JPS63141893U - - Google Patents
Info
- Publication number
- JPS63141893U JPS63141893U JP3486887U JP3486887U JPS63141893U JP S63141893 U JPS63141893 U JP S63141893U JP 3486887 U JP3486887 U JP 3486887U JP 3486887 U JP3486887 U JP 3486887U JP S63141893 U JPS63141893 U JP S63141893U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- pump
- valve
- displacement device
- vacuum valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 8
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3486887U JPS63141893U (en:Method) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3486887U JPS63141893U (en:Method) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63141893U true JPS63141893U (en:Method) | 1988-09-19 |
Family
ID=30843823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3486887U Pending JPS63141893U (en:Method) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141893U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (en:Method) * | 1989-04-20 | 1990-11-26 | ||
| JPH0533044A (ja) * | 1991-07-26 | 1993-02-09 | Daido Steel Co Ltd | 真空炉 |
-
1987
- 1987-03-10 JP JP3486887U patent/JPS63141893U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02140971U (en:Method) * | 1989-04-20 | 1990-11-26 | ||
| JPH0533044A (ja) * | 1991-07-26 | 1993-02-09 | Daido Steel Co Ltd | 真空炉 |
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