JPS63142828U - - Google Patents
Info
- Publication number
- JPS63142828U JPS63142828U JP3560587U JP3560587U JPS63142828U JP S63142828 U JPS63142828 U JP S63142828U JP 3560587 U JP3560587 U JP 3560587U JP 3560587 U JP3560587 U JP 3560587U JP S63142828 U JPS63142828 U JP S63142828U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotating
- spinner device
- opening
- closing lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3560587U JPS63142828U (de) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3560587U JPS63142828U (de) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142828U true JPS63142828U (de) | 1988-09-20 |
Family
ID=30845253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3560587U Pending JPS63142828U (de) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142828U (de) |
-
1987
- 1987-03-10 JP JP3560587U patent/JPS63142828U/ja active Pending