JPS63140623U - - Google Patents
Info
- Publication number
- JPS63140623U JPS63140623U JP3243987U JP3243987U JPS63140623U JP S63140623 U JPS63140623 U JP S63140623U JP 3243987 U JP3243987 U JP 3243987U JP 3243987 U JP3243987 U JP 3243987U JP S63140623 U JPS63140623 U JP S63140623U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- bottle
- filter
- pipe
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Closures For Containers (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3243987U JPH0342676Y2 (xx) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3243987U JPH0342676Y2 (xx) | 1987-03-05 | 1987-03-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140623U true JPS63140623U (xx) | 1988-09-16 |
| JPH0342676Y2 JPH0342676Y2 (xx) | 1991-09-06 |
Family
ID=30839119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3243987U Expired JPH0342676Y2 (xx) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342676Y2 (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015228437A (ja) * | 2014-06-02 | 2015-12-17 | 東京エレクトロン株式会社 | 半導体製造用処理液配管継手 |
-
1987
- 1987-03-05 JP JP3243987U patent/JPH0342676Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015228437A (ja) * | 2014-06-02 | 2015-12-17 | 東京エレクトロン株式会社 | 半導体製造用処理液配管継手 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342676Y2 (xx) | 1991-09-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63140623U (xx) | ||
| JPS6237932U (xx) | ||
| JPS62101230U (xx) | ||
| JPS6370144U (xx) | ||
| JPH01100435U (xx) | ||
| JPH0334064U (xx) | ||
| JPH02118926U (xx) | ||
| JPS5840275U (ja) | 塗布装置 | |
| JPS6343425U (xx) | ||
| JPS59180768U (ja) | グリ−ス塗布装置 | |
| JPH0394979U (xx) | ||
| JPS6426836U (xx) | ||
| JPS5911438U (ja) | 拡散源塗布液の滴下ノズル | |
| JPS637400U (xx) | ||
| JPS62131440U (xx) | ||
| JPS63100825U (xx) | ||
| JPS62190338U (xx) | ||
| JPH0199481U (xx) | ||
| JPS62193725U (xx) | ||
| JPH0288233U (xx) | ||
| JPS599084U (ja) | 化学的気相成長装置 | |
| JPS63162528U (xx) | ||
| JPS63164215U (xx) | ||
| JPS58114042U (ja) | シリコンウエハ−の洗浄装置 | |
| JPH0227724U (xx) |