JPS63141893U - - Google Patents

Info

Publication number
JPS63141893U
JPS63141893U JP3486887U JP3486887U JPS63141893U JP S63141893 U JPS63141893 U JP S63141893U JP 3486887 U JP3486887 U JP 3486887U JP 3486887 U JP3486887 U JP 3486887U JP S63141893 U JPS63141893 U JP S63141893U
Authority
JP
Japan
Prior art keywords
vacuum
pump
valve
displacement device
vacuum valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3486887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3486887U priority Critical patent/JPS63141893U/ja
Publication of JPS63141893U publication Critical patent/JPS63141893U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3486887U 1987-03-10 1987-03-10 Pending JPS63141893U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3486887U JPS63141893U (US08063081-20111122-C00044.png) 1987-03-10 1987-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3486887U JPS63141893U (US08063081-20111122-C00044.png) 1987-03-10 1987-03-10

Publications (1)

Publication Number Publication Date
JPS63141893U true JPS63141893U (US08063081-20111122-C00044.png) 1988-09-19

Family

ID=30843823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3486887U Pending JPS63141893U (US08063081-20111122-C00044.png) 1987-03-10 1987-03-10

Country Status (1)

Country Link
JP (1) JPS63141893U (US08063081-20111122-C00044.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140971U (US08063081-20111122-C00044.png) * 1989-04-20 1990-11-26
JPH0533044A (ja) * 1991-07-26 1993-02-09 Daido Steel Co Ltd 真空炉

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140971U (US08063081-20111122-C00044.png) * 1989-04-20 1990-11-26
JPH0533044A (ja) * 1991-07-26 1993-02-09 Daido Steel Co Ltd 真空炉

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