JPS63145357U - - Google Patents

Info

Publication number
JPS63145357U
JPS63145357U JP3587387U JP3587387U JPS63145357U JP S63145357 U JPS63145357 U JP S63145357U JP 3587387 U JP3587387 U JP 3587387U JP 3587387 U JP3587387 U JP 3587387U JP S63145357 U JPS63145357 U JP S63145357U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoelectric actuator
electrode
fixed
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3587387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3587387U priority Critical patent/JPS63145357U/ja
Publication of JPS63145357U publication Critical patent/JPS63145357U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【図面の簡単な説明】
第1図は本考案の圧電アクチユエータの一実施
例を示す平面図、第2図は第1図の正面断面図、
第3図〜第5図は本考案の他の実施例を示す平面
図、第6図は更に本考案の別の実施例を示す正面
断面図である。 10,20,30,40,50……振動板、1
2,22,32,42,52……圧電板、13,
23,33,43,53……貫通孔。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電極を具えた圧電素子を振動板に固着し、該電
    極に印加する電界によつて生する該圧電素子の歪
    みによつて該振動板を振動させて変位を得る圧電
    アクチユエータにおいて、該振動板の両端または
    周囲が支持部材に固着されるとともに該振動板の
    一部分に貫通孔が形成されたことを特徴とする圧
    電アクチユエータ。
JP3587387U 1987-03-13 1987-03-13 Pending JPS63145357U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3587387U JPS63145357U (ja) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3587387U JPS63145357U (ja) 1987-03-13 1987-03-13

Publications (1)

Publication Number Publication Date
JPS63145357U true JPS63145357U (ja) 1988-09-26

Family

ID=30845758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3587387U Pending JPS63145357U (ja) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPS63145357U (ja)

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