is held in the holding hole by this adhesive layer. It is characterized by

作用 本発明は上記構成を有しているので、電子部品は剛性の
ある保持板によって高い位置精度で、かつ接着層にて確
実に安定して保持される。又、前記保持板を基板上に、
保持板の接着層を基板とは反対側に位置させて対向配置
した状態で、保持孔内に接着ノーにて保持された電子部
品を適宜手段にて押し出すことによって、電子部品を直
接基板に装着することができ、装着時に少ない動作工程
数で、正確にかつ失敗なく確実に装着することができる
Function Since the present invention has the above configuration, the electronic component is held with high positional accuracy by the rigid holding plate and reliably and stably by the adhesive layer. Further, the holding plate is placed on the substrate,
With the adhesive layer of the holding plate located on the opposite side of the board and facing each other, the electronic parts held with adhesive in the holding holes are pushed out using appropriate means, and the electronic parts are mounted directly onto the board. This allows the device to be installed accurately and reliably without failure with a small number of operation steps during installation.

実施例 以下、本発明の一実施例を第1図〜第3図を参照しなが
ら説明する。2はステンレス鋼板等の剛性のある板材か
らなる円板状の保持板であって、電子部品1が丁度嵌合
可能な多数の保持孔3が整列状態て゛かつこの保持板2
を貫通させて穿設されている。この保持板2の一111
11面2aには、第3り1に詳細に示すように、粘着シ
ート4が貼着されている。そして、前記各保持孔3内に
は、電子部品lが基板に対する装着面を前記粘着シート
4とは反対側を向くようにして嵌合され、電子部品1の
粘着シート4側の側面が粘着シート4に接着されて電子
部品1が保持されている。これら電子部品1と保持板2
と粘着シート4にで電子部品集合体5が構成されている
EXAMPLE Hereinafter, an example of the present invention will be described with reference to FIGS. 1 to 3. Reference numeral 2 denotes a disc-shaped holding plate made of a rigid plate material such as a stainless steel plate, and a large number of holding holes 3 into which electronic components 1 can be fitted are aligned.
It is drilled through. One 111 of this holding plate 2
As shown in detail in the third section 1, an adhesive sheet 4 is attached to the 11th surface 2a. Then, an electronic component 1 is fitted into each of the holding holes 3 with the surface to be mounted on the board facing the opposite side from the adhesive sheet 4, and the side surface of the electronic component 1 on the adhesive sheet 4 side is attached to the adhesive sheet 4. 4 to hold the electronic component 1. These electronic components 1 and holding plate 2
and the adhesive sheet 4 constitute an electronic component assembly 5.

尚、この実施例では電子部品1の一対の対向辺に半円筒
状の位置決め部1aが形成され、保持孔3の対向面にも
これに対応して半円筒状の切欠3aが形成されている。
In this embodiment, a semi-cylindrical positioning portion 1a is formed on a pair of opposing sides of the electronic component 1, and a corresponding semi-cylindrical notch 3a is formed on the opposing surface of the holding hole 3. .

又、この電子部品集合体5は、保持孔3をパンチング形
成した保持板2の一側面に粘着シート4を貼着し、これ
を第3図に示すように粘着シート4を下にして支持面6
上に設置し、この保持板2の各保持孔3内に、電子部品
1をその装着面を」二にして挿入嵌合することによって
形成される。
In addition, this electronic component assembly 5 is made by pasting an adhesive sheet 4 on one side of the holding plate 2 in which holding holes 3 are punched, and placing the adhesive sheet 4 on the support surface with the adhesive sheet 4 facing down as shown in FIG. 6
It is formed by inserting and fitting the electronic component 1 into each holding hole 3 of this holding plate 2 with its mounting surface facing downward.

