JPS63143567U - - Google Patents
Info
- Publication number
- JPS63143567U JPS63143567U JP3519887U JP3519887U JPS63143567U JP S63143567 U JPS63143567 U JP S63143567U JP 3519887 U JP3519887 U JP 3519887U JP 3519887 U JP3519887 U JP 3519887U JP S63143567 U JPS63143567 U JP S63143567U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sputtering
- depositing
- view
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3519887U JPS63143567U (es) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3519887U JPS63143567U (es) | 1987-03-12 | 1987-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63143567U true JPS63143567U (es) | 1988-09-21 |
Family
ID=30844468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3519887U Pending JPS63143567U (es) | 1987-03-12 | 1987-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63143567U (es) |
-
1987
- 1987-03-12 JP JP3519887U patent/JPS63143567U/ja active Pending
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