JPS63142831U - - Google Patents
Info
- Publication number
- JPS63142831U JPS63142831U JP3568387U JP3568387U JPS63142831U JP S63142831 U JPS63142831 U JP S63142831U JP 3568387 U JP3568387 U JP 3568387U JP 3568387 U JP3568387 U JP 3568387U JP S63142831 U JPS63142831 U JP S63142831U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- pair
- liquid
- arms holding
- processing position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 230000032258 transport Effects 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3568387U JPS63142831U (ko) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3568387U JPS63142831U (ko) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142831U true JPS63142831U (ko) | 1988-09-20 |
Family
ID=30845389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3568387U Pending JPS63142831U (ko) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142831U (ko) |
-
1987
- 1987-03-10 JP JP3568387U patent/JPS63142831U/ja active Pending