次に、前記電子部品集合体5を用いた電子部品装着装置
4とその装着動作を説明する。
Next, the electronic component mounting apparatus 4 using the electronic component assembly 5 and its mounting operation will be explained.

fPJ4図において、21は、水平でかつ互いに直交す
るX方向とY方向に移動並びに位置決め可能なX−Yテ
ーブルであり、その上面に電子部品1を装着すべき基板
22を載置固定できるように構成されている。このX−
Yテーブル21の上方位置に環状枠23が水平方向に移
動可能にかつ中心軸心回りに回転可能に配設され、この
環状枠23に前記電子部品集合体5が固定具24にて固
定支持されている。前記環状枠23の上方位置には、前
記X−Yテーブル21の中央部の上方位置に昇降並びに
軸心回りに回転可能な押し下げ軸25が配設され、その
下端から一対の押し出しビン26が延出されている。こ
の押し出しビン26は、第5図(a)に示すように、そ
の下端部に電子部品1の上面に係合して押圧する下向き
の段部26aを介して、電子部品1の両端部に形成され
た前記半円筒状の位置決め部1aに係合して電子部品1
の位置決めを行うテーバ部26bを有している。
In FIG. It is configured. This X-
An annular frame 23 is disposed above the Y table 21 so as to be movable in the horizontal direction and rotatable around the central axis, and the electronic component assembly 5 is fixedly supported on the annular frame 23 by a fixture 24. ing. A push-down shaft 25 is disposed above the annular frame 23 and above the central portion of the X-Y table 21, and is movable up and down as well as rotatable around its axis. It's being served. As shown in FIG. 5(a), the push-out pin 26 is formed at both ends of the electronic component 1 via a downward step portion 26a that engages and presses the top surface of the electronic component 1 at its lower end. The electronic component 1 is engaged with the semi-cylindrical positioning portion 1a that has been
It has a tapered portion 26b for positioning.

以上の構成において、まずX−Yテーブル21を作動さ
せ、その上に載置固定された基板22の電子部品1を装
着すべき位置を前記押し下げ軸25の軸心位置の下方位
置に位置決めする。次に、図示しない接着剤塗布装置に
て基板22の電子部品装着位置に接着剤を塗布する。次
いで、環状枠23を移動させ、装着すべき電子部品1の
中心を前記押し下げ紬25の軸心位置の下方位置に合致
させるとともに環状枠23を回転させて電子部品1の装
着姿勢を決め、次にj肖記押し下げ軸25を回転させて
電子部品1の姿勢に押し下げ紬25の姿勢を合わせる。
In the above configuration, first, the X-Y table 21 is operated, and the position on which the electronic component 1 of the board 22 placed and fixed thereon is to be mounted is positioned below the axial center of the push-down shaft 25. Next, an adhesive is applied to the electronic component mounting position of the board 22 using an adhesive application device (not shown). Next, the annular frame 23 is moved to align the center of the electronic component 1 to be mounted with the lower axis of the push-down pongee 25, and the annular frame 23 is rotated to determine the mounting posture of the electronic component 1. Then, rotate the push-down shaft 25 to match the attitude of the push-down pongee 25 with the attitude of the electronic component 1.

そうして、押し下げ紬25を下降させ、その押し出しビ
ン26にて粘着シート4を突き破って電子部品1を押圧
することにより、第5図(b)に示すように、粘着シー
ト4にて保持された電子部品1を保持孔3から押し出し
、直接基板22に装着することができる。
Then, the push-down pongee 25 is lowered, and the pushing pin 26 breaks through the adhesive sheet 4 and presses the electronic component 1, so that the electronic component 1 is held by the adhesive sheet 4 as shown in FIG. 5(b). The electronic component 1 can be pushed out from the holding hole 3 and mounted directly on the board 22.

尚、この実施例の場合、押し出しビン26の段部26a
にて電子部品1の上面を押圧して粘着シート4の保持力
に抗して電子部品1を保持孔3から押し出すとともに、
テーバ部26bを電子部品1の半円筒状の位置決め部1
aiこ係合させて電子部品1の位置決めを行うことによ
り、電子部品1をその位置決めを行いながら基板22上
に装着することができる。又、基板22と保持板2との
間の間隔が広い場合は、押し下げ軸25に電子部品1を
吸着する吸着ノズルを付着したり、半円筒状の位置決め
部1alこ係合して電子部品1の下降を案内するがイド
ビンを設けてもよい。
In addition, in the case of this embodiment, the step portion 26a of the push-out bottle 26
Press the top surface of the electronic component 1 to push the electronic component 1 out of the holding hole 3 against the holding force of the adhesive sheet 4, and
The tapered portion 26b is connected to the semi-cylindrical positioning portion 1 of the electronic component 1.
By positioning the electronic component 1 through engagement, the electronic component 1 can be mounted on the board 22 while being positioned. If the distance between the substrate 22 and the holding plate 2 is wide, a suction nozzle for suctioning the electronic component 1 may be attached to the push-down shaft 25, or a semi-cylindrical positioning portion 1al may be engaged with the electronic component 1. An idbin may be provided to guide the descent.

