JPS63147262U - - Google Patents

Info

Publication number
JPS63147262U
JPS63147262U JP4115887U JP4115887U JPS63147262U JP S63147262 U JPS63147262 U JP S63147262U JP 4115887 U JP4115887 U JP 4115887U JP 4115887 U JP4115887 U JP 4115887U JP S63147262 U JPS63147262 U JP S63147262U
Authority
JP
Japan
Prior art keywords
polishing tool
pressure
displacement
amount
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4115887U
Other languages
English (en)
Other versions
JPH0448927Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987041158U priority Critical patent/JPH0448927Y2/ja
Priority to US07/169,060 priority patent/US4974368A/en
Publication of JPS63147262U publication Critical patent/JPS63147262U/ja
Priority to US07/569,386 priority patent/US4999954A/en
Application granted granted Critical
Publication of JPH0448927Y2 publication Critical patent/JPH0448927Y2/ja
Priority to US08/157,440 priority patent/US5347763A/en
Expired legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Description

【図面の簡単な説明】
第１図は本考案の構成を説明する図。 １……加工物、２……保持テーブル、４……研
磨工具、８……変位センサー、１０……変換手段
、１２……補正値計算手段。

Claims (1)

  1. 【実用新案登録請求の範囲】 加工物加工面に研磨工具を圧接して研磨する装
    置において、研磨工具の変位量を検出し、 該検出信号を前記研磨工具に圧力を付与する圧
    力手段の調節器に入力し、 前記変位量に応じて前記圧力手段の圧力出力を
    制御するようにしたことを特徴とする研磨圧力制
    御装置。
JP1987041158U 1987-03-19 1987-03-19 Expired JPH0448927Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1987041158U JPH0448927Y2 (ja) 1987-03-19 1987-03-19
US07/169,060 US4974368A (en) 1987-03-19 1988-03-16 Polishing apparatus
US07/569,386 US4999954A (en) 1987-03-19 1990-08-15 Polishing apparatus
US08/157,440 US5347763A (en) 1987-03-19 1993-11-26 Polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987041158U JPH0448927Y2 (ja) 1987-03-19 1987-03-19

Publications (2)

Publication Number Publication Date
JPS63147262U true JPS63147262U (ja) 1988-09-28
JPH0448927Y2 JPH0448927Y2 (ja) 1992-11-18

Family

ID=30855900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987041158U Expired JPH0448927Y2 (ja) 1987-03-19 1987-03-19

Country Status (1)

Country Link
JP (1) JPH0448927Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184671A (en) * 1981-05-11 1982-11-13 Hitachi Ltd Machining device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184671A (en) * 1981-05-11 1982-11-13 Hitachi Ltd Machining device

Also Published As

Publication number Publication date
JPH0448927Y2 (ja) 1992-11-18

Similar Documents

Publication Publication Date Title
JPH0266928U (ja)
JPS63147262U (ja)
JPS6410343U (ja)
JPS6412032U (ja)
JPH03120358U (ja)
JPS61134829U (ja)
JPH01166061U (ja)
JPS6412764U (ja)
JPS61134832U (ja)
JPS5822247U (ja) 円筒研削盤
JPH01129061U (ja)
JPS62195444U (ja)
JPH01138628U (ja)
JPS6199493U (ja)
JPS6185341U (ja)
JPS62155929U (ja)
JPS6181858U (ja)
JPS6258136U (ja)
JPH0174052U (ja)
JPS6395642U (ja)
JPS63151270U (ja)
JPH0184961U (ja)
JPH01104541U (ja)
JPS6288534U (ja)
JPH01153888U (ja)