JPS63144953U - - Google Patents

Info

Publication number
JPS63144953U
JPS63144953U JP19199086U JP19199086U JPS63144953U JP S63144953 U JPS63144953 U JP S63144953U JP 19199086 U JP19199086 U JP 19199086U JP 19199086 U JP19199086 U JP 19199086U JP S63144953 U JPS63144953 U JP S63144953U
Authority
JP
Japan
Prior art keywords
wafer
receiving part
receiving
tapered
receiving surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19199086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19199086U priority Critical patent/JPS63144953U/ja
Publication of JPS63144953U publication Critical patent/JPS63144953U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP19199086U 1986-12-12 1986-12-12 Pending JPS63144953U (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19199086U JPS63144953U (US08177716-20120515-C00003.png) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19199086U JPS63144953U (US08177716-20120515-C00003.png) 1986-12-12 1986-12-12

Publications (1)

Publication Number Publication Date
JPS63144953U true JPS63144953U (US08177716-20120515-C00003.png) 1988-09-26

Family

ID=31146649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19199086U Pending JPS63144953U (US08177716-20120515-C00003.png) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPS63144953U (US08177716-20120515-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02178948A (ja) * 1988-12-29 1990-07-11 Disco Abrasive Syst Ltd ウエーハ塔載フレームのプリアライメント方法
JPH03101247A (ja) * 1988-11-30 1991-04-26 Tokyo Electron Ltd 処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03101247A (ja) * 1988-11-30 1991-04-26 Tokyo Electron Ltd 処理装置
JPH02178948A (ja) * 1988-12-29 1990-07-11 Disco Abrasive Syst Ltd ウエーハ塔載フレームのプリアライメント方法

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