次に、第6図及び第7図(a)、同(b)に基づいて本
発明の第2実施例を説明する。この実施例は上記第1実
施例における粘着シート4の代わりに接着剤層を用いた
例である。即ち、第6図にすjいて、12は保持板で、
多数の保持孔13が貫通して穿設されている。そして、
各保持孔13に電子部品1が嵌合されるとともに、保持
板12の一側面12aに塗布された援用剤層14にて保
持されている。
Next, a second embodiment of the present invention will be described based on FIGS. 6 and 7(a) and 7(b). This embodiment is an example in which an adhesive layer is used in place of the adhesive sheet 4 in the first embodiment. That is, in Fig. 6, 12 is a holding plate;
A large number of holding holes 13 are drilled through. and,
The electronic component 1 is fitted into each holding hole 13 and is held by a support agent layer 14 coated on one side 12 a of the holding plate 12 .

この電子部品集合体15は、第6図に示すように、保持
孔13をパンチング形成された保持板12を支持面16
上に設置し、各保持孔13に電子部品1をその基板に対
する装着面を支持面16側に向けて挿入嵌合し、その後
保持板12の上面の11ぼ仝面1−培A剤本冷布1−で
接着剤層14を形成し、この接着剤層14にて電子部品
1を保持することによって形成される。
As shown in FIG. 6, this electronic component assembly 15 has a holding plate 12 formed by punching holding holes 13 on a supporting surface 16.
Insert and fit the electronic component 1 into each holding hole 13 with the mounting surface for the board facing the support surface 16 side, and then insert the top surface of the holding plate 12 into the It is formed by forming an adhesive layer 14 with cloth 1- and holding electronic component 1 with this adhesive layer 14.

また、この電子部品集合体15を用いた電子部品1の装
着は、第7図<a> 、 (1,、)に示すように、接
着剤層14が基板22とは反対側に位置するように電子
部品集合体15を配置し、第1実施例と同様に押し出し
ビン26にて接着剤層111による保持力に抗して電子
部品1を押し出すことによって装着することができる。
Furthermore, when mounting the electronic component 1 using the electronic component assembly 15, the adhesive layer 14 is positioned on the opposite side of the substrate 22, as shown in FIG. The electronic component assembly 15 can be disposed in the same manner as in the first embodiment, and the electronic component 1 can be mounted by pushing out the electronic component 1 using the pushing bottle 26 against the holding force of the adhesive layer 111, as in the first embodiment.

又、この実施例では、基板22に装着後にも各電子部品
1の装着面とは反対側の面が接着削屑14にて覆われて
おり、この接着剤層14が保護膜として作用するどい・
)利点もある。
Further, in this embodiment, even after mounting on the board 22, the surface of each electronic component 1 opposite to the mounting surface is covered with adhesive shavings 14, and this adhesive layer 14 acts as a protective film.
) There are also advantages.

