JPS63144195A - ダイヤモンド薄膜の形成装置 - Google Patents

ダイヤモンド薄膜の形成装置

Info

Publication number
JPS63144195A
JPS63144195A JP28678986A JP28678986A JPS63144195A JP S63144195 A JPS63144195 A JP S63144195A JP 28678986 A JP28678986 A JP 28678986A JP 28678986 A JP28678986 A JP 28678986A JP S63144195 A JPS63144195 A JP S63144195A
Authority
JP
Japan
Prior art keywords
diamond
container
substrate
base material
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28678986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0369878B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shigechika Kosuge
小菅　茂義
Moriaki Ono
守章 小野
Kiyokazu Nakada
清和 仲田
Itaru Watanabe
渡邊　之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP28678986A priority Critical patent/JPS63144195A/ja
Publication of JPS63144195A publication Critical patent/JPS63144195A/ja
Publication of JPH0369878B2 publication Critical patent/JPH0369878B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP28678986A 1986-12-03 1986-12-03 ダイヤモンド薄膜の形成装置 Granted JPS63144195A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28678986A JPS63144195A (ja) 1986-12-03 1986-12-03 ダイヤモンド薄膜の形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28678986A JPS63144195A (ja) 1986-12-03 1986-12-03 ダイヤモンド薄膜の形成装置

Publications (2)

Publication Number Publication Date
JPS63144195A true JPS63144195A (ja) 1988-06-16
JPH0369878B2 JPH0369878B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-05

Family

ID=17709065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28678986A Granted JPS63144195A (ja) 1986-12-03 1986-12-03 ダイヤモンド薄膜の形成装置

Country Status (1)

Country Link
JP (1) JPS63144195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4981717A (en) * 1989-02-24 1991-01-01 Mcdonnell Douglas Corporation Diamond like coating and method of forming
JPH04164807A (ja) * 1990-10-25 1992-06-10 Shimadzu Corp ダイヤモンド表面改質法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122796A (ja) * 1983-12-06 1985-07-01 Sumitomo Electric Ind Ltd ダイヤモンドの気相合成法
JPS60127293A (ja) * 1983-12-15 1985-07-06 Asahi Chem Ind Co Ltd ダイヤモンドの製造方法
JPS61201694A (ja) * 1985-02-28 1986-09-06 Nec Corp ダイヤモンドの気相合成法
JPS6385011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-11-20 1988-06-03

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60122796A (ja) * 1983-12-06 1985-07-01 Sumitomo Electric Ind Ltd ダイヤモンドの気相合成法
JPS60127293A (ja) * 1983-12-15 1985-07-06 Asahi Chem Ind Co Ltd ダイヤモンドの製造方法
JPS61201694A (ja) * 1985-02-28 1986-09-06 Nec Corp ダイヤモンドの気相合成法
JPS6385011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-11-20 1988-06-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4981717A (en) * 1989-02-24 1991-01-01 Mcdonnell Douglas Corporation Diamond like coating and method of forming
JPH04164807A (ja) * 1990-10-25 1992-06-10 Shimadzu Corp ダイヤモンド表面改質法

Also Published As

Publication number Publication date
JPH0369878B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-05

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