JPS63143568U - - Google Patents
Info
- Publication number
- JPS63143568U JPS63143568U JP3529687U JP3529687U JPS63143568U JP S63143568 U JPS63143568 U JP S63143568U JP 3529687 U JP3529687 U JP 3529687U JP 3529687 U JP3529687 U JP 3529687U JP S63143568 U JPS63143568 U JP S63143568U
- Authority
- JP
- Japan
- Prior art keywords
- sectional
- target
- view
- showing
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3529687U JPS63143568U (cs) | 1987-03-11 | 1987-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3529687U JPS63143568U (cs) | 1987-03-11 | 1987-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63143568U true JPS63143568U (cs) | 1988-09-21 |
Family
ID=30844658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3529687U Pending JPS63143568U (cs) | 1987-03-11 | 1987-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63143568U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006104570A (ja) * | 2004-09-30 | 2006-04-20 | Applied Films Corp | スパッタリング用の非接着式回転ターゲット |
| JP2013133490A (ja) * | 2011-12-26 | 2013-07-08 | Tokuriki Honten Co Ltd | 円筒形スパッタリングターゲットおよびその製造方法 |
-
1987
- 1987-03-11 JP JP3529687U patent/JPS63143568U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006104570A (ja) * | 2004-09-30 | 2006-04-20 | Applied Films Corp | スパッタリング用の非接着式回転ターゲット |
| JP2011117078A (ja) * | 2004-09-30 | 2011-06-16 | Applied Materials Inc | スパッタリング用の非接着式回転ターゲット |
| JP2013133490A (ja) * | 2011-12-26 | 2013-07-08 | Tokuriki Honten Co Ltd | 円筒形スパッタリングターゲットおよびその製造方法 |