発明の効果 本発明の電子一部品集合体によれば、以上のように、電
r一部品は剛性のある保持板によって高い位置精度で、
かつ接着層にて確実に安定して保持される3、又、保持
孔内に接着層にて保持された電子部品を適宜手段にて押
し出すことによって、電子部品を直接2F+Fiに装着
することができ、Xλ7 [j、l? jこ少ない動作
工程数で、正確にかつ失敗なく確実に装着することがで
きる等、大なる効果を発揮する。
Effects of the Invention According to the electronic component assembly of the present invention, as described above, the electronic component can be positioned with high positional accuracy by the rigid holding plate.
Moreover, the electronic component can be reliably and stably held by the adhesive layer 3, and by pushing out the electronic component held by the adhesive layer into the holding hole by an appropriate means, the electronic component can be directly attached to 2F+Fi. , Xλ7 [j, l? It has great effects, such as being able to attach it accurately and without failure with a small number of operating steps.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第3図は本発明の第1実施例を示し、第1図(
a)は電子部品集合体の平面図、同(11)は同正面図
、′jS2図は同要部の拡大平面図、tjS3図は第2
図の■−■線断面図、第4図は電子部品集合体の部分断
面正面図、第5図(a)、同(I〕)は第1実施例にお
ける電子部品の装着過程を示す縦断面図、第6図及び第
7図は本発明の第2の実施例を示し、第6図は電子部品
集合体の要部の第3図と同様の断面図、第7図(a)、
同(b)はft42実施例における電子部品の装着過程
を示す断面図、第:]図及び第9図はそれぞれ従来例の
要部の概略構成を示す縦断正面図である。 1・・・・・・・・・・・・・・・・・・電子部品2.
12・・・・・・・・・保持板 3.13・・・・・・・・・保持孔 4・・・・・・・・・・・・・・・・・・粘着シート5
・・・・・・・・・・・・・・・・・・電子部品集合体
14・・・・・・・・・・・・・・・・・・接着剤層。 代理人のへ6弁理士 中尾敏男 ほか1名I     
  4 第4図 第5図(a)   第5図b) 第7図(a)  第7図(b) 第8図 第9図
1 to 3 show a first embodiment of the present invention, and FIG.
a) is a plan view of the electronic component assembly, (11) is a front view of the same, Figure 'jS2 is an enlarged plan view of the same main part, Figure tjS3 is the second
4 is a partially sectional front view of the electronic component assembly, and FIGS. 5(a) and 5(I) are longitudinal sections showing the mounting process of electronic components in the first embodiment. 6 and 7 show a second embodiment of the present invention, FIG. 6 is a sectional view similar to FIG. 3 of the main part of the electronic component assembly, FIG. 7(a),
FIG. 9(b) is a sectional view showing the mounting process of electronic components in the FT42 embodiment, and FIGS. 1・・・・・・・・・・・・・・・Electronic parts 2.
12......Retaining plate 3.13......Retaining hole 4......Adhesive sheet 5
.........Electronic component assembly 14......Adhesive layer. Agent Nohe 6 Patent Attorney Toshio Nakao and 1 other person I
4 Figure 4 Figure 5 (a) Figure 5 b) Figure 7 (a) Figure 7 (b) Figure 8 Figure 9

Claims (1)

【特許請求の範囲】[Claims]  剛性を有する保持板に、この保持板を貫通するように
多数の保持孔を穿設し、各保持孔内に電子部品を嵌合し
、これら電子部品の基板に対する装着面とは反対側の側
面に対応する前記保持板の一側面に接着層を設け、この
接着層にて前記電子部品を前記保持孔内に保持したこと
を特徴とする電子部品集合体。
A large number of holding holes are formed in a rigid holding plate so as to pass through the holding plate, and electronic components are fitted into each holding hole. An electronic component assembly characterized in that an adhesive layer is provided on one side of the holding plate corresponding to the holding plate, and the electronic component is held in the holding hole by the adhesive layer.
JP61295259A 1986-12-01 1986-12-11 Electronic parts assembly Pending JPS63147397A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP61295259A JPS63147397A (en) 1986-12-11 1986-12-11 Electronic parts assembly
DE19873740594 DE3740594A1 (en) 1986-12-01 1987-11-30 METHOD AND DEVICE FOR MOUNTING ELECTRONIC COMPONENTS
US07/127,030 US4829665A (en) 1986-12-01 1987-11-30 Method and apparatus for mounting electronic components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61295259A JPS63147397A (en) 1986-12-11 1986-12-11 Electronic parts assembly

Publications (1)

Publication Number Publication Date
JPS63147397A true JPS63147397A (en) 1988-06-20

Family

ID=17818273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61295259A Pending JPS63147397A (en) 1986-12-01 1986-12-11 Electronic parts assembly

Country Status (1)

Country Link
JP (1) JPS63147397A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753700B2 (en) * 1974-09-11 1982-11-15
JPS6025199B2 (en) * 1979-05-31 1985-06-17 日本パ−オキサイド株式会社 Hydrogen peroxide decomposition removal method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753700B2 (en) * 1974-09-11 1982-11-15
JPS6025199B2 (en) * 1979-05-31 1985-06-17 日本パ−オキサイド株式会社 Hydrogen peroxide decomposition removal method

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