JPS63140661U - - Google Patents

Info

Publication number
JPS63140661U
JPS63140661U JP1987033719U JP3371987U JPS63140661U JP S63140661 U JPS63140661 U JP S63140661U JP 1987033719 U JP1987033719 U JP 1987033719U JP 3371987 U JP3371987 U JP 3371987U JP S63140661 U JPS63140661 U JP S63140661U
Authority
JP
Japan
Prior art keywords
laminated
strain gauge
ceramic actuator
face
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987033719U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987033719U priority Critical patent/JPS63140661U/ja
Publication of JPS63140661U publication Critical patent/JPS63140661U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1987033719U 1987-03-06 1987-03-06 Pending JPS63140661U (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987033719U JPS63140661U (US06346242-20020212-C00066.png) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987033719U JPS63140661U (US06346242-20020212-C00066.png) 1987-03-06 1987-03-06

Publications (1)

Publication Number Publication Date
JPS63140661U true JPS63140661U (US06346242-20020212-C00066.png) 1988-09-16

Family

ID=30841590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987033719U Pending JPS63140661U (US06346242-20020212-C00066.png) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPS63140661U (US06346242-20020212-C00066.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283180A (ja) * 1987-05-15 1988-11-21 Yokogawa Electric Corp 変位センサを有する圧電アクチュエ−タ
JP2003309983A (ja) * 2002-04-15 2003-10-31 Kyocera Corp 案内装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS6364580A (ja) * 1986-09-02 1988-03-23 Hitachi Constr Mach Co Ltd 圧電アクチユエ−タ
JPS6366980A (ja) * 1986-09-09 1988-03-25 Nippon Denso Co Ltd 積層型圧電体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS6364580A (ja) * 1986-09-02 1988-03-23 Hitachi Constr Mach Co Ltd 圧電アクチユエ−タ
JPS6366980A (ja) * 1986-09-09 1988-03-25 Nippon Denso Co Ltd 積層型圧電体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63283180A (ja) * 1987-05-15 1988-11-21 Yokogawa Electric Corp 変位センサを有する圧電アクチュエ−タ
JP2003309983A (ja) * 2002-04-15 2003-10-31 Kyocera Corp 案内装置

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