JPS62182972U - - Google Patents
Info
- Publication number
- JPS62182972U JPS62182972U JP7097586U JP7097586U JPS62182972U JP S62182972 U JPS62182972 U JP S62182972U JP 7097586 U JP7097586 U JP 7097586U JP 7097586 U JP7097586 U JP 7097586U JP S62182972 U JPS62182972 U JP S62182972U
- Authority
- JP
- Japan
- Prior art keywords
- corrosion
- permanent magnet
- resistant material
- magnetron sputtering
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims 4
- 238000005260 corrosion Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 238000007747 plating Methods 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7097586U JPS62182972U (cs) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7097586U JPS62182972U (cs) | 1986-05-12 | 1986-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182972U true JPS62182972U (cs) | 1987-11-20 |
Family
ID=30913108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7097586U Pending JPS62182972U (cs) | 1986-05-12 | 1986-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182972U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04202662A (ja) * | 1990-11-30 | 1992-07-23 | Anelva Corp | マグネトロンスパッタ装置 |
| JP2007088511A (ja) * | 2006-12-20 | 2007-04-05 | Neomax Co Ltd | 磁気回路の製造方法 |
-
1986
- 1986-05-12 JP JP7097586U patent/JPS62182972U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04202662A (ja) * | 1990-11-30 | 1992-07-23 | Anelva Corp | マグネトロンスパッタ装置 |
| JP2007088511A (ja) * | 2006-12-20 | 2007-04-05 | Neomax Co Ltd | 磁気回路の製造方法 |
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